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SEMI G58-94 © SEMI 1994 8 NOTICE: T hese standards do n ot purport to address safety issues, if any, ass o ciated with their use. It is the responsibility of t he user of these standards to establish appropriate safety a…

SEMI G58-94 © SEMI 19947

ENV

window frame

base

ENV – L + Š .015

L – S

Figure 7

Figure 8

SEMI G58-94 © SEMI 1994 8

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

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other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

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SEMI G59-94 © SEMI ,1994, 2002 1

SEMI G59-94 (Reapproved 0302)

TEST METHOD FOR MEASUREMENT OF IONIC CONTAMINATION ON

LEADFRAME INTERLEAFING AND THE CONTAMINATION

TRANSFERRED FROM THE INTERLEAFING TO THE LEADFRAMES

This specification was technically approved by the Global Assembling and Packaging Committee and is the

direct responsibility of the Japanese Assembling and Packaging Committee. Current edition approved by the

Japanese Regional Standards Committee on November 26, 2001. Initially available at www.semi.org

December 2001; to be published March 2002. Originally published in 1994.

1 Purpose

1.1 This test method describes a procedure to

determine the ionic contamination on leadframe

interleafing and the contamination transferred from the

interleafing to the leadframes using a water extraction

method.

2 Scope

2.1 This test method is sensitive to the following ionic

species:

, NH

, K

, Cl

, NO

, Br

, SO

, PO

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability or regulatory limitations prior to use.

3 Referenced Standards

3.1 ASTM Specifications

D 4327 — Anions in Water by Ion Chromatography

D 1193 — Specification for Reagent Water

4 Terminology

4.1 eluent — The solvent used to carry the extracted

ions through the ion exchange chromatograph.

4.2 interleaf (for semiconductor leadframes) — A

paper or plastic film which is placed between layers of

semiconductor leadframes strips to prevent tangling.

4.3 regenerant — A chemical solution containing the

ions originally present in the chromatograph column

prior to a test run, used to prepare the column for a new

test.

4.4 retention time — The time required for a particular

ion type to pass from the injection port to the detector.

1 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohocken, Pennsylvania 19428-2959, USA.

Telephone: 610.832.9585, Fax: 610.832.9555 Website:

www.astm.org

Retention time is characteristically different for each

ion type.

4.5 standard solution — A solution containing a

known concentration of the ion to be measured and

used to calibrate the chromatograph.

5 Summary of Method

Ionic contamination is extracted in water at > 95°C for

30 ± 2 minutes. The contamination is quantitatively

analyzed by ion type using ion chromatography, and the

result is presented as nanograms/unit area.

6 Significance

6.1 Contamination on the interleaf may contribute to

semiconductor device reliability problems by

transference of the contamination to the leadframes.

6.2 The method may be used by leadframe

manufacturers for the incoming inspection of the

interleafing material, or by users at incoming inspection

of the leadframes.

6.3 Correlation of device reliability results with

interleaf contamination level measurements may lead to

improved interleaf materials.

7 Interferences

7.1 The interleaf material and the leadframes must only

be touched with cleaned tweezers or while wearing

double-layer gloves with polyethylene outer gloves in

order to avoid additional contamination.

8 Equipment

8.1 Ion Chromatograph for Anion and Cation Analysis

— This equipment is to consist of a concentration

pump, guard column, separator column, and a detector

module.

The minimum sensitivity of the chromatograph for each

ion type is defined in Table 1.