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SEMI E127-0705 © SEMI 2003, 2005 40 15.2 Data Row Template Object 15.2.1 The Data Row Template provides the organization of data within any Data Row of a given Data Table Object. 15.2.2 Data Row Template Attributes are d…

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SEMI E127-0705 © SEMI 2003, 2005 39
1...*
0...*
1...*
Data Row
Row Num: uns igned int eger
TableID: tex t
TableTypeL: text
Data It e m 1: variant
.
Dat aItem n: variant
Data Row Template
DataInfoList: list of text
Data Information
Assurance: list of structures
DataType: text
Description: text
InterdependencyRule: enumer ation
Units: enumeration
Us e: text
ValidityRule: text
1
0...*
describes data
order within
row s
1
Table
DataLength: unsigned integer
NumCols: unsigned integer
NumRow s : unsigned integer
TableRequest
TableSend
Data Table
DataRow TemplateID: text
contains
shows order
within row
Figure 11
Data Table Object Model
15.1.4 Data Table Object Attributes
15.1.5 The attributes of the Data Table Object are defined in Table 20.
Table 20 Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Complies with restriction of ObjID in
SEMI E39.
ObjType Type of Object. RO Y Text = “TableData”.
RowTemplateID ObjID of the associated Data Row
Template.
RO Y Text.
15.1.6 The attributes of the Data Row object are defined in Table 21.
Table 21 Data Row Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Numeric text for the row number. Complies
with restrictions of ObjID in SEMI E39.
ObjType Type of Object. RO Y Text = “DataRow”.
DataItem
i
The ith entry within the row. RO Y Any data type except structures (lists of mixed
data types).
RowNum Identifies the row position within its
table.
RO Y Unsigned integer.
RowOwner Identifies the ObjType and ObjID of
the table to which the row belongs.
RO Y Text. Conforms to the format of ObjSpec in
SEMI E39.
SEMI E127-0705 © SEMI 2003, 2005 40
15.2 Data Row Template Object
15.2.1 The Data Row Template provides the organization of data within any Data Row of a given Data Table
Object.
15.2.2 Data Row Template Attributes are defined in Table 22.
Table 22 Data Row Template Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Complies with restrictions of ObjID in
SEMI E39.
ObjType Type of Object. RO Y Text = “DataRow_Template”.
DataInfoIDList Identifies the names of the individual
data in the order in which the data will
be transferred within a row when
exported.
RO Y Ordered list of 1+ text.
NumEntries Number of columns in table. RO Y Unsigned integer.
15.2.2.1 Data Information Object
15.2.2.1.1 A Data Information object describes the properties available for an individual DataItem
i
in a Data Row
for a table. The attributes of this object provide information about a kind of data item that can be reused for multiple
tables, so that the information does not need to be duplicated.
15.2.2.1.2 All DataItems in a specific position within a row (that is, all that fall in the same column of a table) have
the same set of properties. For example, a Data Information object for any cell in the column named “Xcoord” have
the same description, the same data type, the same units, and so forth.
15.2.2.1.3 Assurance data is designated to be a container for information known by the IMM that describes the
trustworthiness of the data itself. Since it is expected that the IMM Data will be used for decision making on the
process tool, it is important that the client has access to not only the data but any other information to tell the client
that the data is reliable. For Raw Data, examples of this might include actual voltages or laser power that is
delivered to a measurement sensor (different from the setpoint), signal-to-noise ratios, or other parameters. For
Result Data, examples might include goodness of fit for a model, confidence limit in a specific model parameter, or
other information that is generated by the IMM.
15.2.2.1.4 The attributes of the Data Information object are defined in Table 23.
Table 23 Data Information Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text. Corresponds to the name of the item of
data (the column header). Complies with
restrictions of ObjID in SEMI E39.
ObjType Type of Object. RO Y Text = “DataInformation”.
Assurance Information that describes the
trustworthiness or believability in data
generated.
RO N List of 0+ structures consisting of
AssuranceName
AssuranceDataType
AssuranceValue
AssuranceUnits
SEMI E127-0705 © SEMI 2003, 2005 41
Attribute Name Definition Access Reqd Form
DataType Identifies the format of the value of the
Data Row attribute DataItem
i
.
RO Y Enumerated:
binary
Boolean
text
integer
unsigned integer
floating point IEEE 754
array
list
structure
Description Describes the type of entry. RO N Text.
Interdependency
Rule
Describes interdepencies with other
entry types.
RO N Text.
Units Units of measurement. RO Y Enumerated.
Use Descibes how the entry type is used. RO N Text.
ValidityRule Describes the conditions, such as
boundaries, where the entry is valid.
RO N Text.
Table 24 Assurance Element Definitions
Element Name Description Form
AssuranceName The name of the assurance data used. Text.
AssuranceDataType Identifies the form of AssuranceValue. Enumerated:
binary
Boolean
text
integer
unsigned integer
floating point IEEE 754
array
list
structure
AssuranceValue The actual measured or calculated value. Per AssuranceDataType.
AssuranceUnits Identifies the units (if any). Enumerated text.
15.3 Master Data Table Objects
15.3.1 A Master Data Table Object is an empty table that provides a full set of Data Row Templates and Data
Information for all of the possible row items (the superset) that the IMM is capable of producing. The existence of
this table allows the client to obtain the description of data contained in Data Information beforehand. Actual row
contents, and related Data Information, for an actual IMM Data Table Object must be a subset of those provided by
the Master Data Table Object, and the order of data within a row may vary from table to table.
15.3.2 Exactly three Master Data Table Objects are required, one for each of the three types of tables. Their ObjIDs
shall be defined as “RawDataMaster”, “ConvertedDataMaster”, and “CalibratedDataMaster”.
15.3.3 A scenario for obtaining Row Templates and Data Information from a Master Data Table Object is provided
in Related Information.
15.3.4 Provision of Master Data Table Objects is an optional capability. In some implementations, due to the
possible variation of Data Information attributes (for example, the Units attribute) and their dependence on recipes,
it would be difficult to implement without having a specific recipe.