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SEMI E87-0705 © SEMI 1999, 2005 46 Equipment Danger Affected Configuration Alarm Text Potential I mminent Operator Equipment Material Carrier Verification Failure X X Slot Map Read Failed X X X X Slot Map Verification Fa…
SEMI E87-0705 © SEMI 1999, 2005 45
Variable Name Description Type Acc
ess
Comment
Reason The reason for transition 14,
SLOT MAP NOT READ to
WAITING FOR HOST.
Enumerated:
VERIFICATION NEEDED,
VERIFICATION BY
EQUIPMENT
UNSUCCESSFUL,
READ FAIL,
IMPROPER SUBSTRATE
POSITION
RO Information to aid host in
deciding appropriate action.
SlotMapStatus State of the carrier slot map status. Enumerated:
SLOT MAP NOT READ,
[SLOT]WAITING FOR
HOST,
SLOT MAP
VERIFICATION OK,
SLOT MAP
VERIFICATION FAILED
RO
UnAllocatedPartition-
Capacity
The current unallocated capacity
for a logical partition inside
internal buffer equipment,
(PartitionCapacity - # of carriers
in partition - # of carriers allocated
for the partition (via reception of a
Bind, CarrierIn,
CarrierNotification,
ReserveAtPort, or
ProceedWithCarrier service). Any
carriers allocated for a partition
will be de-allocated if the
corresponding Cancel service is
received (for example Bind-
CancelBind, CarrierNotification –
CancelCarrierNotification,
ReserveAtPort –
CancelReservationAtPort,
ProceedWithCarrier –
CancelCarrier).
Non-negative integer RO Only applicable to internal
buffer equipment.
UnAllocatedPartition-
Capacity
i
The UnallocatedPartitionCapacity
for the i
th
Partition ID within the
internal buffer
Non-negative integer RO Only applicable to internal
buffer equipment.
20 Alarms
20.1 This section includes specific alarms that are required to be implemented by CMS compliant equipment.
20.2 Alarm List Table
20.2.1 Table 38 is a listing of required alarms for both fixed buffer and internal buffer equipment. This list is only a
subset of the carrier transfer alarms. There may be more carrier transfer related alarms that are not listed here.
Table 38 Alarm List
Equipment Danger Affected
Configuration Alarm Text Potential Imminent Operator Equipment Material
Fixed & Internal
Buffer Equipment
PIO Failure X X X X
Access Mode Violation X X X X
SEMI E87-0705 © SEMI 1999, 2005 46
Equipment Danger Affected
Configuration Alarm Text Potential Imminent Operator Equipment Material
Carrier Verification Failure X X
Slot Map Read Failed X X X X
Slot Map Verification Failed X X X
Attempt To Use Out Of Service Load Port X X X
Carrier Presence Error X X X X
Carrier Placement Error X X X X
Carrier Dock/UnDock Failure X X X
Carrier Open/Close Failure X X X
Fixed and Internal
Buffer
Duplicate CarrierID X X
Internal Buffer
Equipment Only
Internal Buffer Carrier Move Failure X X X
Fixed & Internal
Buffer Equipment
Carrier Removal Error X X X X
20.3 Duplicate CarrierID
20.3.1 If the equipment receives a carrier with a CarrierID that is the same as that of another carrier present at the
equipment, the following rules shall apply:
1. The second carrier with a CarrierID shall not be processed.
2. If processing on the first carrier with the CarrierID has not begun, it should not be processed.
3. If processing on the first carrier has begun a Duplicate Carrier ID In Process event shall be issued to notify the
host.
21 Requirements for Compliance
21.1 Table 39 provides a checklist for CMS compliance.
Table 39 CMS Compliance Statement
Fundamental CMS Requirements CMS Section Implemented CMS Compliant
Load Port Numbering 9.1 Yes No Yes No
Carrier Slot Numbering 9.2 Yes No Yes No
Load Port Transfer State Model 9.3–9.4.3 Yes No Yes No
Carrier Object Implementation 10 Yes No Yes No
Load Port Reservation State Model
(internal buffer equipment)
12 Yes No Yes No
Load Port/Carrier Association State Model 13 Yes No Yes No
CarrierID Verification Support 14.2 Yes No Yes No
Slot Map Verification Support 14.3 Yes No Yes No
Services Implementation 16 Yes No Yes No
Additional Events Implementation 18 Yes No Yes No
Variable Data Definitions 19 Yes No Yes No
Alarms Implementation 20 Yes No Yes No
Additional CMS Capabilities CMS Section Implemented CMS Compliant
Load Port Reservation State Model
(fixed buffer equipment)
12 Yes No Yes No
Reservation Visible Signal 12.2 Yes No Yes No
SEMI E87-0705 © SEMI 1999, 2005 47
RELATED INFORMATION 1
CARRIER OBJECT ID
NOTICE: This related information is not an official part of SEMI E87, but was approved for publication by full
letter ballot procedures on December 15, 1999.
R1-1 Carrier Object ID
R1-1.1 The Carrier Object ID is derived as stated in the Table R1-1 Carrier ID derivation.
Table R1-1 CarrierID Derivation
Method of Original
Instantiation
CarrierID
Read
ID
Verifi-cation
Following Actions CarrierID = Parameter Required
by Service
1 Bind Successful Successful
and
equipment
based
Production equipment continues
with the carrier.
CarrierID in
Bind service.
Bind: CarrierID,
PortID, and
PropertiesList
2 Bind Successful Fails The carrier object instantiated via
the Bind message is destroyed and a
new carrier object with the
carrierID equal to the one
determined by the carrierID is
instantiated.
ProceedWithCarrier service is
received.
CarrierID
provided by
the CarrierID
read.
ProceedWith-Carrier:
CarrierID,
PropertiesList
3 Bind Successful Fails The carrier object instantiated via
the Bind message is destroyed and a
new carrier object with the
carrierID equal to the one
determined by the carrierID is
instantiated. CancelCarrier service
is received.
CarrierID
provided by
the CarrierID
read.
CancelCarrier:
CarrierID
4 Bind Fails NA ProceedWithCarrier service is
received and the carrierID matches
the carrierID provided by the Bind
service.
CarrierID
provided by
the Bind
service.
ProceedWith-Carrier:
CarrierID
5 Bind Fails NA CancelCarrier service is received
and the carrierID matches the
carrierID provided by the Bind
service.
CarrierID
provided by
the Bind
service.
CancelCarrier:
CarrierID
6 Carrier-Notification Successful Successful
and
equipment
based
Production equipment continues
with the carrier.
CarrierID in
Carrier-
Notification.
Carrier-Notification:
CarrierID and
PropertiesList
7 Carrier ID read Successful Successful
and Host
based
ProceedWithCarrier service is
received and the carrierID matches
the carrierID read by the
p
roduction
equipment.
CarrierID
read by
production
equipment.
ProceedWith-Carrier:
CarrierID and
PropertiesList, PortID
may be included.
8 CarrierID read Successful Fails and
Host based
A CancelCarrier service is received
and the carrierID matches the
carrierID read by the production
equipment.
CarrierID
read by
production
equipment.
CancelCarrier:
CarrierID