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SEMI E24-92 © SEMI 1992, 2004 2 Section 4.3. 1. Pins 5 and 6 a re connected to the circuit which enable s openin g of the m odule' s isolati on valve at that interface. Pins 7 and 8 are c onnected across the contact…
SEMI E24-92 © SEMI 1992, 2004 1
SEMI E24-92 (Reapproved 0704)
CLUSTER TOOL MODULE INTERFACE: ISOLATION VALVE
INTERLOCKS STANDARD
This standard was technically reapproved by the Global Physical Interfaces & Carriers Committee and is the
direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition
reapproved by the North American Regional Standards Committee on April 22, 2004. Initially available at
www.semi.org June 2004; to be published July 2004. Originally published in 1992.
1 Purpose
1.1 The purpose of this standard is to prevent any
opening or closing of the isolation valve(s) which
would result in an unsafe condition or possible damage
to material or equipment.
1.2 Impact — This standard requires cluster tool
module suppliers to implement the interlock and to
define the conditions that trip the interlock.
2 Scope
2.1 This standard requires hardware inter-locks that
govern the opening and closing of the environmental
isolation valve(s) at the interface planes of a cluster
tool. This standard applies to all modules of a cluster
tool (as defined in SEMI E21).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E21 — Cluster Tool Module Interface:
Mechanical Interface and Wafer Transport Standard
3.2 Other Documents
MIL-C-26500E
1
— General Specification for
Connectors — General Purpose, Electrical, Miniature,
Circular, Environmental Resisting
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Requirements
4.1 Interlock Provision and Use — Each module
joined to another module, across a common interface
plane (as defined in SEMI E21), must provide a fail-
1 United States Military Standards, Available through the Naval
Publications and Forms Center, 5801 Tabor Avenue, Philadelphia,
PA 19120-5099, USA. Telephone: 215.697.3321
safe interlock that enables opening and closing of the
isolation valve of the other module. Each module that
has an isolation valve must use the interlock provided
by the module it is joined to across their common
interface plane.
4.2 Interlock Trip — Conditions that trip the interlock
must be defined by the module supplier. (See Section
R1-1.)
4.3 Interlock Logic — The interlock is to consist of
two normally open relays and associated actuation
circuitry in each module. (See Section R1-2.)
4.3.1 First Relay — One relay enables opening of the
isolation valve of the attached module. Contact closure
indicates a safe condition, enabling valve opening.
Contact opening disables valve opening if the valve is
closed. Contact opening does not cause the valve to
close if the valve is open. (See Section R1-3.)
4.3.2 Second Relay — The other relay enables closure
of the isolation valve of the attached module. Contact
closure indicates a safe condition, enabling valve
closure. Contact opening disables valve closure if the
valve is open. Contact opening does not cause the valve
to open if the valve is closed.
4.3.3 Monitoring — Situations can arise where the
module A interlock inhibits an operation of the valve on
module B, when that valve is already in the inhibited
condition. This potential conflict must be detected and
resolved within module B. (See Section R1-3.)
4.4 Contact Rating — The relay contacts shall be rated
for a minimum of 1 A at 24 VDC.
4.5 Wiring — Copper wire used in the interlock circuit
shall be 0.82 mm
2
cross section (18 AWG) or larger.
4.6 Interlock Connectors — Metal shell bayonet-type
connectors are specified per MIL-C-26500E as follows:
MS24265R18B11SN panel mounted receptacles on
each of the modules and MS24266R18B11PN plugs
terminating each end of the cable which interconnects
the interlock receptacles of two connected modules.
4.7 Interlock Connector Pinouts
4.7.1 Receptacle — Pins 2 and 3 of the receptacle are
connected across the contacts of the relay specified in
SEMI E24-92 © SEMI 1992, 2004 2
Section 4.3.1. Pins 5 and 6 are connected to the circuit
which enables opening of the module' s isolation valve
at that interface. Pins 7 and 8 are connected across the
contacts of the relay specified in Section 4.3.2. Pins 9
and 10 are connected to the circuit which enables
closure of the module' s isolation valve at that interface.
4.7.2 Cable and Plugs — Pins 2 and 3 of each plug on
the interlock cable are connected to pins 5 and 6
respectively of the other plug. Pins 7 and 8 of each plug
on the interlock cable are connected to pins 9 and 10
respectively of the other plug. The resulting interlock
cable is symmetric.
SEMI E24-92 © SEMI 1992, 2004 3
RELATED INFORMATION 1
NOTICE: This related information is not an official part of SEMI E24 but was reapproved for publication by full
letter ballot procedures on February 28, 1999.
R1-1 Interlock Situations
R1-1.1 Examples are given below, for the different
types of modules, of situations in which it might be
considered hazardous for a connected module to
operate its isolation valve. Note that some of these
conditions prevent opening and others prevent closing
of the valves. (See Section 4.1.). Module types are
defined in SEMI E21. SEMI S2 provides guidance in
defining potential safety hazards. It is common practice
to detect valve positions and so verify operation, but
this is not an interface matter.
R1-1.2 Transport Module Examples — The transport
module end effector (see SEMI E22) is extended
beyond the interface plane. The connected module
should not close its isolation valve, as such an operation
could damage the end effector.
R1-1.2.1 The transport module is not at an acceptable
transfer pressure. Opening the isolation valve of the
connected module could result in damage to the valve
or wafer.
R1-1.3 Process Module Examples — The transport
module end effector exclusion volume (see SEMI E22)
is obstructed. The transport module should not open its
isolation valve and attempt to extend its end effector.
R1-1.3.1 The process module is not at an acceptable
transfer pressure. For instance, the module may be at
atmospheric pressure for preventive maintenance. The
transport module should not open its isolation valve.
R1-1.3.2 An unsafe partial pressure of a hazardous gas
exists in the process module. The transport module
should not attempt to open its isolation valve.
R1-1.4 Cassette Module Example — The cassette port
(loading door) is open, indicating the possibility of a
person' s hand in the cassette module. The transport
module should not operate its isolation valve to avoid
the possibility of injury to personnel.
R1-2 Illustration of Logic
R1-2.1 The interlock logic is illustrated in Figure A1
and described in Section 4.2. In the figure, the contacts
in module B are closed, enabling operation of the
isolation valve controlled by module A, while one of
the contacts in module A is open, preventing closure of
the isolation valve controlled by module B.
R1-3 Interlock Example
R1-3.1 This example elucidates some of the interlock
logic described in Section 4.2. In the case described
here, the Transport Module (TM) end effector is
extended into a Process Module (PM), which is
equipped with an isolation valve. This valve is inhibited
from closing by the interlock in the TM.
R1-3.2 A situation arises in the PM which results in its
interlock inhibiting the opening of the isolation valve
(which is already open) on the TM. As specified in
Section 4.3.3, the TM detects the interlock change and
immediately withdraws its end effector from the PM.
The TM interlock enables the closure of the PM
isolation valve (which the PM may do if that is the
appropriate response to the situation) and the TM can
close its isolation valve.