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SEMI F57-0301 © SEMI 200 0, 2001 3 manufactured poly mer co m ponents meet regulatory requirements in each location. 4 Referenced Do cuments NOTE 1: A s listed or revised, all d ocuments cited shall be the latest public …

SEMI F57-0301 © SEMI 2000, 2001 2

2.3 Unless purchased separately, p olymer components

constructed of sub-pieces, such as o-rings, gaskets, and

diaphragms, must meet the requirements of this

document at the functional component level, not as

individual sub-pieces. For example an o-ring in a union

must not degrade the overall quality of the union such

that it fails to meet the requirements of this document.

Components and spare parts purchased separately, such

as gaskets and O-rings, must meet this standard, if

applicable.

2.4 This document and associated tests specify wetted

stream performance requirements for polymer

components in an as supplied, native state and reflect

the current capabilities of the manufacturers of

polymer components.

2.5 Leach out tests and associated requirements

referenced within this document provide values from

static, not dynamic, conditions. To determine the

corresponding concentration that may result in a flow-

ing dynamic stream, please see the Related Information

Section on Theoretical Dynamic Concentration (TDC)

located at the end of this document.

2.6 Polymer Materials

2.6.1 It is the intent of this specification to focus

component qualification on performance. However, a

discussion of recommended materials may benefit the

reader and is therefore included.

2.6.2 Care must be taken to ensure t hat the materials

are compatible with the liquid streams (as shown in

Section 2.2) for long term applications. Additionally, it

is important that the materials used be compatible with

the application temperature and/or methods for bacterial

reduction such as ozone, UV light and/or hydrogen

peroxide.

2.6.3 The requirements of this speci fication often

mandate the use of existing materials of choice, such as

high purity grades of perfluoroalkoxy (PFA),

polytetrafluoroethylene (PTFE), and polyvinylidene

fluoride (PVDF). However, unique design specifica-

tions or new materials may result in instances where

significant efficiencies may be achieved while

maintaining substantially equivalent performance with

regard to this specification. These scenarios could

result in the use of new or existing materials such as

ethylenechlorotrifluoroethylene (ECTFE), polyether-

etherketone (PEEK), polypropylene (PP), acetal resin

(such as Delrin®™

, Celcon®™

and others),

polyvinyl chloride (PVC), perfluoromethylether-based

perfluoroalkoxy (MFA), etc.

1 Delrin is a trademark of DuPont; Celcon is a trademark of Hoechst

Celanese.

2.6.4 Due to purity and traceability i ssues, reprocessed

or regrind material must not be used.

2.7 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This document applies solely to polymer

components. Performance specifications for

subassemblies or bulk distribution systems may be

found in other SEMI standards (see Related Documents

Section 12.6).

3.2 This document does not includ e specifications for

pumps, storage tanks, ion exchange resin tanks, drums,

day tanks, pressure vessels, lined stainless steel

products, filters, UV sterilization systems, reverse

osmosis systems and ancillary equipment, sensors,

monitors, or ultra-filtration equipment.

3.3 Organic liquids, such as isopro pyl alcohol and

methyl alcohol, are typically in contact with stainless

steel or other non-polymeric components. The polymer

components described within this document are NOT

intended for use with such organic liquids.

3.4 Polymer components describe d within this

document are intended for use in UHP service only.

Their specified performance requirements may exceed

the needs of components used in drainage and other

lesser quality liquids.

3.5 This standard is not intended to address design or

materials issues related to safety which are addressed

elsewhere in the SEMI guidelines (see SEMI S2).

3.6 The tests referenced in this document are designed

to assess contamination from the polymer components

in an as received state. Assembly steps, such as

welding and cleaning, may actually add some

contaminants. The effects of the assembly are beyond

the scope of this document, but should be considered by

the supplier and/or user (see SEMI E49.7).

3.7 Leach out values listed in Tables 3, 4 and 5 reflect

testing in UPW for polymer component comparison

purposes. The relative leach out performance of

polymer components in actual use with other chemicals

(e.g. acids and bases) cannot be directly derived by

using the UPW data. It is incumbent upon the user to

determine if a component is suitable for use based on

these requirements (see Section 2.6.2).

3.8 This document is not intended to supersede

international, national or local codes, regulations, and

laws. Each should be consulted to ensure that the

SEMI F57-0301 © SEMI 2000, 20013

manufactured polymer components meet regulatory

requirements in each location.

4 Referenced Documents

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

4.1 SEMI Standards

SEMI E49.7 — Guide for Subsystem Assembly and

Testing Procedures - Polymer Systems

SEMI F40 — Practice For Preparing Liquid Chemical

Distribution Components for Chemical Testing

SEMI S2 — Safety Guideline for Semiconductor

Manufacturing Equipment

4.2 ASTM Standards

ASTM D4327 — Anions in Water by Chemically

Suppressed Ion Chromatography

ASTM D4779 — Total, Organic, and Inorganic Carbon

in High Purity Water by Ultraviolet (UV) or Persulfate

Oxidation, or Both, and Infrared Detection

ASTM D5904 — Standard Test Method of Total

Carbon, Inorganic Carbon, and Organic Carbon in

Water by UV, Persulfate Oxidation and Membrane

Conductivity Detection

4.3 ISO Standards

ISO 1167 — Plastic pipes for the transport of fluids -

Determination of the resistance to internal pressure

ISO 12162 — Thermoplastic materials for pipes and

fittings for pressure applications - Classification and

designation - Overall service (design) coefficient

5 Terminology

5.1 Definitions

5.1.1 Liquid Chemical Distribution System — the

collection of components and subsystems used to

deliver liquid process chemicals from a source location

to a point of use.

5.1.2 Ultrapure Water Distribution System — the

collection of components and subsystems used to

deliver ultrapure water from a source location to a point

of use.

2 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohoken, PA 19428-2959, USA

3 International Organization for Standardization, 1 rue de Varembé,

Case postale 56, CH-1211 Genève 20, Switzerland

6 Ordering Information

6.1 Device manufacturers may use this standard when

procuring facilities or processing equipment to specify

required component performance to the supplier.

Facilities services and process equipment suppliers may

also use this document to specify performance

requirements to component and subassembly suppliers.

6.2 Orders for polymer components or subassemblies

in accordance with this standard shall include the

specification number and date of issue.

7 Purity Requirements

7.1 The values found in Tables 3 t hrough 6 were

constructed from existing databases of high purity

grades of PVDF and PFA. They represent

characteristics of piping system polymer components,

which are currently providing end-users with

satisfactory results. Other materials with other particle

leach out or surface roughness characteristics may or

may not be acceptable. The end-user may need to test

such materials to determine if they will meet both the

static values of this document as well as any final

delivered fluid requirements.

7.2 Particle Contribution

7.2.1 Importance of Test: Particles released from

within polymer components can come into direct

contact with wafers and cause unwanted surface

contamination or disrupt photolithography process

steps, thereby decreasing yields.

7.2.2 Particle contribution specificat ion and testing are

restricted to polymer components as indicated in Table

7.2.3 Polymer components shall conform to the

particle contribution specifications appearing in Table

7.2.4 A Rinse Time Test (see Table 2) provides a

measure of the particle shedding from a component

when it is initially removed from its packaging in a

cleanroom environment and immediately tested.

7.2.5 The various cycle evaluations (see Table 2)

provide a measure of the particle shedding that results

from actuating the valve and the subsequent cleanup

over time. In addition, these tests provide a measure of

degradation (increased particle shedding) of the valve

as it is cycled.

7.2.6 The performance requirement values in Table 2

for the Initial Cycle Test, the 2000 Cycle Test and the

200,000 Cycle Test represent averages after subtracting

a pre-cycle test background average.

7.3 Ionic Contamination

7.3.1 Importance of Test: Ionic contamination can

have a corrosion and/or etching effect on

semiconductor devices during fabrication, causing

immediate or future device failure. Evaporation of

solutions containing ionics may leave surface residue.

7.3.2 Ionic contamination specificat ion and testing are

required for all polymer components as indicated in

Table 1. The ionic contaminants specified within this

document have been derived, in part, from industry

guidelines for UPW used in semiconductor processing.

7.3.3 Polymer components shall conform to the ionic

contamination specifications appearing in Table 3. Use

SEMI F40 to prepare the component for analysis and

ASTM D4327 to analyze polymer components.

7.3.4 The Static Value is derived fro m a prolonged

static leach out test, using UPW as the test media and

lasting for a period of 7 days. Static values do not

directly relate to the trace contaminant values, which

could be present in a flowing stream of liquid. Testing

temperature of polymer components shall be 85 ± 5°C.

A specific testing temperature is specified to achieve

comparable data for polymer components and is not

indicative of service temperatures. For most

contaminants, testing at a lower temperature will give

lower static values.

7.3.5 A mathematical relationship b etween the static

leach out value (provided in this specification) and the

corresponding concentration which may result in a

flowing stream can be theoretically calculated. This

value is offered for demonstration purposes only and is

known as the Theoretical Dynamic Concentration

(TDC). It is expressed in parts per billion (

µg/liter) in

the example calculation provided in the Related

Information 1 Section of this document.

7.4 Metallic Contamination

7.4.1 Importance of Test: Metallic contamination can

have an effect on altering the electrical properties of

semiconductor devices.

7.4.2 Metallic contamination specifi cation and testing

are required for all polymer components as indicated in

Table 1. The metallic contaminants specified within

this document have been derived, in part, from industry

guidelines for UPW used in semiconductor processing

7.4.3 Polymer components shall conform to the

metallic contamination specifications appearing in

Table 4. Use SEMI F40 to prepare the component for

analysis and an industry standard test method to analyze

polymer components (see Related Documents Section

12.5

for an applicable leachable trace inorganics test

method).

7.4.4 See Section 7.3.4 for Static Value definition.

7.4.5 See Related Information 1 for Theoretical

Dynamic Concentration calculation.

7.5 Total Organic Carbon (TOC)

7.5.1 Importance of Test: TOC can h ave an effect on

silicon oxidation, uniformity of etching and gate oxide

breakdown voltage of semiconductor devices.

7.5.2 TOC specification and testing are restricted to

polymer components as indicated in Table 1.

7.5.3 Polymer components shall conform to the TOC

contamination specifications appearing in Table 5. Use

SEMI F40 to prepare the component for analysis and

ASTM D4779 or D5904 to analyze polymer

components.

7.5.4 See Section 7.3.4 for Static Value definition.

7.5.5 See Related Information 1 for Theoretical

Dynamic Concentration calculation.

7.6 Surface Roughness

7.6.1 Importance of Test: Surface roughness can

influence microbial proliferation, provide an

entrapment area for microcontamination build up and/or

promote shedding of the polymer itself within a

distribution system.

7.6.2 Surface Roughness specification and testing is

required for all polymer components as indicated in

Table 1.

7.6.3 Polymer components shall conform to surface

roughness specifications appearing in Table 6. For ease

of use and comparison purposes, the preferred method

of testing is by use of a stylus in direct contact with the

component surface, known as contact profilometry (see