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SEMI E122-0703 © SEMI 2003 22 2. The SELECT-TEST-SITE param eter on the START remote comm and establishes a single execution subset of the initial default set of test-sites estab lished with the PP-SELECT remote command.…

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SEMI E122-0703 © SEMI 2003 21
Command Name Parameter Name Opt./Req. Parameter Format Description
DATALOGPLANNAME REQ Text Name of datalog plan.
DATALOGDATASETS OPT List, n (n - # of datasets)
1. List, 2
1. Dataset Name
1
2. List, p (Zero-length list
= all test-sites)
1. SiteID
11
…
p. SiteID
1p
n. List, 2
1. Dataset Name
n
2. List, q (Zero-length list
= all test-sites)
1. SiteID
n1
…
q. SiteID
nq
Datalog output can be directed
to separate datasets on a per-
test-site basis.
DATALOGBYTESTTYPE OPT List, b (b = # of (TestType,
TestStatus) pairs being
assigned reports.)
1. List, 3
1. TestType
1
2. TestStatus
1
3. ReportID
1
(If omitted,
the default report is assigned.)
…
b. List, 3
1. TestType
b
2. TestStatus
b
3. ReportID
b
Specifies datalog options by
general TestType.
DATALOGBYTESTID OPT List, c (c = # of (TestId,
TestStatus) pairs being
assigned reports.)
1. List, 3
1. TestID
1
2. TestStatus
1
3. ReportID
1
…
c. List, 3
1. TestID
c
2. TestStatus
c
3. ReportID
c
Specifies datalog options for
specific test ids.
DEFINE-DATALOG-
PLAN
DATALOGOPTION OPT Enumerated
(0:No Log, 1:Log Pass, 2:Log
Failures, 3: Log All)
Selects the condition when
datalog is sent.
START EXEC None
STOP None
STOP EXEC None
13.6 Enable/Disable Site Hierarchy
13.6.1 Test-sites can be enabled and disabled either persistently or for a single execution of the process program
through the use of the PP-SELECT, ENABLE-SITE, DISABLE-SITE, and START remote commands. The
relationship hierarchy for these commands is as follows:
1. The ENABLE-SITE parameter on the PP-SELECT remote command establishes the initial default set of test-
sites.
SEMI E122-0703 © SEMI 2003 22
2. The SELECT-TEST-SITE parameter on the START remote command establishes a single execution subset of
the initial default set of test-sites established with the PP-SELECT remote command.
3. The ENABLE-SITE and DISABLE-SITE remote commands provide for a persistent override of the initial
default set of test-sites to be established with the PP-SELECT remote command.
• The DISABLE-SITE remote command will persistently disable a test-site originally enabled via the
ENABLE-SITE parameter of the PP-SELECT remote command.
• The ENABLE-SITE remote command will persistently re-enable a test-site that was disabled via the
DISABLE-SITE remote command.
• The ENABLE-SITE remote command may not enable a test-site that was not initially enabled via the
ENABLE-SITE parameter on the PP-SELECT remote command.
13.7 Remote Commands and TSEM Process Model Mapping
13.7.1 Table 9 illustrates the relationship between remote commands and states of the TSEM processing state
model. An “X” indicates that a command is valid for use in this state. If a remote command is attempted during a
non-valid state, the equipment would reject the remote command.
Table 9 Remote Commands vs. Process States
COMMAND
ABORT
START EXEC
STOP EXEC
PAUSE
ENABLE-SITE
DISABLE-SITE
PP-SELECT
DEFINE-DATALOG-PLAN
RESUME
START
STOP
PROCESSING STATE
GEM READY X
INIT
INIT WITH ALARMS
IDLE X X
IDLE WITH ALARMS X
PROCESSING ACTIVE
PROCESS X X X
SETTING UP X X X
READY X X X X X X X
EXECUTING X X X
PAUSE X X
PROCESS PAUSE X X
PAUSING X X X
PAUSED X X X X X X
CHECKING X X
ALARM PAUSED X X
ABORTING
STOPPING X
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14 Additional SEMI E30 Requirements
The purpose of this section is to specify any GEM
additional capabilities that are required to be supported
by this class of equipment.
14.1 Requirements — The following GEM additional
capabilities required by TSEM are:
• Establish Communications,
• Dynamic Event Report Configuration,
• Variable Data Collection,
• Status Data Collection,
• Alarm Management,
• Remote Control,
• Equipment Constants,
• Process Program Management,
• Equipment Terminal Services,
• Clock,
• Spooling, and
• Control (Host-Initiated).
15 TSEM Unique Capabilities
15.1 The purpose of this section is to specify additional
capabilities required for the TSEM that are unique to
this class of equipment.
15.2 Host Access to Test Results Information — TSEM
requires the equipment manufacturer to make test
datalog information available to the host. Because
equipment configurations vary for datalog content and
format, the equipment manufacturer must document the
format and content of datalog information used by the
equipment and make that information available across
the communications interface. A test data acquisition
interface and mechanism for management of test data
collection is described below.
15.3 Datalog Plan — The datalog plan describes a
method by which the host can request test result data to
be communicated in an automated fashion by the
equipment. It specifies the set of data in which Host is
interested in and that the equipment should send off-
tool. It includes a mechanism for organizing related
data into groups or categories to make it more
straightforward for Host to enable or disable a large
number of data sources, and to allow Host to organize
related data into groups according to their purpose.
15.4 Defining a Datalog Plan — The remote command
DEFINE-DATALOG-PLAN will assign a name to a set
of reports and datasets. Named datalog plans defined in
this manner are undefined when the tester leaves the
PROCESSING ACTIVE state. There must be one
predefined datalog plan called “NONE” that will
disable all datalog reports.
15.5 Test Data Types — The types of test data that are
commonly collected are described in the following
sections, grouped by the type of test that generated the
data. This list, which may not be exhaustive, represents
the minimum required data to be supported by the test
equipment. In datalog plans, the TestType can be used
to enable or disable an entire group of data to be
communicated to the host; see TestType data variable
for enumerated values of TestTypes. Upon loading of
the test recipe or process program, the test equipment
should have knowledge of all test steps as well as their
respective TestTypes.
15.5.1 Functional Test Data — Test data associated
with a functional test, such as pattern name and the
functional test result. Functional test results are
normally a vector of pass/fail values.
15.5.2 Parametric Test Data — Test data associated
with a parametric test. Parametric test results are
normally a measured value from within a range.
15.5.3 Text Test Data — Test data associated with a
text test. Text test results contain an arbitrary string of
text.
15.6 Test Steps — Upon successful completion of
process program load, the tester should have full
knowledge of all the functional, parametric, etc. test
steps defined by the process program. Each test step is
uniquely identified by a test step ID and associated with
a TestType. Information on all test steps defined must
be available to Host via defined reports and can be
attached to program load complete collection event, see
TEST-LIST report.
15.7 Collection Plan Definition — Definition of a
datalog plan to the equipment specifies the exact test
data to be collected and/or communicated to the host
and specifies a way to group data. This plan will
remain effective until changed by host via another plan.
Below outlines the general structure of the collection
plan.