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SEMI T4-0301 © SEMI 1995 , 2001 2 Figure 1 NOTICE: SEMI makes no warranties or representations as to the su itability of the standards set forth herein for any particular application. The determ i nation of the su itabil…
SEMI T4-0301 © SEMI 1995, 20011
SEMI T4-0301
SPECIFICATION FOR 150 mm AND 200 mm POD IDENTIFICATION
DIMENSIONS
This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is
the direct responsibility of the European Equipment Automation Committee. Current edition approved by the
European Regional Standards Committee on December 20, 2000. Initially available at www.semi.org
February 2001; to be published March 2001. Originally published in 1995.
1 Purpose
1.1 The purpose of this specification is to ensure
dimensional compatibility when mounting pod
identification tags and tag identification devices.
2 Scope
2.1 The scope of this specification is to define:
• free space at a pod to allow the mounting of a pod
identification tag, and
• free space to allow data transmission.
2.2 This specification is applicable to 150 mm and 200
mm Standard Mechanical Interfaces (SEMI E19). The
space required for pod handling per SEMI E47 is
considered.
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This specification applies to pod identification
only.
4 Referenced Standards
4.1 SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E47 — Specification for 150 mm/200 mm Pod
Handles
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 pod — a box having a Standard Mechanical
Interface (SMIF) per SEMI E19.
5.2 Pod Identification Tag — information carrier
mounted to a pod.
5.3 Standard Mechanical Interface (SMIF) —
interface plane between pod and another
minienvironment per SEMI E19.
5.4 Tag Identification Device — device for
transferring information from/to a pod identification
tag.
6 Requirements
6.1 The defined free space for a pod identification tag
(see Figure 1) may not be used by any other device than
the pod identification tag and its supports.
6.1.1 The pod identification tag and its supports may
not exceed the outline of the defined free space for a
pod identification tag (see Related Information Section
R1-1).
6.2 The defined free space for data transmission (see
Figure 1) may only be used by the tag identification
device if necessary (see Related Information Section
R1-2).
Table 1 Dimensions of Defined Free Space
Dimension 150 mm SMIF 200 mm SMIF
A1 130 mm 167.5 mm
A2 160 mm min.
180 mm recommended
207.5 mm min.
227.5 mm recommended
A3 70 mm 70 mm
B1 36 mm 36 mm
B2 43 mm 43 mm
B3 120 mm 120 mm
SEMI T4-0301 © SEMI 1995, 2001 2
Figure 1
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
SEMI T4-0301 © SEMI 1995, 20013
RELATED INFORMATION 1
NOTE: This related information is not an official part of SEMI T4, but was approved for publication by full letter ballot
procedures in 1995.
R1-1 As the outline of the pod sidewall is not
standardized, the available space for the pod
identification tag may vary between different pod types.
R1-2 The defined free space for data transmission
should not be obstructed for the following reasons:
• data transmission
• loading/unloading
• SEMI E15 (multiple row applications)
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.