semi合集-English.pdf - 第5556页

SEMI P10-0705 © SEMI 1990, 2005 51 <xs:element name="MaskRegistrMark" type="XYType"/> </xs:sequence> <xs:sequence minOccurs="0"> <xs:element name="CellRegistrMark&q…

SEMI P10-0705 © SEMI 1990, 2005 50

<xs:sequence minOccurs="0">

<xs:element name="RegistrOrthoReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrRelative" type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="RegistrRelativeReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrRefMaskId"

type="xs:string"/>

<xs:element name="RegistrRefMaskSetId"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrRefMaskName"

type="xs:string"/>

<xs:element name="RegistrRefMaskSetName"

type="xs:string"/>

<xs:sequence minOccurs="0">

<xs:element name="RegistrRefMaskSetVersion"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrEquipReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="EquipSiteReqd" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrStdGrid" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="RegistrRefMethodReqd"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrAlgorithm"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrCompensationTemperature"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:sequence minOccurs="0">

<xs:element name="RegistrMarkId"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

SEMI P10-0705 © SEMI 1990, 2005 51

<xs:element name="MaskRegistrMark"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CellRegistrMark"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MeasureFileName"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrMarkFeature"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrMarkLocationDrawing"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrMarkDrawing"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="RegistrMarkSeparation"

type="XYType"/>

<xs:element name="RegistrMarkCount"

type="XYType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartRegistration"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndRegistration"/>

</xs:complexType>

<xs:complexType name="CdGroupType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdDefinition"

type="CdDefinitionType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="NumberOfCds" type="xs:integer"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:sequence minOccurs="0">

<xs:element name="CdSiteId" type="xs:string"/>

</xs:sequence>

<xs:element name="CdLocation" type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdMatrixFileName"

type="xs:string"/>

</xs:sequence>

SEMI P10-0705 © SEMI 1990, 2005 52

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartCdGroup"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndCdGroup"/>

</xs:complexType>

<xs:complexType name="CdDefinitionType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdQualityId" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdData" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdDigitized" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdToneClear" type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdMorphography" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdPercentClear" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdPercentClearWindow"

type="WindowType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdTarget" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdOrientation" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdPitch" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdFeature" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdLocationDrawing"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdDrawing" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdReferenceOnly"

type="xs:boolean"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdTolerance" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">