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SEMI T3-0302 © SEMI 1995, 2002 1 SEMI T3-0302 SPECIFICA TION FOR WA FER BOX LABELS This specification was technically appr oved by the Glob al Traceability Committee and is the direct responsibility of the North Am erica…
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SEMI T2-0298 © SEMI 1993, 2004 9
SEMI T3-0302 © SEMI 1995, 2002 1
SEMI T3-0302
SPECIFICATION FOR WAFER BOX LABELS
This specification was technically approved by the Global Traceability Committee and is the direct
responsibility of the North American Traceability Committee. Current edition approved by the North
American Regional Standards Committee on November 27, 2001. Initially available at www.semi.org
February 2002; to be published March 2002.
NOTE: This document was entirely rewritten for
publication in 2002.
1 Purpose
1.1 This specification provides a common format,
content, size, and location for printed, machine-
readable labels on wafer boxes to facilitate
communication of data essential for advanced
traceability and electronic data exchange systems.
These labels differ from those used in common
commercial practice in that they provide less detailed
information about parametric properties of the wafer.
Such information is now readily stored in advanced
traceability systems.
1.2 This specification covers labels that contain two
bar code symbols and their associated human-readable
interpretation.
1.3 This specification also covers a two-dimensional
Data Matrix code symbol that can accommodate
substantially more information than can the bar code
symbols. This symbol is included to provide for a
smooth transition from existing traceability and labeling
procedures to the comprehensive, unified system
envisioned for the future in which common reading
equipment can be used throughout the plant. If the
Data Matrix symbol is used without the bar code
symbols, provision is made for an associated human
readable interpretation.
1.4 Labels provided in accordance with this specifi
-
cation satisfy the special requirements of 300 mm
Wafer Shipping Systems, detailed in SEMI M45, for
both front opening shipping box (FOSB) labels and bag
labels.
2 Scope
2.1 This specification covers size, message content and
symbology requirements of labels for wafer boxes used
for storage and transport of silicon wafers 100 mm in
diameter and larger.
2.2 For wafer boxes used with 100 to 200 mm diameter
wafers, this specification provides for two similar labels
in order that the contents of the wafer box can be
identified when the wafer box is stored in either of two
positions: with the side of the wafer box parallel with
the front of the storage shelf or with the end of the
wafer box parallel with the front of the storage shelf.
Because wafer boxes are routinely stacked for storage,
placement of box labels on the top or bottom of the box
is not recommended.
2.3 For FOSBs used with 300 mm wafers, this
specification provides for two identical labels, one to be
placed on the FOSB and the other to be placed on the
outer bag. These requirements are consistent with the
requirements of SEMI M45. SEMI M31 specifies
FOSB dimensions.
2.4 The message content and locations of the symbols
used on the labels covered by this specification are
designed to fit in a space consistent with size of the
available flat area on wafer boxes investigated. If a
larger flat area is available on the wafer boxes to be
used, the label size may be increased and additional
message content included.
2.5 This specification includes descriptions of the
characteristics of the code formats to be employed.
2.6 The labels covered by this specification may be
applied on the box itself, and on the box wrap portion
of the wafer package, but not on the transport package
(outer shipping carton) used for commercial
transportation of wafer packages.
NOTE 1: Specifications for transaction labels, which are
intended for use on the outer shipping carton, are given in
ANSI/EIA 556-B.
2.6.1 The format of the barcode is based on Code 39,
as specified in ISO/IEC 16388.
2.6.2 The format of the Data Matrix Code is specified
in ISO/IEC 16022.
2.7 Wafer box labels are intended to be applied in a
cleanroom environment concurrent with the completion
of production of the wafers. Although it is recognized
that the materials of construction and the adhesives
used to apply the label must be selected with this use in
mind, their specification is beyond the scope of this
document.
2.8 The dimensions in this specification are applicable
to labels printed with printers that have nominal
resolution of 203 dots per inch (dpi). Printers with
higher resolution may be used, but many of the
dimensions may differ from those in this specification
and the code fields may or may not fit within the
specified label size and format. In such cases, the user
SEMI T3-0302 © SEMI 1995, 2002 2
of this specification must ensure that the label is of a
size that fits the box to be employed.
2.9 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Documents
3.1 SEMI Standards
AUX1 — List of Vendor Identification Codes
SEMI M1.15 — Standard for 300 mm Polished Mono-
crystalline Silicon Wafers (Notched)
SEMI M12 — Specification for Serial Alphanumeric
Marking of the Front Surface of Wafers
SEMI M13 — Specification for Alphanumeric Marking
of Silicon Wafers
SEMI M31 — Provisional Specification for Front-
Opening Shipping Box Used to Transport and Ship 300
mm Wafers
SEMI M45 — Provisional Standard for 300 mm Wafer
Shipping System
SEMI T1 — Specification for Back Surface Bar Code
Marking of Silicon Wafers
SEMI T2 — Specification for Marking of Wafers with
a Two-Dimensional Matrix Code Symbol
SEMI T7 — Specification for Back-surface Marking of
Double-side Polished Wafers with a Two-dimensional
Data Matrix Code Symbol
3.2 ANSI Standards
1
ANSI/ASC X3.182
— Bar Code Print Quality - Guide-
line
ANSI MH10.8.2 — Data Application Identifier Stan-
dard
3.3 EIA Standards
2
ANSI/EIA-556-B
— Outer Shipping Container Label
Standard
ANSI/EIA 706 — Component Marking Standard
1 American National Standards Institute, New York Office: 11 West
42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;
Fax: 212.398.0023 Website: www.ansi.org
2 Electronic Industries Alliance, EIA Engineering Department,
Standards Sales Office, 2001 Eye Street, NW, Washington, D.C.
20006, USA. Website: www.eia.org
3.4 ISO/IEC Standards
3
ISO/IEC 15417 — Automatic Identification and Data
Capture Technique Symbology Specification – Code
128
ISO/IEC 16022 — International Symoblogy
Specification – Data Matrix
ISO/IEC 16388 — Automatic Identification and Data
Capture Technique Symbology Specification – Code
39
4 Terminology
4.1 Definitions of terms relating to wafer boxes (see
Figure 1) are as follows:
4.1.1 bar end, of a wafer box base — the end of the
box base that is next to the first pocket of the cassette
inside the base or the first pocket of the base itself.
4.1.2 base, of a wafer box — the open-top container
into which wafers are placed, either in cassettes or into
integrally molded pockets.
4.1.3 box wrap — the wrapping or bagging applied
over the wafer box to comprise the product package.
NOTE 2: The box wrap is usually sealed under clean room
conditions.
4.1.4 cover, of a wafer shipping box — the portion of
the box which closes the top of the base.
4.1.5 wafer box — a sealable container consisting of a
base and a cover, used for storing or transporting
wafers. Compare with transport package in
ANSI/EIA-556-B.
4.1.6 wafer box label — the label on the wafer box
identifying the product and its manufacturer.
4.1.7 wafer package — the combination of a wafer box
and box wrap.
4.1.8 wall end, of a wafer shipping box — the end of
the shipping box that is opposite the bar end.
4.2 Terms relating to FOSBs are defined in SEMI
M31.
4.3 Terms relating to bar code characteristics are
defined in SEMI T1. Definitions for additional terms
relating to the product package, product package label,
and bar code format and characteristics can be found in
ANSI/EIA-556-B, Appendix A.
3 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30
Website: www.iso.ch