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SEMI E54.10-0600 © SEMI 2 000 10 # Curr ent State Trigger Ne w State Action Comment state “Laser Turning On” and to required state “Laser On Bu t Not St able”. Set the Laser Status a ttribute to the a ppropriate value s …

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SEMI E54.10-0600 © SEMI 20009
# Current State Trigger New State Action Comment
and determines that
sensor is not missing.
appropriate value.
3LASER
ADDRESSABLE
Device detects that it has
been set to a laser
interlock condition.
LASER
INTERLOCKED
Set Laser Status
attribute to
appropriate value.
Valid for all sub-
states of LASER
ADDRESSABLE.
4LASER
INTERLOCKED
Device detects removal
of interlock condition
and determines that
sensor is missing.
SENSOR
MISSING
Set Laser Status
attribute to
appropriate value.
5SENSOR
MISSING
Device detects that it has
been set to a laser
interlock condition.
LASER
INTERLOCKED
Set Laser Status
attribute to
appropriate value.
6SENSOR
MISSING
Device detects
replacement of sensor.
LASER
ADDRESSABLE/
LASER OFF
Set Laser Status
attribute to
appropriate value.
Device moves to
LASER OFF.
7LASER
ADDRESSABLE/
LASER OFF
Device detects that
sensor is missing.
SENSOR
MISSING
Set Laser Status
attribute to
appropriate value.
8 LASER OFF Laser On request LASER ON AND
STABLE
Take the object from
the LASER OFF state
through optional laser
states LASER
TURNING ON and
LASER ON BUT
NOT STABLE to the
required LASER ON
AND STABLE state,
turning on the laser
and stabilizing it
respectively. Set the
Laser Status attribute
to the appropriate
values throughout the
transition. Issue
Laser On response
and begin the
“counting” process.
(See NOTE 2.)
LASER TURNING
ON and “LASER
ON BUT NOT
STABLE” are
optional
intermediate states
between LASER
OFF and LASER
ON AND STABLE.
Laser must not be
missing or in an
interlocked off state.
Service response is
not issued until
transition to LASER
ON AND STABLE
is completed.
9 LASER ON AND
STABLE
Laser Off request LASER OFF Stop the “counting”
process. (See NOTE
2.) Turn the laser off.
Issue Laser Off
response.
10 LASER
INTERLOCKED
Laser Off request or
Laser On request
LASER
INTERLOCKED
Error response Object cannot move
from this state until
interlock is turned
off.
11 SENSOR
MISSING
Laser Off request or
Laser On request
SENSOR
MISSING
Error response Object cannot move
to LASER
ADDRESSABLE
state until sensor is
replaced.
12 LASER OFF Laser Off request LASER OFF Error response Laser is already off.
13 LASER OFF Laser On request LASER OFF Device attempts to
take the laser from the
“Laser Off” state
through optional laser
Behavior associated
with determining
that laser will not
turn on properly or
SEMI E54.10-0600 © SEMI 2000 10
# Current State Trigger New State Action Comment
state “Laser Turning
On” and to required
state “Laser On But
Not Stable”. Set the
Laser Status attribute
to the appropriate
values throughout the
transition attempt.
Laser either won’t
turn on properly or
won’t stabilize. Turn
laser back off and
generate Error
response.
won’t stabilize is
manufacturer
specific.
14 LASER ON LASER ON AND
STABLE
Error response Laser is attempting
to turn on.
15 Entry into LASER
NOT OFF
Laser On request Conditional:
LASER NOT
OFF/LASER
TURNING ON or
LASER
ON/LASER ON
AND NOT
STABLE or
LASER ON AND
STABLE
Set Laser Status
attribute to
appropriate value.
Entry state depends
on device support
for optional states
LASER TURNING
ON and LASER ON
/ LASER ON AND
NOT STABLE or
LASER ON AND
STABLE
16 LASER
TURNING ON
Device detects that the
laser is on.
LASER
ON/LASER ON
AND NOT
STABLE or
LASER ON AND
STABLE
Set Laser Status
attribute to
appropriate value.
Behavior associated
with determining
that laser is in the
process of turning
on and is
manufacturer
specific.
17 Entry into LASER
ON
Laser On request Conditional:
LASER
ON/LASER ON
AND NOT
STABLE or
LASER ON AND
STABLE
Set Laser Status
attribute to
appropriate value.
Entry state depends
on device support
for optional states
LASER ON AND
NOT STABLE or
LASER ON AND
STABLE.
18 LASER ON AND
NOT STABLE
Device determines that
the laser is stable.
LASER ON AND
STABLE
Set Laser Status
attribute to
appropriate value.
Laser is on.
Behavior associated
with determining
that laser will turn
on properly or won’t
stabilize is
manufacturer
specific.
NOTE 1: Note that this matrix augments the Device Manager Behavior State Transition Matrix as defined in SEMI E54.1 [3]. All transitions are
in addition to those specified in SEMI E54.1.
NOTE 2: The “counting” process is defined in Section 8.8.3.1.
8.3 Sensor Actuator Controller Object (SAC) — The Sensor Actuator Controller object is the device component
responsible for coordinating the interaction of the ISPM device with the sensory/actuation/control environment as
specified in SEMI E54.1 [3]. The following sections specify the components of the SAC object that are not specified
in the Common Device model or require further definition than specified in the CDM.
SEMI E54.10-0600 © SEMI 200011
8.3.1 Sensor Actuator Controller Object Attributes — The attributes provided by the Sensor Actuator Controller
object are defined in SEMI E54.1 [3]. Table 10 contains the additional attributes required for the Sensor Actuator
Controller object.
Table 10 SAC Object Attributes
Attribute Name Attribute Identifier Access Network Required Form
Number of Bins SacA65 R* Yes UINT
Count Mode SacA66 RW* Yes Enumerated, USINT
Duration SacA67 R No REAL
NOTE 1: “*” Indicates that the specific attribute is nonvolatile. Nonvolatile requires that the current attribute value be maintained through a
component power cycle.
8.3.1.1 Number of Bins — An attribute that specifies the number of counters in the device. This value represents
the number of Sensor-AI-Counter objects in the device.
8.3.1.2 Count Mode — An attribute that specifies whether all count object values are cleared (to zero) when read.
This attribute is an enumerated USINT that can take on one of the following values:
0 = The particle counter count is not affected by reading the count.
1 = The particle counter count is cleared to zero when the count (“value” attribute of the Counter object) is read
or reported through a service request to or from an Assembly-ISPM object that contains that count.
2 = The particle counter count is cleared to zero when the count (“value” attribute of the Counter object) is read
or reported (regardless of the connection) through a service request to or from either an Assembly-ISPM
object that contains that count (“value” attribute), or the Counter object that contains the count.
3–63 = Reserved
64–255 = Manufacturer Specified
8.3.1.3 Duration (Optional) — An attribute that defines the interval of time during which the particle counts (value
of Value object attribute) are collected and put into the bin assemblies.
8.3.1.4 Initial and Default Values
Table 11 SAC Object Attributes Initial and Default Values
Attribute Initial Value Default Value Comment
Number of Bins Manufacturer Specified Manufacturer Specified
Count Mode LVV 0 Do not clear particle counter value.
Duration Manufacturer Specified Manufacturer Specified
8.3.2 Sensor Actuator Controller Object Services — The services provided by the Sensor Actuator Controller
object are defined in SEMI E54.1 [1]. Table 12 contains the additional services required for the Sensor Actuator
Controller object.
Table 12 SAC Object Services
Service Service Identifier Type Description
Clear Counts S33 R Used to clear the “Value” attribute of all Sensor-AI-Counter
sensor objects.
Reserved S34–S64 — Reserved for future expansion
Manufacturer Specified > S64 — Manufacturer Specific services
8.3.2.1 Clear Counts (Optional) — This service is used to instruct all of the Sensor-AI-Counter object to perform a
one-time clear of their respective Sensor-AI-Counter “Value” attributes by setting the value to zero. There are no
parameters required for this service.