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A M M O NIUM HYDROXIDE SEMI C21-0301 © SEMI 1978, 20 01 7 Previo us SEMI Ref erence # C1.4- 95 C7.1-96 C8.1-0298 C17.1-029 8 C11.1-94 -- Grade 1 Grade 2 Grade 3 Grade 4 VLSI Grade Tier D (Specif ication) (Specif ication)…
SEMI C21-0301 © SEMI 1978, 2001 AMMONIUM HYDROXIDE6
14 Tier A Procedures
14.1 This section does not apply to this chemical.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. The
Process Chemicals Committee considers a test method
to be valid if there is a documented recovery study
showing a recovery of 75–125%. Recovery is for a
known sample spike at 50% of the specified level.
Table 1 Impurity Limits and Other Requirements for Ammonium Hydroxide
Previous SEMI Reference # C1.4-95 C7.1-96 C8.1-0298 C17.1-0298 C11.1-94 --
Grade 1 Grade 2 Grade 3 Grade 4 VLSI Grade Tier D
(Specification) (Specification) (Specification) (Specification) (Guideline) (Guideline)
Assay (as NH
3
) 28.0 - 30.0% 28.0 - 30.0% 28.0 - 30.0% 28.0 - 30.0% 25.0 - 27.0% o
r
28.0 - 30.0%
28.0 - 30.0%
Appearance To pass test -- -- -- -- --
Color (APHA) 10 max 10 max 10 max 10 max 10 max 10 max
Residue after Ignition -- -- -- -- 2 ppm max --
Residue after Evaporation -- -- -- -- 10 ppm max --
Substances Reducing KMnO
4
(as O)
-- -- -- -- 5 ppm max --
Substances Reducing
Permanganate
To pass test To pass test To pass test To pass test -- --
Carbon Dioxide (CO
2
) 20 ppm max 20,000 ppb max 20 ppm max 20 ppm max -- 20 ppm max
Carbonate (CO
2
) -- -- -- -- 10 ppm max --
Chloride (Cl) 0.5 ppm max 200 ppb max 100 ppb max 50 ppb max 0.5 ppm max 30 ppb max
Nitrate (NO
3
) -- 400 ppb max 100 ppb max 50 ppb max -- 30 ppb max
Phosphate (PO
4
) 0.5 ppm max 200 ppb max 100 ppb max 40 ppb max 0.2 ppm max 30 ppb max
Silica (SiO
2
) -- -- -- -- 0.2 ppm max --
Sulfide (S) -- -- -- -- 0.2 ppm max --
Sulfate (SO
4
) -- 200 ppb max 100 ppb max 50 ppb max 2 ppm max 30 ppb max
Total Sulfur (SO
4
) 1 ppm max -- -- -- -- --
Aluminum (Al) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.05 ppm max 10 ppt max
Antimony (Sb) -- 5 ppb max 1 ppb max 100 ppt max -- 10 ppt max
Arsenic (As) -- 5 ppb max 1 ppb max 100 ppt max -- 10 ppt max
Arsenic and Antimony (as As) 0.05 ppm max -- -- -- 0.05 ppm max --
Barium (Ba) -- -- -- -- 0.01 ppm max 10 ppt max
Beryllium (Be) -- -- -- -- 0.01 ppm max --
Bismuth (Bi) -- -- -- -- 0.02 ppm max --
Boron (B) 0.1 ppm max 10 ppb max 1 ppb max 100 ppt max 0.01 ppm max 10 ppt max
Cadmium (Cd) -- -- -- -- 0.01 ppm max 10 ppt max
Calcium (Ca) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.1 ppm max 10 ppt max
Chromium (Cr) 0.2 ppm max 10 ppb max 1 ppb max 100 ppt max 0.01 ppm max 10 ppt max
Cobalt (Co) -- -- -- -- 0.01 ppm max --
Copper (Cu) 0.1 ppm max 10 ppb max 1 ppb max 100 ppt max 0.01 ppm max 10 ppt max
Gallium (Ga) -- -- -- -- 0.01 ppm max --
Germanium (Ge) -- -- -- -- 0.05 ppm max --
Gold (Au) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.02 ppm max --
AMMONIUM HYDROXIDE SEMI C21-0301 © SEMI 1978, 20017
Previous SEMI Reference # C1.4-95 C7.1-96 C8.1-0298 C17.1-0298 C11.1-94 --
Grade 1 Grade 2 Grade 3 Grade 4 VLSI Grade Tier D
(Specification) (Specification) (Specification) (Specification) (Guideline) (Guideline)
Indium (In) -- -- -- -- 0.01 ppm max --
Iron (Fe) 0.1 ppm max 10 ppb max 1 ppb max 100 ppt max 0.05 ppm max 10 ppt max
Lead (Pb) 0.2 ppm max 10 ppb max 1 ppb max 100 ppt max 0.01 ppm max 10 ppt max
Lithium (Li) -- -- -- -- 0.01 ppm max --
Magnesium (Mg) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.05 ppm max 10 ppt max
Manganese (Mn) 0.2 ppm max 10 ppb max 1 ppb max 100 ppt max 0.01 ppm max 10 ppt max
Molybdenum (Mo) -- -- -- -- 0.01 ppm max --
Nickel (Ni) 0.1 ppm max 10 ppb max 1 ppb max 100 ppt max 0.01 ppm max 10 ppt max
Platinum (Pt) -- -- -- -- 0.02 ppm max --
Potassium (K) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.1 ppm max 10 ppt max
Silver (Ag) -- -- -- -- 0.01 ppm max --
Sodium (Na) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.2 ppm max 10 ppt max
Strontium (Sr) -- -- -- -- 0.01 ppm max --
Thallium (Tl) -- -- -- -- 0.02 ppm max --
Tin (Sn) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.02 ppm max 10 ppt max
Titanium (Ti) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.01 ppm max 10 ppt max
Vanadium (V) -- -- -- -- 0.01 ppm max --
Zinc (Zn) 0.3 ppm max 10 ppb max 1 ppb max 100 ppt max 0.05 ppm max 10 ppt max
Zirconium (Zr) -- -- -- -- 0.01 ppm max --
Particles in bottles:
size, #/mL
≥ 1.0 µm, 25
max
≥ 0.5 µm, 25
max
≥ 0.5 µm, 25
max
≥ 0.5 µm, 25
max (see
NOTE 1)
≥ 0.5 µm, 250
max
(See NOTE 2.)
NOTE 1: Care must be taken in analyzing particles because of the potential formation of microbubbles.
NOTE 2: Due to the limitations of current particle counters, particle size and number are to be agreed upon between supplier and user. See SEMI
C1, Section 3.9 for particle counting methodology.
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
BORON TRIBROMIDE SEMI C22-0699 © SEMI 1994, 19991
SEMI C22-0699
GUIDELINE FOR BORON TRIBROMIDE
This guideline was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;
to be published June 1999. This document replaces SEMI C7.17 in its entirety. Originally published in 1994.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for boron tribromide used in the
semiconductor industry and testing procedures to
support those standards. Test methods have been shown
to give statistically valid results. This document also
provides guidelines for grades of boron tribromide for
which a need has been identified. In the case of the
guidelines, the test methods may not have been
statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of boron
tribromide used in the semiconductor industry.
3 Limitations
3.1 None.
4 Referenced Documents
4.1 None.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Clear Colorless Liquid Density at 20°C2.54 g/mL
7 Requirements
7.1 The requirements for boron tribromide for Tier A
are listed in Table 1.
8 Grade 1 Procedures
8.1 This section does not apply to this chemical.
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. Until
standardized test methods are published, test
methodology shall be determined by user and producer.
The Process Chemicals Committee considers a test
method to be valid only if there is a documented
recovery study showing a recovery of 75 - 125%.
Recovery is for a known sample spike at 50% of the
specified level.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.