semi合集-English.pdf - 第5950页
SEMI P41-0304 E © SEMI 2004 10 + Defect (defect_type,date_stamp) DefectInformation (origin) DefectPosition_X DefectPosition_Y DefectSize (unit) DefectSize_Y DefectSize_X DefectJudgement + ImageData DefectPosition (unit) …
SEMI P41-0304
E
© SEMI 2004 9
InspectionResult
Summary
InspectionSummary (beginning_date,ending_date)
InspectionRecipe (recipe_name)
InspectionModeInformation
InspectionDetectionSummary
TotalDefect
+ ClassifyDefect (defect_type)
InspectionOperator
ReticleJudgement
+RepairSummary (beginning_date,ending_date)
RepairTool (tool_name,tool_no)
RepairMethod
ToolCoordinateInformation
Subsequent structures are in Figure 5.
N
unberRepairProcessing
DirectionInformation
TotalRepairProcess
+ ClassifyRepairProcess (dafect_type)
RepairOperator
RepairJudgement
+EvaluationSummary (beginning_date,ending_date)
EvaluationTool(tool_name,tool_no)
EvaluationMethod
ToolCoordinateInformation
N
unberEvaluationProcessing
DirectionInformation
TotalEvaluationProcess
+ ClassifyEvaluationProcess (defect_type)
EvaluationOperator
EvaluationJudgement
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 5.
Subsequent structures are in Figure 6.
Subsequent structures are in Figure 4.
Figure 3
Structure of Result Summary Section
SEMI P41-0304
E
© SEMI 2004 10
+ Defect (defect_type,date_stamp)
DefectInformation (origin)
DefectPosition_X
DefectPosition_Y
DefectSize (unit)
DefectSize_Y
DefectSize_X
DefectJudgement
+ ImageData
DefectPosition (unit)
+ DefectRepair (date_stamp)
RepairRecipe (recipe_name)
RepairCondition
RepairResult
+ ImageData
+ DefectEvaluate (date_stamp)
EvaluateRecipe (recipe_name)
EvaluateCondition
EvaluateResult
+ ImageData
subsequent structures are in Figure 7.
subsequent structures are in Figure 7.
subsequent structures are in Figure 7.
Figure 4
Structure of Each Defect Section
SEMI P41-0304
E
© SEMI 2004 11
CoordinateSystem
ToolOriginPointInformation
ToolOriginPoint
ToolOriginPosition_X
ToolOriginPosition_Y
ToolStageCorrectionInformation
ToolStageCorrection (unit)
ToolStageCorrection_Y
ToolStageSkew (unit)
MaskOriginPointInformation
MaskOriginPoint
MaskOriginPosition_X
MaskOriginPosition_Y
ToolOffset_X
ToolOffset_Y
ToolStageAccuracy (unit)
ToolOriginPosition (unit)
ToolStageCorrection_X
ToolStageSkewCorrection
MaskOriginPosition (unit)
ToolOffset (unit)
Figure 5
Structure of Tool Coordinate Section
ReferenceMark
MarkRotation
MaskMirror
MaskFlip
Figure 6
Structure of Mask Direction Information Section