semi合集-English.pdf - 第5594页

SEMI P10-0705 © SEMI 1990, 2005 89 < / x s : c o m p l e x Ty p e > < / x s : e l e m e n t > - < x s : e l e m e n t n a m e = " M e a s u r e d T r a n s m i s s i o n M a r k L o ca t i o n " …

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SEMI P10-0705 © SEMI 1990, 2005 88
< xs: elem ent nam e= "Tr ansm ission Ta rget "
type
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< xs: elem ent
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< xs: elem ent
nam e= " M easuredTra nsm issionAve ra ge"
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nam e= " M easuredTra nsm issionTole rance"
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nam e= " M easuredTra nsm issionRa nge"
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< xs: elem ent nam e= "Tr ansm ission Ma r k Feat ure"
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< xs: elem ent
nam e= " Tra nsm issionM ark Loca t ionD r aw ing"
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< xs: elem ent
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>
SEMI P10-0705 © SEMI 1990, 2005 89
< / xs: com plexType>
< / xs: elem ent>
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< xs: elem ent
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type
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fixed
= "Mea su re dTra nsm issionMa r k
Sit e I d
" / >
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use
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use
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fixed
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SEMI P10-0705 © SEMI 1990, 2005 90
< / xs: com plexType>
< / xs: elem ent>
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< xs: elem ent
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< xs: elem ent
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< xs: elem ent
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< xs: elem ent nam e= "Pha seAngleM a r kFea t ure "
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