semi合集-English.pdf - 第5566页

SEMI P10-0705 © SEMI 1990, 2005 61 <xs:element name="SurfInspPellTop" type="xs:double"/> </xs:sequence> <xs:sequence minOccurs="0"> <xs:element name="SurfInspPellTo…

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SEMI P10-0705 © SEMI 1990, 2005 60
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartRepairDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndRepairDefinition"/>
</xs:complexType>
<xs:complexType name="SurfaceDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfaceInspection"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfaceQualityId"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="SurfInspEquipReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EquipSiteReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspModeReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPixelSizeReqd"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="SurfDefectType"
type="xs:string"/>
<xs:element name="SurfInspSensitivityReqd"
type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BinSize" type="xs:string"/>
<xs:element name="SeverityCriterionReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspSetupFileNameReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspMethod" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspArea" type="WindowType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 61
<xs:element name="SurfInspPellTop" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellTopOnClearPattern"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellTopOnOpaquePattern"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellTopOutsideFrame"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellTopOutsideOnOpaque"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellTopOutsideMembrane"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellTopInsideMembrane"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellTopOutsideOnFrame"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellTopInsideOnFrame"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPellBottom"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspGlassSide"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SurfInspPatternSide"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionDefectClear"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TransmissionDefectDark"
type="xs:double"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
SEMI P10-0705 © SEMI 1990, 2005 62
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartSurfaceDefinition"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndSurfaceDefinition"/>
</xs:complexType>
<xs:complexType name="SemPhotoType">
<xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="StartSemPhoto" type="xs:string"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="SemPhotoSiteId"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SemPhotoLocation"
type="XYType"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SemPhotoMatrixFilename"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdFeature" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdLocationDrawing"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CdDrawing" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SemPhotoScale"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SemPhotoTilt"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SemPhotoRotation"
type="xs:double"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartSemPhoto"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndSemPhoto"/>
</xs:complexType>
<xs:complexType name="MaskDefinitionType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MaskName" type="xs:string"/>