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SEMI S2-0703a E © SEMI 1991, 2004 24 19.4 The locations of the tie-ins, attachments, or seismic anchorage points s hou ld be clearly identified . NOTE 89: It is not the intent of SEMI S2 that th e supplier provide the se…

SEMI S2-0703a

19 Seismic Protection

NOTE 81: Users have facilities located in areas that are

susceptible to seismic activity. The end user may require more

stringent design criteria because of increased site vulnerability

(e.g., local soil conditions and building design may produce

significantly higher accelerations) and local regulatory

requirements. Certified drawings and calculations may be

required in some jurisdictions.

19.1 General — The equipment should be designed to

control the risk of injury to personnel, adverse

environmental impact, equipment and facility damage

due to movement, overturning, or leakage of chemicals

(including liquid splashing), during a seismic event.

The design should also control equipment damage due

to failure of fragile parts (e.g., quartzware, ceramics)

during a seismic event.

NOTE 82: These criteria are intended to accomplish two

things:

(1) allow equipment suppliers to correctly design the

internal frame and components to withstand seismic forces;

and

(2) allow equipment designers to provide end-users with the

information needed to appropriately secure the equipment

within their facility.

19.1.1 Because preventing all damage to equipment

may be impractical, the design should control the

failure of parts that may result in increased hazard (e.g.,

hazardous materials release, fire, projectile).

NOTE 83: It is recommended that the hazard analysis

described in Section 6.8 be used to evaluate both the risk of

part failure and the effectiveness of control measures.

19.1.1.1 These parts should be accessible for

evaluation of damage.

NOTE 84: SEMI S8 contains guidelines for maintainability

and serviceability; these may be used to determine

accessibility.

19.2 Design Loads — The equipment, subassemblies,

and all devices used for anchoring the equipment

should be designed as follows:

19.2.1 For equipment containing hazardous production

materials (HPMs), the equipment should be designed to

withstand a horizontal loading of 94% of the weight of

the equipment, acting at the equipment’s center of

mass.

19.2.2 For equipment not containing hazardous

production materials (HPMs), the equipment should be

designed to withstand a horizontal loading of 63% of

the weight of the equipment, acting at the equipment’s

center of mass.

NOTE 85: Subassemblies may include transformers, vessels,

power supplies, vacuum pumps, monitors, fire suppression

components, or other items of substantial mass that are

attached to the equipment.

19.2.3 Horizontal loads should be calculated

independently on each of the X and Y axes, or on the

axis that produces the largest loads on the anchorage

points.

19.2.4 When calculating for overturning, a maximum

value of 85% of the weight of the equipment should be

used to resist the overturning moment.

NOTE 86: Because equipment may be placed into service

anywhere in the world, it is recommended that the seismic

protection design of the equipment be based upon

requirements that allow the equipment, as designed, to be

installed in most sites worldwide. The above loads are based

on 1997 Uniform Building Code (UBC) requirements for

rigid equipment in Seismic Zone 4, and are assumed to satisfy

most design situations worldwide.

NOTE 87: If the equipment or internal component is flexible

as defined by the UBC, is located above the midheight of the

building, or is within 5 km of a major active fault, the

horizontal design loadings in Sections 19.2.1 and 19.2.2 may

not be conservative. Likewise, there are several conditions for

which the horizontal design loadings are overly conservative

(e.g., rigid equipment with rigid internal components located

at grade, or sites with favorable soils conditions). For these

conditions, designing based on the more detailed approach in

the UBC may result in a more economical design. It is

recommended that the user engage a professional mechanical,

civil, or structural engineer to make these determinations.

19.3 The supplier should provide the following data

and procedures to the user. This information should be

included in the installation instructions as part of the

documentation covered in Section 9.

 A drawing of the equipment, its support equipment,

its connections (e.g., ventilation, water, vacuum,

gases) and the anchorage locations identified in

Section 19.4.

 The type of feet used and their location on a base

frame plan drawing.

 The weight distribution on each foot.

 Physical dimensions, including width, length, and

height of each structurally independent module.

 Weight and location of the center of mass for each

structurally independent module.

 Acceptable locations on the equipment frame for

anchorage.

NOTE 88: A “structurally independent module” reacts to

seismic loads by transferring substantially all of the loads to

its own anchorages, as opposed to transferring the loads to

adjacent modules.

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19.4 The locations of the tie-ins, attachments, or

seismic anchorage points should be clearly identified.

NOTE 89: It is not the intent of SEMI S2 that the supplier

provide the seismic attachment point hardware. Such

hardware may be provided as agreed upon between supplier

and user.

NOTE 90: It is the responsibility of the user to verify that the

vibration isolation, leveling, seismic reinforcing, and load

distribution is adequate.

20 Automated Material Handlers

20.1 This section covers automated material handlers,

which include:

 substrate handlers;

 industrial robots and industrial robot systems; and

 unmanned transport vehicles (UTVs).

NOTE 91: Substrate handlers typically handle a single

substrate at a time, and are distinguished from industrial

robots by their small load capacity.

20.2 General — The means of incorporating personnel

safeguarding into automated material handlers should

be based on a hazard analysis. The hazard analysis

should include consideration of the size, capacity,

speed, and spatial operating range of the handler.

20.2.1 Subsystem Stops — If a separate stop button is

used for the automated material handler, it should be

differentiated from the EMO button.

20.3 Substrate Handlers — See Section 20.2, General.

20.4 Industrial Robots and Industrial Robot Systems

— Industrial robots and industrial robot systems should

meet the requirements of appropriate national or

international standards, e.g., ANSI/RIA R15.06, ISO

10218, EN 775. If there are deviations from these

standards because of semiconductor applications of the

robot, these deviations may be found acceptable based

on risk assessments.

20.5 UTVs

NOTE 92: There are two basic types of UTVs: (1) the floor-

traveling (including both rail-guided and rail-independent)

UTV, that automatically travels on the floor to a specified

destination where it is unloaded or loaded; and (2) the space-

traveling UTV, which automatically travels without resting on

the floor (e.g., in the space below the ceiling) to a specified

destination where it is loaded or unloaded. UTVs do not

include rail-guided mechanisms that are attached to

equipment (such as in wet benches).

20.5.1 Collision Avoidance — UTVs generally travel

in wide areas and are used in a system rather than stand

alone operation. UTVs should be equipped with a non-

contact approach sensing device so that they do not

inadvertently contact people or other objects.

20.5.2 UTVs: Loading and Unloading Equipment

20.5.2.1 UTVs should be interlocked with equipment

such as semiconductor process equipment, automated

load ports, stockers, ground-based conveyors, and

automated warehouses as needed to ensure that the load

remains secure and that the UTV and transfer

components are not in conflict with one another.

20.5.2.2 If loading results in an unsafe condition, the

equipment should detect and indicate the condition, and

movement of all loading equipment should stop

immediately. The system should not reset or restart

automatically.

21 Environmental Considerations

21.1 This section covers environmental impacts

throughout the life of the equipment.

NOTE 93: It is recommended that environmental impacts be

balanced against other factors, including safety and health,

legal, and regulatory requirements.

NOTE 94: It is recommended that the manufacturer maintain

awareness of relevant environmental regulations, either

internally or through the user.

NOTE 95: The user is responsible for providing the

manufacturer with information regarding any environmental

restrictions that are specific to a given site and that may

impact equipment design (e.g., cumulative emissions limits,

permit requirements, site-specific programs).

NOTE 96: See Section 14 for fire suppression emission

issues.

NOTE 97: References to “process” in this section are meant

to refer to the baseline process.

21.2 Design

21.2.1 The following design guidelines apply to all

phases of equipment life, from concept to

decommissioning and disposal.

NOTE 98: The documentation described in Sections 8.5.3

and 9.4 provide information that can be used for evaluating

conformance to this section.

21.2.2 Resource Conservation

21.2.2.1 The manufacturer should consider resource

conservation (i.e., reduction, reuse, recycling) during

equipment design, for example:

 water reuse or water recycling within the

equipment;

 reduced chemical consumption, energy use, and

water use (e.g., reducing resource use when no

process is occurring);

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 reduced use of resources during maintenance

procedures (e.g., parts cleaning procedures could

include minimum rinse rates and rinse times);

 recycling or reusing chemicals in the equipment,

rather than consuming only new materials;

 reducing volume of packaging, increasing recycled

content of packaging, and/or designing reusable

packaging.

21.2.3 Chemical Selection

21.2.3.1 Chemical selection for process, maintenance,

and utility uses (e.g., gases, etchants, strippers, cleaners,

lubricants, and coolants) should take into account

effectiveness, environmental impacts, volume, toxicity,

by-products, decommissioning, disposal, and

recyclability; use of the least hazardous chemical is

preferred. To the extent practicable, the utilities,

maintenance, and process should be designed so that

the equipment operates without the use of:

 ozone depleting substances (ODSs) as identified by

the Montreal Protocol, such as chlorofluorocarbons

(CFCs), methylchloroform, hydrochlorofluoro-

carbons (HCFCs), and carbon tetrachloride, or

 perfluorocompounds (PFCs), including CF

, C

, and SF

, and CHF

due to their global

warming potential.

21.2.4 Prevention and Control of Unintended Releases

21.2.4.1 Equipment design, including feed, storage,

and waste collection systems, should prevent potential

unintended releases. At a minimum:

21.2.4.2 Secondary containment for liquids should be

capable of holding at least 110% (see first row of Table

A3-1 of Appendix 3) of the volume of the single largest

container, or the largest expected volume for any single

point failure.

NOTE 99: In some circumstances secondary containment

may be specified by the equipment supplier, but provided by

the user.

21.2.4.3 Chemical storage containers and secondary

containment should be designed for accessibility and

easy removal of collected material.

21.2.4.4 Secondary containment should have alarms

and gas detection or liquid sensing, as appropriate, or

have recommended sensing points identified in the

equipment installation instructions.

21.2.4.5 Equipment design should allow personnel to

determine all in-equipment container levels

conveniently without having to open the containers,

where ignorance of the level could result in an

inadvertent release.

21.2.4.6 Overfill level detectors and alarms should be

provided for in-equipment containers.

21.2.4.7 Secondary containment and other control

systems should be designed to ensure that chemicals

cannot be combined, where the combination could

result in an inadvertent release.

21.2.4.8 Equipment components should be compatible

with chemicals used in the manufacturing process.

Chemical systems should be designed for the specified

operating conditions, and have sufficient mechanical

strength and corrosion resistance for the intended use.

21.2.4.9 Equipment should be able to accept a signal

from a monitoring device and stop the supply of

chemical, at the first non-manual valve within the

affected system.

21.2.4.10 Chemical distribution systems should be

capable of automatic shutoff and remote shutdown.

21.2.5 Effluents, Wastes, and Emissions

NOTE 100: It is recommended that the manufacturer

document its efforts to minimize the equipment’s generation

of hazardous wastes, solid wastes, wastewater, and air

emissions.

NOTE 101: It is recommended that SEMI F5 be used for

guidance in gaseous effluent handling.

21.2.5.1 Equipment design that allows connection to a

central waste collection system is preferred, except

where collection at the equipment may facilitate

recycling or reuse opportunities or otherwise reduce

environmental impacts.

NOTE 102: It is recommended that individual drains and

exhausts be kept separate (e.g., separate outlets for acid drain,

solvent drain, deionized (DI) water drain; acid exhaust,

solvent exhaust).

21.2.5.1.1 Point-of-use collection containers should be

designed for accessibility as well as the possible reuse

and recycling of the collected materials.

21.2.5.2 Equipment should use partitions, double-

contained lines, or other similar design features to

prevent the mixing of incompatible waste streams.

21.2.5.3 The manufacturer should evaluate the

feasibility of including integrated controls for effluent

and emission treatment.

21.2.5.4 Dilution in excess of process or safety

requirements should not be used to reduce contaminant

discharge concentrations.

21.2.5.5 Segregation of effluents, wastes, and

emissions should be provided in the following cases:

 where chemically incompatible;