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SEMI E130-1104 © SEMI 2003, 2004 21 must be identified with a nam e. If The Process St ate model was in the AWAITING C OMMAND sta te when the CLEAN-PROBES comm and was issued, and the cleaning task requi res the substrat…

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SEMI E130-1104 © SEMI 2003, 2004 20
Tag Data Type Size Description Unit
ReferenceDeviceY Integer 2 Y coordinate of the reference device. This attribute is dependant
on the Orientation attribute.
Row
RefDevicePosX Float 4 Offset of the center of the reference device in the X-direction
from the center of the substrate.
microMeters
RefDevicePosY Float 4 Offset of the center of the reference device in the Y-direction
from the center of the substrate.
microMeters
RefDeviceMatrixX Integer 2 X coordinate of the reference device within an exposure field.
For non-matrix substrates, this attribute = 1. This attribute is
dependant on the Orientation attribute.
-
RefDeviceMatrixY Integer 2 Y coordinate of the reference device within an exposure field.
For non-matrix substrates, this attribute = 1. This attribute is
dependant on the Orientation attribute.
-
Overdrive Float 4 Over drive value microns
UseControlMap Boolean 1 Probe locations defined in control map. -
Orientation Integer 2 Fiducial (flat or notch) orientation. Defines the Orientation used
to describe the substrate geometries. The substrate may be loaded
onto the equipment chuck with an orientation established by the
OrientationOnChuck attribute. OrientationOnChuck does not
impact the substrate coordinate references.
Degree
OriginLocation Integer 2 Reference Quadrant: 0 = Center, 1 = Upper Right, 2
= Upper Left 3 = Lower Left (default), 4 = Lower Right
-
OrientationOnChuck Integer 2 Fiducial (flat or notch) orientation of the substrate loaded onto the
chuck. Coordinate references are not impacted by this attribute.
-
FiducialType Integer 2 0 = NOTCH, 1 = FLAT -
UseHotChuck Boolean 1 Flag set to indicate the use of temperature control. -
HotChuckTemperature Integer 2 Hot chuck temperature. This attribute applies when the
“UseHotChuck” attribute is set to TRUE.
Celsius
HotChuckTolerance Integer 2 Hot chuck tolerance. This attribute applies when the
“UseHotChuck” attribute is set to TRUE.
Celsius
Rows Integer 2 The number of rows of devices on the substrate. For a row to be
included, a row must contain at least one complete device.
-
Columns Integer 2 The number of columns of devices on a substrate. For a column
to be included, a column must contain at least one complete.
-
22 Remote Commands
22.1 The purpose of this section is to identify remote commands, command parameters, and valid commands versus
states in the processing state models.
22.2 Requirements
22.2.1 All the remote commands defined by PSEM300 are required.
22.2.2 The GEM remote commands START, STOP, PAUSE, ABORT, RESUME, PP-SELECT and RCP-SELECT
are not used.
22.2.3 The alphanumeric strings defined by PSEM300 for remote commands and command parameters are
required.
22.2.4 If additional remote commands are supported, then the “Remote Command Versus Valid States” matrix must
be generated for these additional commands. Place an “X” in the table for each state in which a given command is
valid.
22.3 Remote Commands Descriptions
22.3.1 CLEAN-PROBES — This command causes the probe cleaning routine to be executed. The recipe will
contain sufficient settings to identify the cleaning processes. If there is more than one cleaning process defined, each
SEMI E130-1104 © SEMI 2003, 2004 21
must be identified with a name. If The Process State model was in the AWAITING COMMAND state when the
CLEAN-PROBES command was issued, and the cleaning task requires the substrate to be removed from the chuck,
the Process State model will transition to the SERVICE TASK state the substrate will be suspended. When the
cleaning task is completed, a suspended substrate must be restored to the chuck and the chuck will be returned to the
pre-task coordinates prior to the transition from SERVICE TASK to AWAITING COMMAND.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “CLEAN-PROBES”
Cleaning Process C - Text The name of the cleaning process that is to be performed.
If there is only one cleaning process defined, this
parameter may be omitted.
Die List M - List of type
DieCoordinate,
see Data Types
and Sizes.
List of probe sites to be cleaned. Zero length list indicates
that all sites should be cleaned.
Ack - M Integer Service Acknowledgement.
22.3.2 INDEX — This command is used in conjunction with Control Maps. The USE CONTROL MAP recipe
attribute must be set to TRUE. The INDEX command causes the prober to move the chuck to the next unprocessed
site contained in the control map.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INDEX”
Ack - M Integer Service Acknowledgement.
22.3.3 INK-DEVICE — This command causes the current die location to be inked.
22.3.3.1 The Process State model transitions to the SERVICE TASK state. When the task is completed, the Process
State model transitions from the SERVICE TASK to AWAITING COMMAND state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INK-DEVICE”
Ack - M Integer Service Acknowledgement.
22.3.4 INK-DIE — This command causes the die locations contained in the die-list to be inked. Optionally, the
host can specify a control map containing the sites to be inked.
22.3.4.1 The Process State model transitions to the SERVICE TASK state. When the task is completed, the chuck
is returned to the pre-task coordinates and the Process State model transitions from the SERVICE TASK to
AWAITING COMMAND state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INK-DIE”
Die List C - List of type
DieCoordinate,
see Data Types
and Sizes.
List of die sites to be inked.
Control Map C - Text Control Map Identifier
Either Die List or Control
Map must be supplied.
Ack - M Integer Service Acknowledgement.
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22.3.5 INSPECT-INK-MARKS — This command causes the ink marks to be inspected. The Process model
transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned to the pre-
task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING COMMAND
state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-INK-MARKS”
Die List C List of type
DieCoordinate,
see Data Types
and Sizes.
If this parameter is present, inspect the site listed. Otherwise,
inspect the current site.
Ack - M Integer Service Acknowledgement.
22.3.6 INSPECT-PTP-ALIGN — This command causes the probe to pad alignment to be inspected. The Process
State model transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned
to the pre-task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING
COMMAND state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-PTP-ALIGN”
Ack - M Integer Service Acknowledgement.
22.3.7 INSPECT-PROBES — This command causes the probes to be inspected. Support for selective probe site
inspection is not a fundamental requirement. When this capability exists, the supplier must document the format of
the probe site list. If the Process State model is in the AWAITING COMMAND state, the Process State model
transitions to the SERVICE TASK state. When the inspection task is completed, the chuck is returned to the pre-
task coordinates and the Process State model transitions from the SERVICE TASK to AWAITING COMMAND
state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “INSPECT-PROBES”
Probe Site List M C Supplier
defined
List of probe sites to be inspected. Zero length list indicates
that all probes to inspected.
Ack - M Integer Service Acknowledgement.
22.3.8 LOAD-SUBSTRATE — This command causes the next substrate identified in the Process Job to be loaded
onto the chuck. The prober must perform all the pre-conditioning requirements for probing to begin. The transition
from HANDLING MATERIAL to AWAITING COMMAND indicates that probing can commence. If the probe is
unable to perform the necessary steps to prepare the substrate for probing, the prober will send an alarm and
transition to the PROCESSING BLOCKED state.
Parameter Req/Ind Rsp/Cnf Form Comment
RemoteCommand M - Text “LOAD SUBSTRATE”
Ack - M Integer Service Acknowledgement.