semi合集-English.pdf - 第651页
SEMI E85-0705 © SEMI 1999, 2005 5 NOTE 2: The bottom of the SEMI E85 exclusion volumes defines the top of the SEMI E8 4 connector zones. For Option A, the top of the connector zone is defined by dimension H2. For Option …
SEMI E85-0705 © SEMI 1999, 2005 4
7.5.3.1 Option C allows for two different types of interbay transport (¶6.3.1). The first type is a drive though (DT)
interbay transport that will drive through the entire length of the stocker as illustrated in Figure 3. Dimensions A1 is
therefore not applicable for this type of Option C interbay transport delivery. The other type of interbay transport is
a horizontal transfer (HT) were a section of the track slides or advances into a predefined open volume in the side of
the stocker as illustrated in Figure 4. Dimensions A1 and S are applicable for this type of Option C interbay
transport delivery.
7.5.3.2 Option C prime (C’) is different from Option C in that the pins used to transfer the carrier are different. In
Option C’, the transport vehicle uses the two front secondary, and single rear primary kinematic pins. This enables
the stocker end-effector to use the two front primary pins and be of a wider configuration (see Figure 3a). All
elevation dimensions for C’ are the same as for Option C.
7.5.4 In Option D, a passive transport presents a carrier to an external stocker position. The passive interbay
transport must maintain the center exclusion volume shown in Figures 5 and 10 to allow for the stocker to use the
secondary kinematic pins or top robotic flange to transfer the carrier. No open volume internal to the stocker is
required.
7.5.4.1 Option D prime (D’) is different from Option D in that the pins used to transfer the carrier are different. In
Option D’, the transport vehicle uses the two front secondary, and single rear primary kinematic pins. This enables
the stocker end-effector to use the two front primary pins and be of a wider configuration (see Figure 4a). All
elevation dimensions for Option D’ are the same as for Option D.
7.5.5 In Option E, a passive transport presents a carrier to an external stocker position. The passive interbay
transport must maintain the side fork-lift/conveyor rail exclusion volumes shown in Figure 6 to allow the stocker to
use the fork-lift/conveyor rails to transfer the carrier. No open volume internal to the stocker is required.
7.5.6 In option F and F’ the carrier is oriented with the front of the carrier perpendicular to the load face plane by a
passive transport for pickup by an active stocker. In option F the transport uses the kinematic coupling pins (all 3
may be used) and the stocker uses either the secondary kinematic coupling pins (all 3 accessible) or the top robotic
flange for pickup. In Option F’ (F Prime) the transport uses the kinematic coupling pins, the secondary kinematic
coupling pins or the conveyor runners, and the stocker uses the top robotic flange for pickup.
7.6 The center exclusion volume below the horizontal datum plane of the stocker for Option A (¶7.5.1) or interbay
transport system for Options C and D (¶7.5.3 and ¶7.5.4), is defined by dimensions H2, A2, and D (Figure 1 and
10). For Options C (¶7.5.3) and D (¶7.5.4), there are additional requirements that the center exclusion volume,
defined by H2 and A2 extend from the facial datum plane a distance D10 (¶6.3.1 and ¶6.3.2), increase both in depth
de-fined by dimension H4 and in width defined by dimension A3 from the plane defined by dimension D10
extending outwards for the rest of the interbay transport system. The conveyor flange exclusion volume below the
horizontal datum plane of the interbay transport system (¶7.5.4), is defined by dimensions H2, H4, A6, A8, and D10
(Figure 6). The center exclusion volume below the horizontal datum plane of the stocker for option F is defined by
Figure 10, “Exclusion zone detail for option F”. No exclusion volumes are required for option F’ since stocker
access is with the top robotic flange only. These exclusion volumes need to be open only during the carrier handoff
between the stocker and the interbay transport system. For example, the stocker can temporarily occupy these
exclusion volumes when transferring the carrier from the interbay load port to an internal shelf location.
7.7 Clearance C3 in Option A is defined with respect to the maximum dimensions of the carrier (defined in SEMI
E47.1 for a box or in SEMI E1.9 for an open cassette), not to the rectangular wafer carrier envelope (defined in
SEMI E15).
7.8 Dimension S specifies the required range for spacing between carrier centroids.
7.9 For active interbay transports (Option A) and passive interbay transports (Options C, D, and E and F), the
communication method will be defined by SEMI E84 (same as OHT), and the available SEMI E84 connector areas
are defined by the following dimensions, and are illustrated in Figure 9.
Dimensions of the SEMI E84 connector zone are as follows:
Width (measured from BDP) = 225 mm
Depth (measured from Stocker facial plane) = 200 mm
Height (measured from HDP) = 300 mm
SEMI E85-0705 © SEMI 1999, 2005 5
NOTE 2: The bottom of the SEMI E85 exclusion volumes defines the top of the SEMI E84 connector zones. For Option A, the
top of the connector zone is defined by dimension H2. For Option B, the top of the connector zone is defined by dimension H0.
For Options C, D, and E and F, the top of the connector zone is defined by dimension H4.
Table 1 Dimensional Requirements for 300 mm AMHS Interbay Load Ports (FOUP ONLY)
Dim Definition Option A Option B Option C Option D Option E Option F
(deg)
tilt of the open cassette when placed
to the load port
0 SEMI E15.1 0 0 0 N/A
A1 minimum width of the load port
cavity or cut-out in the stocker
measured from the bilateral datum
plane to the nearest obstruction on
the stocker
375 mm N/A 600 mm
for
HT only
(See
#1
.)
N/A N/A N/A
A2 width of the exclusion zone for
center pickup using the secondary
kinematic coupling pins (symmetric
about the bilateral datum plane)
213 +2/-0
mm
N/A 213 +2/-0
mm
213 +2/-0
mm
213 + 2/-0
A3 Minimum width of the exclusion
zone (starting at a distance D10
from the FDP) for center pickup
using the secondary kinematic
coupling pins (symmetric about the
bilateral datum plane)
N/A N/A 225 mm 225 mm N/A N/A
A6 maximum protrusion of the interbay
transport measured from the
bilateral datum plane of the
transport (start of the exclusion
volume for fork-lift or conveyor rail
transfer)
N/A SEMI E15.1 N/A N/A 165 mm N/A
A8 minimum width of the exclusion
volume for the fork-lift or conveyor
rail transfer mechanism measured
from the bilateral datum plane (end
of the exclusion volume for fork-lift
or conveyor rail transfer)
N/A N/A N/A N/A 245 mm
(80 wide)
N/A
C3 height of the nearest stocker
obstacle above the carrier during
transfer measured from the HDP of
the transportthe maximum height
of the carrier. This creates an
exclusion zone for use of the top
robotic flange.
150 mm SEMI E15.1 N/A N/A N/A N/A
C5 distance from the facial datum
plane of the transport to the internal
stocker boundary
N/A SEMI E15.1 250 ± 50
mm
N/A N/A 250 ± 50
mm
D distance from the stocker boundary
to the facial datum plane on the
stocker load port (A,B)
240 mm SEMI E15.1
250 +0/-10
mm
N/A N/A N/A N/A
D1 maximum distance or protrusion of
any load port feature measured
from the facial datum plane on the
load port (inside the stocker cut-
out)
150 mm SEMI E15.1
200 +10/-4
mm
N/A N/A N/A TBD
D5 distance from the facial datum
plane of the interbay transport
system to the stocker boundary
N/A SEMI E15.1 N/A 250 ± 50 mm 250 ± 50
mm
N/A
SEMI E85-0705 © SEMI 1999, 2005 6
Dim Definition Option A Option B Option C Option D Option E Option F
D6 minimum distance or length of the
center exclusion volume of the
interbay transport system measured
backwards from the facial datum
plane of the interbay transport
system to allow for stocker pick up
using the secondary kinematic pins
N/A SEMI E15.1 90 mm 90 mm TBD TBD
D10 distance measured from the facial
datum plane (FDP) where the depth
of the center exclusion zone lowers
from H2 to H4 in the interbay
transport system (C,D)
N/A SEMI E15.1 150 mm or
230 mm
#1
150 mm or
230 mm
#1
150 mm or
230 mm
#1
150 mm or
230 mm
#1
H Height of the horizontal datum
plane of the interbay load port
(stocker) or interbay transport
system determined by user and
supplier
TBD
#1
and must
be
adjustable
by ± 10
mm
TBD
#1
and must
be
adjustable
by ± 10 mm
TBD
#1
and
must be
adjustable
by ± 10 mm
TBD
#1
and
must be
adjustable by
10 mm
TBD
#1
and
must be
adjustable
by 10 mm
TBD
#1
and
must be
adjustable
by 10 mm
H2 depth of exclusion zone below the
horizontal datum plane (HDP) of
the stocker load port (A,B) OR the
interbay transport system (C,D)
130 mm SEMI E15.1 100 mm 100 mm 100 mm 100 mm
H4 depth of the exclusion zone below
the horizontal datum plane (HDP)
of interbay transport system (C,D)
starting at a distance D10 from the
facial datum plane (FDP)
N/A N/A 170 mm 170 mm 170 mm 170 mm
S distance between the bilateral
datum plane of two adjacent load
ports
450 mm 505 mm N/A N/A N/A N/A
T3 height of the open volume in that it
allows the interbay transport system
to enter the stocker the transport.
This exclusion zone is occupied by
the transport itself, the maximum
height of the carrier, a clearance
above carrier, and a clearance
below the transport.
N/A N/A 800 mm or
1150 mm
#1
N/A N/A N/A
#1
User to specify which dimension (see §6).