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SEMI E118-1104 E © SEMI 2002, 2004 1 SEMI E118-1104 E SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE — THE WAFER ID RE ADER FUNCTIO NAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE This specification was technical…

SEMI E117-1104 © SEMI 2002, 2004 8

RELATED INFORMATION 1

APPLICATION NOTES

NOTICE: This related information is not an official part of SEMI E117 and was derived from current industry

knowledge. This related information is to be approved for publication by full letter ballot procedure.

NOTICE: This related information is not meant to modify or supersede SEMI E117 in any way. Rather, these notes

are provided primarily as a source of information to aid in the application of the standard. As such, they are to be

considered as reference material only. The standard should be referred to in all cases.

R1-1 Application Notes

R1-1.1 Compliance with This Standard — It is the device makers’ expectation that suppliers of production

equipment are ultimately responsible for ensuring that their equipment (as installed in the device makers’ facility)

complies with this standard. This expectation is the same whether the reticle load port is developed internally by the

equipment supplier or is purchased from a third party source. In either case, the production equipment supplier is

responsible for understanding all of the requirements contained in this standard. Full compliance with this standard

can only be determined after the reticle load port is integrated with the equipment and can be directly affected by

production equipment design features (such as user interfaces and light towers).

R1-1.2 To prevent interference between transport systems on the same or adjacent load ports, it is recommended

that floor-based transport vehicles and over-head hoist vehicles not exceed clearances C1 and C2 when picking up or

placing a RSP on the load port.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E118-1104

SPECIFICATION FOR WAFER ID READER COMMUNICATION

INTERFACE — THE WAFER ID READER FUNCTIONAL STANDARD:

CONCEPTS, BEHAVIOR AND SERVICE

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the Japan Information and Control Committee. Current edition approved by the Japan

Regional Standards Committee on July 19, 2002. Initially available at www.semi.org October 2002; to be

published November 2002.

This standard was editorially modified in February 2005 to correct errors in Figure R2-1.

NOTICE: The designation of SEMI E118 was updated during the 1104 publishing cycle to reflect revisions to

SEMI E118.1.

1 Purpose

1.1 The purpose of the Wafer ID Reader Functional

Standard is to provide a common specification for

concepts, behavior, and services (functions) provided

by a Wafer ID Reader to an upstream controller.

1.2 A standard interface will increase interchange-

ability of Wafer ID Readers so that users and

equipment suppliers have a wider range of choices.

2 Scope

2.1 The Wafer ID Reader Functional Standard

addresses the functional requirements for a generic

Wafer ID Reader interface with an upstream controller.

2.2 The specification includes required behavior and

required communications for a Wafer ID Reader.

2.3 This specification does not require, define, or

prohibit asynchronous messages sent by the Wafer ID

Reader.

2.4 This specification intents to read the Wafer ID

specified by SEMI Standard and accessed in the

equipment where the wafers transfer in / out is executed

with a carrier unit.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This standard does not define the specific protocol

to be used for the Wafer ID Reader. Supplements to this

standard are required to describe how the functions of

the Wafer ID Reader are implemented for specific

protocols.

4 Referenced Standards

4.1 SEMI Standards

SEMI E15  Specification for Tool Load Port

SEMI E30  Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E39  Object Services Standard: Concepts,

Behavior, and Services

SEMI E47.1  Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E62  Provisional Specification for 300 mm

Front-Opening Interface Mechanical Standard (FIMS)

SEMI E87 ― Specification for Carrier Management

(CMS)

SEMI E90 ― Specification for Substrate Tracking

SEMI E99 — The Carrier ID Reader/Writer Functional

Standard: Specification of Concepts, Behaviors, and

Services

SEMI E101 — Provisional Guide for EFEM Functional

Structure Model

SEMI T7 ― Specification for Back Surface Marking of

Double-Side Polished Wafers With a Two-Dimensional

Matrix Code Symbol

4.2 ISO/IEC Standard

ISO/IEC 16022 — International Symbology

Specification – Data Matrix

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

1 International Organization for Standardization, ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30

Website: www.iso.ch

SEMI E118-1104

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 FOUP — Front Opening Unified Pod

5.1.2 WIDR —Wafer ID Reader

5.2 Definitions

5.2.1 attribute — information about or associated with

some entity or object.

5.2.2 carrier — any cassette, box, pod, or boat that

contains wafers.

5.2.3 cassette — an open structure that holds one or

more substrates [SEMI E44].

5.2.4 controller — a system that provides control

(performs required operations when certain conditions

occur or when interpreting and acting upon

instructions) and communicates with a higher level

manager. Controllers exist at all levels within a factory.

Examples of controllers include the Multiple Wafer ID

Reader Controller, the Equipment Controller.

5.2.5 data matrix code symbol — a two-dimensional

array of square cells arranged in contiguous rows and

columns. In certain ECC200 symbols, data regions are

separated by alignment patterns. The data region is

surrounded by a finder pattern [ISO/IEC 16022].

5.2.6 front-opening unified pod (FOUP) — a box (that

complies with SEMI E47.1) with a non-removable

cassette (so that its interior complies with SEMI E1.9)

and with a front-opening interface (that mates with a

FIMS port that complies with SEMI E62).

5.2.7 fundamental requirements — the requirements

for information and behavior that must be satisfied for

compliance to a standard. Fundamental requirements

apply to specific areas of application, objects, or

services.

NOTE 1: All portions of the Wafer ID Reader specification

are considered to be fundamental requirements unless

explicitly described as optional. See also optional

requirement.

5.2.8 load port — the interface location on a tool

where wafer carriers are delivered. It is possible that

wafers are not removed from, or inserted into, the

carrier at this location.

5.2.9 message interleaving — the practice of sending a

new message request before receiving the reply to an

earlier request.

5.2.10 Multiple Wafer ID Reader controller — a unit

controlling the Reader function of one or multiple ID

Reader Heads, communicates the command/data with

the equipment controller or the equivalent controller

such as equipment controller.

5.2.11 optional capability — a specification that is not

required for an implementation to be compliant to a

standard. See also fundamental requirement.

5.2.12 reader head — a structured portion which

functions to detect the ID code. The ID reader unifying

a head function inside its body can be placed as a head.

The ID reader not unifying a head function will be

located separately from the head.

5.2.13 substrate handler — a physical subsystem

which transfers substrates between the carriers and the

process part of the equipment.

5.2.14 upstream controller — a controller that directs

the Wafer ID Reader through the communication

interface.

5.2.15 Wafer ID — an identifier for a wafer. A value

that uniquely identifies a given wafer in a factory. The

identifier may be represented physically with LASER

technologies, etc.

5.2.16 Wafer ID mark — a physical structure for

storing Wafer ID and other information.

5.2.17 Wafer ID Reader — a unit (subsystem) that

detects and decodes data from the Wafer ID mark, and

that communicates with the upstream controller. Wafer

ID Reader may be composed of Multiple Wafer ID

Reader controller and reader heads.

5.3 Data Types

5.3.1 enumerated — may take on one of a limited set

of possible values. These values may be given logical

names, but they may be represented by any single-item

data type.

5.3.2 form — type of data: positive integer, unsigned

integer, integer, floating point (float), enumerated,

boolean, text, formatted text, structure, list, ordered list.

5.3.3 integer — may take on the value of any negative

or unsigned integer. Messaging protocol may impose a

limit on the range of possible values.

5.3.4 structure — a specific set of items, of possibly

mixed data types, in a specified arrangement.

5.3.5 text — a character string. Messaging protocol may

impose restrictions, such as length or ASCII

representation.

5.3.6

unsigned integer — may take on the value of any

positive integer or zero. Messaging protocol may

impose a limit on the range of possible values.