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SEMI E10-0304 E © SEMI 1986, 2004 1 SEMI E10-0304 E SPECIFICATION FOR DEFINI TION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILA BILITY, AND MAI NTAINABILITY (RAM) This specification was technically approved b y the Gl…
SEMI E7-91 © SEMI 1984, 2004 3
Table 1 Flexible Cord and Cable Conductor Color
Code
No.
Phases
No.
Wires
Voltage ØA BØ CØ N Grd
1 2
#3
120 Blk Wht
#1
1 2
#3
208 Blk Red
1 3 120 Blk Wht
#1
Green
#2
1 3 208 Blk Red Green
#2
1 4 208/480 Blk Red Wht
#1
Green
#2
3 4 208/480 Blk Red Orange Green
#2
3 5 208/480 Blk Red Orange Wht
#1
Green
#2
#1: Natural Grey or Light Blue may be used. Under no circumstances
may White, Natural Grey or Light Blue be used for any purpose other
than to identify neutral or rounded conductors.
#2: Green/Yellow may be used. Green/Yellow willbe Green with one
or more Yellow stripes (Green = 50 to 70%; Yellow = 50 to 30%).
Green/Yellow is the only color internationally accepted for use as an
equipment grounding conductor. Under no circumstances may
Green/Yellow, Green or Yellow be used for any purpose other than to
identify grounding conductors.
#3: For double insulated machines only.
8 Related Documents
8.1 The following are sources of further information
concerning electrical interfaces:
Electrical Industries Association (EIA), 2001 I Street,
N.W., Washington, DC 20006
Joint Industrial Council (JlC), 7901 Westpark Dr.,
McLean, VA 22101
Western Electric Co., Inc. (WECO), “Standards for
Electrical Design and Construction,” Drawing #C-
284805, Machine Design Dept., Allentown Works,
Allentown, PA 18103
Occupational Safety & Health Administration,
Standards (OSHA) Part 1910, Title 29, Code of Federal
Regulations, Dated 7 Nov. 1978, Dept. of Labor,
Washington, DC
Underwriter’s Laboratories, Inc. (UL), 207 E. Ohio St.,
Chicago, IL 60611
IBM Corporate Bulletin, “Nonproduct Equipment
Design Standard,” “CB 3-0502-202 Support Equipment
Standard,” 1983-05, or succession thereto
American National Standards Institute, C73.73,
American National Standards Institute, 1430 Broadway,
New York, NY 10018
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature,
respecting any materials or equipment mentioned
herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor
Equipment and Materials International (SEMI) takes no
position respecting the validity of any patent rights or
copyrights asserted in connection with any items
mentioned in this standard. Users of this standard are
expressly advised that determination of any such patent
rights or copyrights, and the risk of infringement of
such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E10-0304
E
© SEMI 1986, 2004 1
SEMI E10-0304
E
SPECIFICATION FOR DEFINITION AND MEASUREMENT OF
EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY
(RAM)
This specification was technically approved by the Global Metrics Committee and is the direct responsibility
of the North American Metrics Committee. Current edition approved by the North American Regional
Standards Committee on October 15, 2003. Initially available at www.semi.org February 2004; to be
published March 2004. Originally published in 1986; previously published July 2001.
E
This standard was editorially modified in February 2004 to include changes omitted from the previous
edition. Changes were made to Table 1, Table R1-3, and Section R1-7.
1 Purpose
1.1 This document establishes a common basis for
communication between users and suppliers of
semiconductor manufacturing equipment by providing
standards for measuring RAM performance of that
equipment in a manufacturing environment.
2 Scope
2.1 The document defines six basic equipment states
into which all equipment conditions and periods of time
must fall. The equipment states are determined by
functional issues, independent of who performs the
function. The measurement of equipment reliability in
this specification concentrates on the relationship of
equipment failures to equipment usage, rather than the
relationship of failures to total elapsed time.
2.2 Section 5 (Equipment States) defines how
equipment time is categorized. Section 6 (RAM
Measurement) defines formulas for measurement of
equipment performance. Section 7 (Uncertainty
Measurement) gives additional methods for evaluating
the statistical significance of calculated performance
metrics.
2.3 Effective application of this specification requires
that equipment performance (RAM) be tracked with
regard to time and/or equipment cycles. Automated
tracking of equipment states is not within the scope of
this specification, but is covered by SEMI E58. Clear
and effective communication among users and suppliers
promotes continuous improvement in equipment
performance.
2.4 The RAM indices in this specification may be
applied directly to non-cluster tools at the whole
equipment and sub-system levels. The RAM indices
may be applied at the sub-system level (e.g., process
module) for multi-path cluster tools.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E58 — Automated Reliability, Availability, and
Maintainability Standard (ARAMS)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Definitions
4.1.1 availability — the probability that the equipment
will be in a condition to perform its intended function
when required.
4.1.2 cluster tool — a manufacturing system made up
of integrated processing modules mechanically linked
together (the modules may or may not come from the
same supplier).
4.1.2.1 single path cluster tool — a cluster tool with
only one process flow path (as used).
4.1.2.2 multi-path cluster tool — a cluster tool with
more than one independent process flow path (e.g.,
multiple load ports/load-locks, multiple process
chambers of the same type) and used as such.
4.1.3 cycle — one complete operational sequence
(including unit load and unload) of processing,
manufacturing, or testing steps for an equipment system
or subsystem. In single unit processing systems, the
number of cycles equals the number of units processed.
In batch systems, the number of cycles equals the
number of batches processed.
4.1.4 downtime (DT) — the time when the equipment is
not in a condition, or is not available, to perform its
intended function. It does not include any portion of
non-scheduled time.
SEMI E10-0304
E
© SEMI 1986, 2004 2
4.1.5 downtime event — a detectable occurrence
significant to the equipment that causes the equipment
to go from an uptime state to either a scheduled or an
unscheduled downtime state.
4.1.6 failure — any unscheduled downtime event that
changes the equipment to a condition where it cannot
perform its intended function. Any part failure,
software or process recipe problem, facility or utility
supply malfunction, or human error could cause the
failure.
NOTE 1: It is important to categorize and qualify failures in
ways that facilitate the resolution of problems and improve
overall equipment performance. Use of this specification
requires agreement between supplier and user on categorizing
failures.
4.1.7 equipment-related failure — any unplanned
event that changes the equipment to a condition where
it cannot perform its intended function solely caused by
the equipment.
4.1.8 host — the intelligent system that communicates
with the equipment, acts as a supervisory agent, and
represents the factory and the user to the equipment.
4.1.9 intended function — a manufacturing function
that the equipment was built to perform. This includes
transport functions for transport equipment and
measurement functions for metrology equipment, as
well as process functions such as physical vapor
deposition and wire bonding. Complex equipment may
have more than one intended function.
4.1.10 maintainability — the probability that the
equipment will be retained in, or restored to, a
condition where it can perform its intended function
within a specified period of time.
4.1.11 maintenance — the act of sustaining equipment
in or restoring it to a condition to perform its intended
function. In this document, maintenance refers to
function, not organization; it includes adjustments,
change of consumables,
software upgrades, repair,
preventive maintenance, etc., no matter who performs
the task.
4.1.12 manufacturing time — the sum of productive
time and standby time.
4.1.13 non-scheduled time — the time when the
equipment is not scheduled to be utilized in production.
4.1.14 operations time (oper-time) — total time minus
non-scheduled time.
4.1.15 operator — any person who communicates
locally with the equipment through the equipment’s
control panel.
4.1.16 product — units produced during productive
time (see unit).
4.1.17 ramp-down — the portion of a maintenance
procedure required to prepare the equipment for hands-
on work. It includes purging, cool-down, warm-up,
software backup, storing dynamic values (e.g.,
parameters, recipes), etc. Ramp-down is only included
in scheduled and unscheduled downtime.
4.1.18 ramp-up — the portion of a maintenance
procedure required, after the hands-on work is
completed, to return the equipment to a condition where
it can perform its intended function. It includes pump
down, warm-up, stabilization periods, initialization
routines, software load, restoring dynamic values (e.g.,
parameters, recipes), control system reboot, etc. It does
not include equipment or process test time. Ramp-up is
only included in scheduled and unscheduled downtime.
4.1.19 reliability — the probability that the equipment
will perform its intended function, within stated
conditions, for a specified period of time
4.1.20 shutdown — the time required to put the
equipment in a safe condition when entering a non-
scheduled state. It includes any procedures necessary
to reach a safe condition. Shutdown is only included in
non-scheduled time.
4.1.21 specification (equipment operation) — the
documented set of intended functions within stated
conditions for equipment operation as agreed upon
between user and supplier.
4.1.22 start-up — the time required for equipment to
achieve a condition where it can perform its intended
function, when leaving a non-scheduled state. It
includes pump down, warm-up, cool-down,
stabilization periods, initialization routines, software
load, restoring dynamic values (e.g., parameters,
recipes), control system reboot, etc. Start-up is only
included in non-scheduled time.
4.1.23 support tool — a tool that, although not part of a
piece of equipment, is required by and becomes integral
with it during the course of normal operation (e.g.,
cassettes, wafer carriers, probe cards, computerized
controllers/monitors).
4.1.24 total time — all time (at the rate of 24 hrs/day, 7
days/week) during the period being measured. In order
to have a valid representation of total time, all six basic
equipment states must be accounted for and tracked
accurately.
4.1.25 training (off-line) — the instruction of personnel
in the operation and/or maintenance of equipment done
outside of operations time. Off-line training is only
included in non-scheduled time.