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SEMI S22-1103a © SEMI 2003, 2005 3 SEMI S1 — Safety Guideline for Equipment Safety Labels SEMI S2 — Environm ental, Health and Saf ety Guideline for Sem iconductor M anufactur ing Equipment SEMI S3  Safety Guidelines fo…

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SEMI S22-1103a © SEMI 2003, 2005 2
14. Interface Control
15. Electrical Enclosures
16. Conductors and Cables
17. Wiring Practices
18. Electric Motors ¼ Horsepower and Larger
19. Accessories and Lighting
20. Markings
21. Technical Documentation
22. Testing
2.3 Included in this safety guideline are design considerations for electrical safety interlocks that protect against
electrical as well as non-electrical safety hazards; and non-electrical interlocks that protect against electrical safety
hazards.
2.4 This document applies to the electrical design for all equipment used to manufacture, measure, assemble, and
test semiconductor products unless the equipment is specifically excluded. See Section 3, Limitations.
NOTE 1: This safety guideline is most useful for semiconductor manufacturing equipment where no relevant product safety
standard exists.
2.5 This safety guideline applies to equipment intended to be powered by hazardous voltages or hazardous electrical
power.
NOTE 2: The official values in this guideline are expressed in the International System of Units (SI). Values that:
a) are expressed in Inch-Pound (also known as “US Customary” or “English”) units,
b) are enclosed in parentheses, and
c) directly follow values expressed in SI units
are not official, are provided for reference only, and might not be exact conversions of the SI values.
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the
responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 This safety guideline does not apply to equipment, subassemblies, and components that have been certified by
an accredited testing laboratory and used within their certification parameters, or that conform to a relevant
international or national product safety standard as defined by the scope of that standard.
NOTE 3: Criteria for jurisdictional acceptance may vary and should be taken into account although it is beyond the scope of this
document.
3.2 This safety guideline is not intended to address any requirements pertinent to explosive atmospheres, hazardous
locations, and/or hazardous process materials.
3.3 This safety guideline does not apply to support equipment that is an integral part of the facility, such as facility
air conditioning, facility fire detection or fire extinguishing systems, or facility power distribution systems, which
include motor-generator sets and transformers.
3.4 This safety guideline does not include design specifications for performance or functional characteristics of the
equipment.
4 Referenced Standards and Documents
4.1 SEMI Standards
SEMI E33 — Specification for Semiconductor Manufacturing Facility Electromagnetic Compatibility
SEMI S22-1103a © SEMI 2003, 2005 3
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental, Health and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S3 Safety Guidelines for Heated Chemical Baths
SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S13 — Safety Guideline for Operation and Maintenance Manuals Used with Semiconductor Manufacturing
Equipment
SEMI 14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing
Equipment
4.2 IEC Standards
1
IEC 60112 Method for determining the comparative and the proof tracking indices of solid insulating materials
under moist conditions
IEC 60204-1 — Safety of Machinery - Electrical Equipment of Machines, Part 1: General Requirements
IEC 60417 — Graphical Symbols for Use on Equipment
IEC 60707 — Flammability of solid non-metallic materials when exposed to flame sources - List of test methods
IEC 60950 Safety of Information Technology Equipment
IEC 61010-1 — Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use —
Part 1: General Requirements
IEC 61346-1 Industrial systems, installations and equipment and industrial products - Structuring principles and
reference designations
4.3 European Documents
2
4.3.1 CENELEC Standards
EN 60529 Degrees of Protection Provided by Enclosures
EN 61508 Functional Safety of Electrical/electronic/programmable Electronic Safety-related Systems
4.3.2 European Commission Directives
89/336/EEC Directive on Electromagnetic Compatibility
4.4 NFPA Standards
3
NFPA 70 — National Electrical Code
NFPA 79 Electrical Standard for Industrial Machinery
4.5 UL Standards
4
UL 94 Tests for Flammability of Plastic Materials for Parts in Devices and Appliances
UL 943 — Standard for Ground-Fault Circuit- Interrupters
1 International Electrotechnical Commission 3, rue de Varembé, Case Postale 131, CH-1211 Geneva 20, Switzerland. Telephone:
41.22.919.02.11; Fax: 41.22.919.03.00
2 European Union http://europa.eu.int/
3 National Fire Protection Association, 1 Batterymarch Park, PO Box 9101, Quincy, MA 02269-9101
4 Underwriters Laboratories Inc., 333 Pfingsten Rd, Northbrook, IL 60062
SEMI S22-1103a © SEMI 2003, 2005 4
4.6 ANSI Standards
5
ANSI/IPC 2221 Generic Standard on Printed Board Design
ANSI/ISA S84.01 Application of Safety Instrumented Systems for the Process Industries
4.7 ISOStandards
6
ISO 13849-1 Safety of Machinery – Safety-related Parts of Control Systems – Part 1: General Principles For
Design
NOTICE: Unless otherwise indicated, all documents cited should be the latest published versions.
5 Terminology
5.1 Definitions
5.1.1 access — a means of approaching or touching.
5.1.2 accessible — having or allowing access, see definition of access.
5.1.3 accredited testing laboratory — an independent organization dedicated to the testing of components, devices,
or systems; competent to perform evaluations based on established safety standards; and recognized by a
government or regulatory body.
5.1.4 ampacity — the current, in amperes, that a conductor can carry continuously under the conditions of use,
without exceeding the design limits for the temperature rating of the insulation, the conductor and the wire
termination.
5.1.5 basic insulation — provides a single layer of protection against electric shock.
5.1.6 bonding (bonded) — the permanent joining of metallic parts to form an electrically conductive path that
ensures electrical continuity and the capacity to conduct safely any current likely to be imposed. See protective
earthing system.
5.1.7 clearance distance — the shortest path between two conductive parts normally carrying current, or between a
conductive part normally carrying current and a conductive part that is connected to the protective earthing system,
measured through air.
5.1.8 Comparative Tracking Index (CTI) — the value obtained in accordance with Method A of IEC 60112 which
determines the Material Group of a printed wiring board. Where the CTI or material group is not known, Material
Group IIIb should be used.
5.1.9 conduit — a part of a closed wiring system of circular or non-circular cross-section for insulated conductors
and/or cables in electrical installations, allowing them to be drawn in and/or replaced.
5.1.10 control device (of a machine) — a device connected into the control circuit and used for controlling the
operation of the machine (e.g. position sensor, manual control switch, relay, magnetically operated valve, etc.).
5.1.11 convenience receptacle — an electrical outlet provided on the equipment, which does not have any load
connected to it during the normal operation of the equipment, but is intended by the equipment manufacturer to be
used to power a piece of maintenance or service equipment.
5.1.12 cord connected equipment — equipment that is intended to be electrically connected to an electric supply by
means of a flexible supply cord and attachment plug.
5.1.13 creepage distance — the shortest path between two conductive parts normally carrying current or between a
conductive part normally carrying current and a conductive part that is bonded to the protective earthing system,
measured along the surface of the insulation.
5 American National Standards Institute, Headquarters: 1819 L Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020; Fax:
202.293.9287, New York Office: 11 West 42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900; Fax: 212.398.0023, Website:
www.ansi.org
6 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30, Website: /www.iso.ch