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SEMI E85-0705 © SEMI 1999, 2005 9 Active Transport Delivers a Carrier to an Internal Stocker Position Option C (Drive Through) T 3 Front View A 2 Top View NOTE 1: C arrier re sts on the prima ry set of kinem atic pins wh…

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SEMI E85-0705 © SEMI 1999, 2005 8
Active Transport Delivers a Carrier to an Internal Stocker Position
Stocke
r
Overhead
Transport
V
ehicle
HDP
Side View
Option B
Top View
NOTE 1:
Stocker uses
primary set of kinematic
pins.
Front View
H0
HDP
H1
C1
C2
D
D0
W1
W2
HDP
H
D1
Option B
H
#1
H0
(min)
H1
(max)
C1
(min)
C2
(min)
D0
(min)
D
(range)
D1
(range)
W1
(max)
W2
(min)
FOUP TBD 40 25 75 30 110 250 +0/-10 200 +10/-4 130 205
Open Cassette TBD 50 25 75 30 110 250 +0/-10 200 +10/-4 130 205
#1
User to specify actual dimension (see ¶ 6.2).
Figure 2
AMHS Interbay Load Port Option B
SEMI E85-0705 © SEMI 1999, 2005 9
Active Transport Delivers a Carrier to an Internal Stocker Position
Option C
(Drive Through)
T
3
Front View
A
2
Top View
NOTE 1: Carrier rests on the primary set of
kinematic pins while on the transport.
NOTE 2: Transport must maintain
same exclusion zones as
depicted in Figure 1.
C
5
Stocker
Vehicle
H
2
HDP
T
3
Side View (Over the Rail)
C
5
Stocker
Vehicle
H
2
HDP
Side View (Suspended Type)
NOTE 3: Transport vehicle uses
primary set of kinematic pins.
C
5
H
4
D
10
NOTE 4: Transport vehicle uses
primary set of kinematic pins.
Option C
(Drive
Through)
H2 (min)
H4
(min)
A1
(min)
A2
(range)
A3
(min)
C5
(range)
D10 (max)
#1
D6 (min) T3 (min)
#1

(deg)
FOUP 100 170 N/A 213 +2/-0 225 250 ±
50
150 or 230 112 800 or
1150
0
Open
Cassette
110
#1
170 N/A 213 +2/-0 225 250 ±
50
150 or 230 112 800 or
1150
2
#1
User to specify which dimension (see ¶6.3.1).
Figure 3
AMHS Interbay Load Port Option C (Drive Through)
SEMI E85-0705 © SEMI 1999, 2005 10
Active Transport Delivers a Carrier to an Internal Stocker Position
Option C
(Horizontal Transfer)
T
3
Front View
Top View
NOTE 1: Carrier rests on the primary set of
kinematic pins while on the transport.
NOTE 2: Transport must maintain
same exclusion zones as
depicted in Figure 1.
C
5
Stocker
Vehicle
H
2
HDP
Side View (Suspended Type)
NOTE 3: Transport vehicle uses
primary set of kinematic pins.
C
5
Stocker
Vehicle
H
2
HDP
T
3
Side View (Over the Rail)
C
5
H
4
D
10
NOTE 4: Transport vehicle uses
primary set of kinematic pins.
A
2
Option C
(Horizontal
Transfer)
H2 (min)
H4
(min)
A1
(min)
A2
(range)
A3
(min)
C5
(range)
D10 (max)
#1
D6 (min) T3 (min)
#1

(deg)
FOUP 100 170 600 213 +2/-
0
225 250 ±
50
150 or
230
112 800 or
1150
0
Open
Cassette
110
#1
170 600 213 +2/-
0
225 250 ±
50
150 or
230
112 800 or
1150
2
#1
User to specify which dimension (see ¶6.3.1.)
Figure 4
AMHS Interbay Load Port Option C (Horizontal Transfer)