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SEMI PR8-0703 © SEMI 2003 30 RELATED INFORMATION 4 MESSAGE EXAMPLES NOTICE: This related information is no t an official part of SEMI PR8. This related information is not intended to modify or supersede the official prop…

SEMI PR8-0703 © SEMI 2003 29

1) Control Job related

1. ControlJob ID

2. CarrierInputSpec: Carrier ID list

3. ProcessingCtrlSpec: PRjob list

4. ProcessOrderMgmt: PRjob execution sequence

5. MtrlOutSpec: Wafer origin and target specification

2) PR Job related

1. PRJobID

2. PRMtlType: Unit of material

3. PRMtlNameList: material name list

4. RecID

5. RecVariableList: Variable parameter name list and values

6. PRProcessStart: start method

NOTE 1: If process condition is changed, the content is to be reported for the name of parameters and values.

3) Recipe related

1. Recipe ID

2. Recipe body (detailed content)

3. Setting value data the equipment use internally for each of the process control devices (temperature

controllers, mass flow controllers and such)

SEMI PR8-0703 © SEMI 2003 30

RELATED INFORMATION 4

MESSAGE EXAMPLES

NOTICE: This related information is not an official part of SEMI PR8. This related information is not intended to

modify or supersede the official proposed standard. Determination of the suitability of the material is solely the

responsibility of the user.

R4-1 Example EDA Messages

R4-1.1 This section provides simple examples of each of the EDA messages defined in the specification. HTTP

headers are shown in full only for the IsEdaEnabled request. Thereafter, only the SOAPAction header is shown for

brevity.

R4-1.2 Data Management Messages (supported by the equipment)

R4-1.2.1 IsEdaEnabled Request

POST /EDAEquipmentService HTTP/1.1

User-Agent: Mozilla/4.0 (compatible; MSIE 6.0; MS Web Services Client Protocol

1.0.3705.0)

Content-Type: text/xml; charset=utf-8

SOAPAction: "urn:semi-org:ws:eda_ps_v0.0:IsEdaEnabled"

Content-Length: 433

Expect: 100-continue

Connection: Keep-Alive

Host: localhost

<?xml version="1.0" encoding="utf-8" ?>

<soap:Envelope xmlns:soap="http://schemas.xmlsoap.org/soap/envelope/"

xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"

xmlns:xsd="http://www.w3.org/2001/XMLSchema">

<soap:Header>

<To>urn:robofurnace:zippo:furnace-00899</To>

<From>urn:icm:equipment.client:app-1</From>

</MessageHeader>

</soap:Header>

<soap:Body>

<Supplier>RoboFurnace, Inc.</Supplier>

<Model>Zippo 355</Model>

</EquipmentID>

</IsEdaEnabled>

</soap:Body>

</soap:Envelope>

SEMI PR8-0703 © SEMI 2003 31

R4-1.2.2 IsEdaEnabled Response

HTTP/1.1 100 Continue

Server: Microsoft-IIS/5.0

Date: Mon, 16 Sep 2002 19:56:41 GMT

HTTP/1.1 200 OK

Server: Microsoft-IIS/5.0

Date: Mon, 16 Sep 2002 19:56:41 GMT

Content-Length: 335

Content-Type: text/html

<?xml version="1.0" encoding="utf-8" ?>

<soap:Envelope xmlns:soap="http://schemas.xmlsoap.org/soap/envelope/"

xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"

xmlns:xsd="http://www.w3.org/2001/XMLSchema">

<soap:Header>

<To>urn:icm:equipment.client:app-1</To>

<From>urn:robofurnace:zippo:furnace-00899</From>

</MessageHeader>

</soap:Header>

<soap:Body>

</IsEdaEnabledResponse>

</soap:Body>

</soap:Envelope>

R4-1.2.3 GetActivePlanIds Request

...

SOAPAction: "urn:semi-org:ws:eda_ps_v0.0:GetActivePlanIds"

...

<?xml version="1.0" encoding="utf-8" ?>

<soap:Envelope xmlns:soap="http://schemas.xmlsoap.org/soap/envelope/"

xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"

xmlns:xsd="http://www.w3.org/2001/XMLSchema">

<soap:Header>

<To>urn:robofurnace:zippo:furnace-00899</To>

<From>urn:icm:equipment.client:app-1</From>

</MessageHeader>

</soap:Header>

<soap:Body>

<Supplier>RoboFurnace, Inc.</Supplier>

<Model>Zippo 355</Model>

</EquipmentID>

</GetActivePlanIds>

</soap:Body>

</soap:Envelope>