semi合集-English.pdf - 第4465页

SEMI D16-0998 © SEMI 1998 4 Table 1 Substr ate Edge Length, Interfac e Dimensions, and Tol erances (mm ) Interfac e Dim ensio ns and Tolerances Edge Le ngth (mm) X1 max. X2 max. Y1 max. Y2 ± 10 mm Y3 max. Y4 max. Y5 max.…

SEMI D16-0998 © SEMI 19983

Figure 1B

Proposed Transport System to Tool Interface

6.2 Centerline location of the substrate, as it is delivered by the material handling equipment, with respect to the

tool face may not coincide with the centerline location of the substrate when the latter is finally positioned on the

tool port for substrate handling.

6.3 Substrate delivery is to be horizontal, active (pattern) face up.

6.4 The single substrate or carrier is to have a horizontal loading orientation with shorter side parallel to the tool

face plane.

6.5 Load height of the single substrate or carrier shall be adjustable on the material handling system within 20 (±

10) mm of the nominal height.

6.6 There should be no obstruction between the load port and the material delivery system within the defined

adjustable range of the load port height.

6.7 Load and unload mechanisms must allow operator-assisted loading. This implies clearance space for the

operator, as well as mechanisms that allow manual override.

SEMI D16-0998 © SEMI 1998 4

Table 1 Substrate Edge Length, Interface Dimensions, and Tolerances (mm)

Interface Dimensions and Tolerances

Edge Length

(mm)

max.

± 10 mm

max.

± 10 mm

min.

max.

Z6 Z7

max.

550 × 650 925 450 800 400 100 1000 100 900 2000 850 100 105 tba 200

600 × 720 980 500 865 435 100 1065 100 900 2000 850 100 105 tba 200

960 × 1100 1450 900 1360 650 100 1500 100 900 2000 850 100 105 tba 200

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user's attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI D17-0200 © SEMI 1998, 20001

SEMI D17-0200

MECHANICAL SPECIFICATION FOR CASSETTES USED TO SHIP

FLAT PANEL DISPLAY GLASS SUBSTRATES

This specification was technically approved by the Global Flat Panel Display – Equipment Committee and is

the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by

the North American Regional Standards Committee on December 15, 1999. Initially available on SEMI

OnLine January 2000; to be published February 2000. Originally published September 1998.

1 Purpose

1.1 This standard specifies selecte d requirements of

the cassettes used to ship flat panel substrates from the

substrate finisher to the display maker and between

process-added users.

1.2 This document incorporates pertinent dimensional

data from SEMI D18, Specification for Cassettes Used

for Horizontal Transport and Storage of Flat Panel

Display Substrates.

2 Scope

2.1 This standard is intended to se t levels of

specification for a reusable cassette to ship clean glass

substrates and process-added substrates between

organizations without compromising substrate integrity.

This standard is intended to set an appropriate level of

specification that places minimal limits on innovation

while ensuring modularity and interchangeability at

common mechanical interfaces.

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 Substrate size and thickness ar e not specified so as

not to cause constraints on supplier/customer

relationships.

4 Referenced Standards

4.1 SEMI Standards

SEMI D18 — Specification for Cassettes Used for

Horizontal Transport and Storage of Flat Panel Display

Substrates

SEMI E15 — Specification for Tool Load Port

SEMI E44 — Guide for Procurement and Acceptance

of Minienvironments

NOTE 1: As listed or revised, all documents cited shall be

the latest publications of adopted standards.

5 Terminology

See Figure 1 and Table 1.

5.1 bilateral datum plane — a vertical plane that

equally bisects the substrate and that is perpendicular to

both the horizontal and facial datum planes.

5.2 carrier capacity — the number of substrates that a

carrier holds.

5.3 cassette — as defined in SEMI E44.

5.4 cassette bottom domain — volume (below z4

above the horizontal datum plane) that contains the

bottom of the cassette.

5.5 cassette front — the area between the cassette top

and bottom domains through which substrates pass

during loading and unloading.

5.6 cassette placement sensing pads — surfaces on the

bottom of the cassette for triggering optical or

mechanical sensors.

5.7 cassette rear — the area betwe en the cassette top

and bottom domains opposite the cassette front.

5.8 cassette rear domains — volu mes (from z4 above

the horizontal datum plane to z9 above the top

substrate) that contain rear columns which prevent the

substrates from exiting the cassette rear.

5.9 cassette side domains — volumes (from z4 above

the horizontal datum plane to z9 above the top

substrate) that contain the mizo teeth and mizo plates

that support the substrates.

5.10 cassette top domain — volume (higher than z9

above the top substrate) that contains the top of the

cassette.

5.11 conveyor rails — features on t he bottom of the

cassette for supporting the cassette on roller conveyors.

5.12 conveying surface — entire bottom surface of

cassette (z15 above the horizontal datum plane),

excluding the v-rail, v-groove, and float roller zones,

for supporting the cassette on roller conveyors.

5.13 facial datum plane — a vertical plane that

equally bisects the substrates when the centers of the

substrates are aligned and that is parallel to the front