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SEMI S15-0200 © SEMI 2000 6 8.8 US Gover nment Occupational Safety a nd Health Organizatio n (OSHA) 7 29 CFR - Sectio ns 1910.119 and 1910.1000 US Environmental Protection Agency (EPA) 8 40 CFR 68.13, Subpar t C 7 US G o…
SEMI S15-0200 © SEMI 20005
7.4 Electrochemical — Electrochemical gas sensors
measure toxic gases and contain components
(electrodes and electrolyte) designed to react when
exposed to a specific toxic gas or a family of gases; the
reaction generates a current which is measured and
conditioned by the gas detection system and represents
an output which is proportional to the concentration of
gas, measured in parts per million (ppm) or parts per
billion (ppb).
7.5 FTIR — Fourier-transform infrared (FTIR) gas
detection systems use spectrophotometric techniques to
detect and measure gas. Infrared light is passed through
a gas sample, and the resulting absorbency spectrum is
analyzed to determine its constituents. A current output
is generated which is proportional to the concentration
of gas present.
7.6 Infrared — Monochromatic infrared gas detection
systems measure the absorption of radiation (light) by a
gas sample. The absorption is translated into a current
output which is proportional to concentration. Each gas
has a unique absorption wavelength which the system
must be tuned to make an accurate measurement.
7.7 Ion Detection — Ion detection is useful for
detecting SiO
2
particles which are created by the
burning of certain gases such as silane, TEOS and
TEOA. SiO
2
“smoke” is created when these gases are
burned, and this can be detected with an ionization
detector chamber, which operates similarly to a smoke
detector. SiO
2
particles entering the chamber create a
signal that is calibrated to represent the presence of a
known concentration of the target gas. A gas detection
system using this method is typically used in a sample
draw system and can be used either by itself or in
conjunction with a pyrolyzer to condition (burn) the gas
entering the detection head.
7.8 Molecular Emission Spectrom eter — Sample air is
injected into a reaction chamber. In the reaction
chamber, a flame, fed by hydrogen and sample air, is
the activating reaction. When a sample gas enters the
flame, reactions of the target gas result in additional
light emissions. The resulting light passes through two
optical filters and is converted to electronic signals in a
dual photomultiplier tube. The signals are combined to
produce a linear, quantitative output.
7.9 Paper Tape — Paper tape systems use the color
change of a chemically impregnated tape to detect toxic
gases. The tape changes color when exposed to a
challenge gas; the color change is then detected by a
photocell, analyzed, and converted into a concentration
value (ppm or ppb).
7.10 Solid State — One type of solid state sensor is
made of a metal oxide (typically tin-oxide) material that
changes resistance in response to the presence of a toxic
gas; the gas detection system measures this resistance
change and converts it into a concentration value. Thin
film semiconductor sensors absorb the target gas onto
the semiconductor, resulting in a transfer of electrons
which causes a measured change in the resistance of the
semiconductor and reported as a ppm or ppb
concentration.
8 Related Documents
8.1 SEMI Documents
SEMI S2 — Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
8.2 American Conference of Governmental Industrial
Hygienists (ACGIH)
1
— Threshold Limit Values for
Chemical Substances in the Work Environment
8.3 Uniform Fire Code
2
UFC Article 51 — Semiconductor Fabrication Facilities
UFC Article 80 — Hazardous Materials
8.4 National Fire Protection Association
3
NFPA 49 — Hazardous Chemical Data
NFPA 70 — National Electric Code
NFPA 72 — National Fire Alarm Code
NFPA 318 — Protection of Cleanrooms
8.5 International Fire Code
4
8.6 Santa Clara, California Uniform Fire Code,
5
Amendments 1998 Edition
8.7 Southern Building Code Congress International
6
Standard Building Code — Chapter 22: Hazardous
Materials, 1994 Edition
1 American Conference of Governmental Industrial Hygienists
(ACGIH), 1330 Kemper Meadows Drive, Cincinnati, OH 45240-
1634
2 Published by International Conference of Building Officials and
Western Fire Chiefs Association, 5360 South Workman Mill Road,
Whitter, CA 90601
3 National Fire Protection Association, 1 Batterymarch Park, Quincy,
MA 02269
4 International Fire Code Institute, 9300 Jollyville Road, Suite 105,
Austin, TX 78759
5 Santa Clara Fire Department, 777 Benton Street, Santa Clara, CA
95050
6 Southern Building Code Congress International (SBCCI), 900
Montclair Road, Birmingham, AL 35213
SEMI S15-0200 © SEMI 2000 6
8.8 US Government
Occupational Safety and Health Organization (OSHA)
7
29 CFR - Sections 1910.119 and 1910.1000
US Environmental Protection Agency (EPA)
8
40 CFR
68.13, Subpart C
7 US Government Printing Office, Washington, D.C. 20402
8 Superintendent of Documents, US Government Printing Office,
Washington, D.C. 20402
SEMI S15-0200 © SEMI 20007
APPENDIX 1
TABLE FOR COMPARISON OF PERFORMANCE CHARACTERISTICS
NOTE: The material in this appendix is an official part of SEMI S15 and was approved by full letter ballot procedures on
December 15, 1999 by the North American Regional Standards Committee.
Table A1-1
Performance Manufacturer/Technology
Characteristics A. B. C. D E.
Accuracy
Alarms
Calibration
Certifications and
Classifications
Communications (Serial)
Conditioning
Requirements
Cost of Ownership
Data Archiving
Diagnostics
Display
Drift
Environmental
Conditions
Equipment Failure
Expansion Flexibility
Extractive Systems:
Sampling Distance
Sample Cycle Time
Sample Contamination
Filter Lag
Installation (Wiring
Configuration)
Isolation
Limits of Detection:
Lowest Alarm Level
Limit of Detection
Upper limit of Detection
Linearity
Maintenance Interval
Other Utilities
Outputs
Physical Size
Poisoning
Position Effect
(Attitude Sensitivity)
Power Outage
Power Requirements
Recovery Time
Repeatability