semi合集-English.pdf - 第3091页

SEMI E123.1-0703 © SEMI 2003 14 Test Equipment Host (Station Control) Handler RCMD=BIN-UNITS (with bin list for multiple sites) S2,F49 " ! S2,F50 ACK: BIN-UNITS Unload units …(UNLOAD state) Load next batch of unts… …

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SEMI E123.1-0703 © SEMI 2003 13
Handler cycles devices...
... random messages
(e.g., ... variable request)
Host asks for variable S6,F15-->
x (devices tested).
<--S6,F16 Handler sends variable.
...
... eventually ends
<--S6,F11 Event : HandlerEmpty
Host Acks Event S6,F12-->
Host commands S2,F41-->
end-of-lot.
<--S2,F42 Handler acks Rmt.Cmd
Stopping
<--S6,F11 Event : Lot
Completed
Host Acks Event S6,F12-->
Idle
Host requests S6,F15-->
end-of-lot report.
<--S6,F16 Handler sends report.
R1-1.5 Continuous Load Scenario
R1-1.5.1 This is a run scenario where there are more units that need to be processed with same recipe and
configuration but were not loaded to Handler inputs initially (due to limited input space, material delays etc.) This
scenario assumes no direct link between Test Equipment and Handler, Host directs all run-to-run processing
between the two equipments. Host and Station Controller represent the same entity here.
Test Equipment Host (Station Control) Handler
Host waits for
UnitsReady event…
!
S6,F11 Event: UnitsReady
ACK: Event S6,F12
"
!
Start Processing on
Test Equipment.
Waiting for command…
Testing units…
Event: Test
Complete (w/
bin list for
multiple test
sites).
"
SEMI E123.1-0703 © SEMI 2003 14
Test Equipment Host (Station Control) Handler
RCMD=BIN-UNITS (with
bin list for
multiple sites)
S2,F49
"
!
S2,F50 ACK: BIN-UNITS
Unload units …(UNLOAD
state)
Load next batch of
unts… (LOAD state)
Repeat… until last unit is completed
!
S6,F11 Event:
LastUnitCompleted
(no more units in all
inputs and buffers).
Handler transitions to
READY state.
ACK: Event S6,F12
"
Host/Operator
determines current lot
has more units to
process, loads
remainder of lot onto
Handler Inputs.
RCMD=START
(Host initiated
resume after load is
complete.)
S2,F41
"
!
S2,F42 ACK: START
A
lternatively Operator
can resume directly
from Handler after
loading of units.
Next event to Host
would then be
“UnitsReady” event.
Processing Repeats from top again until all units for lot
is processed …
!
S6,F11 Event:
LastUnitCompleted
Handler again
transitions to READY
state per above.
ACK: Event S6,F12
"
Host/operator
determines lot has
completed.
RCMD=STOP S2,F41
"
!
S2,F42 ACK: STOP
Handler transitions to
STOPPING state and
ultimately to IDLE
state.
SEMI E123.1-0703 © SEMI 2003 15
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