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SEMI E58-0703 © SEMI 1997, 2003 29 4.1.8 Norm al co mmuni cations to both operator a nd host are unava ilable from powerdown to a point wit h in or following syste m initialization. It is recommen ded that initialization…

SEMI E58-0703 © SEMI 1997, 2003

Table 12 Table 12 ARAMSStateChange Service

Parameter Req/Ind Rsp/Conf Description

ObjSpec C - The object specifier, used to specify the owner of the target object. When omitted,

the receiver of the message is intended.

ARAMSCode M - New ARAMS state/substate requested.

SymptomID C - ARAMS Symptom ID. Optional.

SymptomText C - Symptom description. Optional.

RequestStatus - M Information concerning the success or failure of the request.

3.5 ResetAccumulators — The ResetAccumulators service is sent to the service provider to request that the set of

accumulators defined in Section 11.5 be reset.

3.5.1 Table 13 defines the parameters for the ResetAccumulators service.

Table 13 Table 13 ResetAccumulators Service

Parameter Req/Ind Rsp/Conf Description

ObjSpec C - The object specifier, used to specify the owner of the target object. When omitted,

the receiver of the message is intended.

RequestStatus - M Information concerning the success or failure of the request.

4 ARAMS Behavioral Requirements

This section specifies the behavior required for

ARAMS compliance.

13.8 ARAMS State Transitions — ARAMS compliance

requires that the equipment be capable of Transitions 1

through 11 in Table 1, with the exception of Transition

9. Transitions 12 and higher are optional.

4.1.1 Transition 9 is required only of equipment that

puts itself in a preventive maintenance mode based on

one or more internally monitored parameters, such as a

cycle counter. Transition 9 specifies that such a

transition takes place from STANDBY to

SCHEDULED DOWNTIME only. For equipment

without this feature, Transition 9 never occurs.

4.1.2 The equipment is required to provide the

capability to report to the host each time a state

transition occurs and to include data related to that

transition in these reports. Transition data included in

these reports allows the factory to calculate the amounts

of time spent in the different states.

4.1.3 At all transitions except Transition 10, when a

manufacturing state is specified, and Transition 11, the

current value of ARAMSState is stored in

PrevARAMSState and the ARAMS Substate Code

specified is then stored in ARAMSState. A user

selection of a specific manufacturing state is discussed

in Section 16.5 below.

4.1.4 For all equipment-initiated transitions, except as

specified in Sections 16.5 and 16.6, the equipment shall

use an ARAMS Substate Code representing the default

for that state and shall not select a substate.

4.1.5 DowntimeAlarm and DowntimeAlarmText are

set only for equipment-initiated transitions to

SCHEDULED DOWNTIME and UNSCHEDULED

DOWNTIME. For all other transitions, these variables

are cleared.

4.1.6 If the equipment supports ARAMS accumulators

(Section 11.5), then the time spent in the previous state

is calculated and the appropriate accumulator is updated

at this time.

13.9 Powerup Entry — The ARAMS State Model

becomes active during or after initialization following a

powerup or reset when Transition 1 occurs. The state

entered at Transition 1 (the default entry state) depends

upon the ARAMS state that was last active before the

powerdown or reset occurred. This is determined by the

ARAMS Substate Code stored in ARAMSState

(Section 11.2.4). If this value is not a valid ARAMS

Substate Code as defined in Section 9.4, then the

default entry state is NON-SCHEDULED TIME.

4.1.7 At Transition 1, if the value in Powerdown-Time

does not represent a valid date and time, it shall be set

to a string of all zeroes. The value stored in

PowerdownTime is then stored in LastPowerdown to

preserve the estimate of the timestamp of the last

powerdown or reset. PowerdownTime is next set to the

current date and time, and periodic updating of Class 5

variables is enabled.

SEMI E58-0703 © SEMI 1997, 2003 29

4.1.8 Normal communications to both operator and

host are unavailable from powerdown to a point within

or following system initialization. It is recommended

that initializations affecting communications with the

host precede initialization of the ARAMS State Model,

to allow an event report to be sent to the host on

Transition 1. It is highly desirable to the host to receive

an event report for Transition 1. However, it is not

required for ARAMS compliance.

4.1.9 Transition 11 never generates an event report.

13.10 Powerup and Powerdown States — The

ARAMS state entered at Transition 1 is the default or

powerup entry state for the ARAMS State Model. The

powerdown state is the state that was active at

Transition 11 and is determined by the value stored in

ARAMSState at the time of Transition 1.

4.1.10 If the value in ARAMSState indicates any non-

manufacturing state (ENGINEERING, SCHEDULED

DOWNTIME, UNSCHEDULED DOWNTIME, or

NON-SCHEDULED TIME), it is regarded by the

factory as continuing in that state both during the time it

is powered off and at Transition 1. The powerup entry

state is the same as the powerdown state.

4.1.10.1 If the equipment is in PRODUCTIVE or

STANDBY and is powered off, it is regarded by the

factory as in UNSCHEDULED DOWNTIME from the

time of the powerdown, through any subsequent

powerup, and until it is specifically put into a different

state by the user. The ARAMS powerup entry state

either is UNSCHEDULED DOWNTIME or is

determined by an optional variable PowerupState

(Section 11.4.2) to be either UNSCHEDULED

DOWNTIME or STANDBY.

4.1.10.2 If the ARAMS state prior to powerdown

cannot be determined (e.g., if it has never been set or is

invalid), the state entered after powerup is NON-

SCHEDULED TIME.

4.1.10.3 Time-in-state calculations for the powerdown

state assume that any transition to a new state occurs at

the time of powerdown, re-boot, or reset.

13.10.1 PowerupState — PowerupState, where

supported, shall be configurable by the user to specify

either UNSCHEDULED DOWNTIME or STANDBY

as the powerup entry state after a powerdown has

occurred from PRODUCTIVE or STANDBY. The

impact of loss of power has different effects on

different types of equipment. An entry state of

STANDBY allows those types of equipment that do not

have safety or setup concerns to be powered off and on

and returned to manufacturing. PowerupState contains a

text character of either “2” (STANDBY) or “5”

(UNSCHEDULED DOWNTIME) and has an initial

default value of “5”. If the value in PowerupState is

neither “2” nor “5”, then it shall be set to “5”.

13.11 User-Initiated State Change Requests — The

user may request an ARAMS state change at any time.

The host requests a state change through the ARAMS

message ARAMSStateChange (Section 15.5),

specifying an ARAMS Substate Code or the special

manufacturing code “0000”. The operator uses the

human interface to request a state change, and this shall

result in the specification of a valid ARAMS Substate

Code (Section 9.4) or of the manufacturing code.

4.1.11 The equipment shall deny the request if the

specified code is not valid or if the user specifies a code

for manufacturing when any exception condition exists

that would prevent the equipment from performing its

intended function.* Otherwise, Transition 10 occurs,

regardless of whether the new ARAMS Substate Code

is the same or different from the value in ARAMSState

representing the current state.

* NOTE: See SEMI E10 definitions.

4.1.12 If the user specifies a manufacturing state, and

the equipment accepts the state change request, then

Transition 10 occurs and is immediately followed by

Transition 2. Transition 2 always occurs in conjunction

with Transition 10 and does not generate a report

separately from Transition 10. It is regarded as an

extension of Transition 10 where the equipment

determines the specific state/substate based on its

internal status at the time.

4.1.13 At Transition 2, the equipment determines the

new state as either PRODUCTIVE or STANDBY,

based on its internal condition at the time. It is

prohibited from transitioning to PRODUCTIVE unless

its productive criteria have been met and it is busy

performing its intended function. The current value of

ARAMSState is moved to PrevARAMSState, and the

ARAMS Substate Code for the new state is placed in

ARAMSState. The event report associated with

Transition 10 shall be generated after the equipment has

determined the new state at Transition 2 and updated

the appropriate variables.

4.1.14 The user may optionally specify a symptom

identifier and text, which are saved in the variables

SymptomID and SymptomText (Section 11.2). If not

provided, SymptomID is set to zero and SymptomText

is set to a zero-length text string. The equipment does

not otherwise set these values.

4.1.15 The user also may optionally enter comments

that are stored in DowntimeData when selecting a

transition to UNSCHEDULED DOWNTIME from a

manufacturing state. Otherwise, DowntimeData is set

to a zero-length text string.

SEMI E58-0703 © SEMI 1997, 2003

13.12 Production and Standby Substates — Transitions

2, 3, and 4 are made automatically by the equipment.

User requests to change to PRODUCTIVE or

STANDBY are accepted as methods of setting the

current substate of PRODUCTIVE or STANDBY.

However, within the MANUFACTURING superstate,

the equipment is responsible for determining when its

production criteria are satisfied.

4.1.16 Unless the equipment has information as

specified in this section concerning the appropriate

substate of PRODUCTIVE or STANDBY, then the

equipment shall select the appropriate default ARAMS

Substate Code (“1000” or “2000”, defined in Section

9.2).

4.1.17 To provide substate refinements important to

the user, the equipment shall remember the last

ARAMS Substate Code specified by the user for the

PRODUCTIVE state at Transition 10 and use this as a

default PRODUCTIVE substate value PrdState (Section

11.2) until a new value is specified. This value shall be

used for the new (current) ARAMS state/substate

information in the variable ARAMSState whenever the

equipment transitions to PRODUCTIVE.

4.1.18 The equipment normally uses the default code

for all transitions to STANDBY (“2000”). However,

when the user specifies an ARAMS Substate Code for

STANDBY with a substate, this value is to be used at

the next following transition to STANDBY at

Transition 2 (if the equipment then transitions to

STANDBY) or at the subsequent occurrence of

Transition 4 (if the equipment transitioned to

PRODUCTIVE at Transition 2).

4.1.19 This value is discarded (or reset to “2000”)

after a single use or upon any other transition that

intervenes between the Transition 10 where it is

specified and the time it is applied. This includes

intervening occurrences of a new Transition 10 as well

as of Transitions 11, 1, and others.

4.1.20 It is not important that the equipment provide

the user access to this value except when it is stored in

ARAMSState.

13.13 Equipment-Selected Substates — Equipment

may provide an optional capability to select substates of

PRODUCTIVE and STANDBY. In this case, the

equipment shall provide a user-configurable variable

SubstateSelect that enables and disables this capability

(Section 11.4.7).

4.1.21 Substate selection by the equipment is subject

to the requirements specified in Section 16.5. If the user

has selected a substate of PRODUCTIVE or

STANDBY, the equipment is restricted to that substate

or extensions of that substate. Note that a user-selected

substate of STANDBY is applied at most once.

4.1.22 The capability of selecting substates includes

the ability to select a new substate of the current state.

Transistions 12 and 13 shall be used for this purpose.

4.1.23 When transitioning to STANDBY, normally at

the completion of a process cycle, multiple standby

conditions may exist. For example, the equipment may

need both material and instructions from the host. In

general, a substate code of 2200 (SBY/No product)

shall take precedence over 2100 (SBY/No operator) and

2500 (SBY/No host).

4.1.24 If the standby condition represented by the

currently selected substate clears, then the equipment

shall either select a new substate of STANDBY

(Transition 12) or transition from STANDBY

(Transition 3).

4.1.25 Additional rules for determining substates may

be specific to a type of equipment and may be specified

by standards defining the capabilities for that type of

equipment.

4.1.26 The equipment supplier shall document the

prioritization of standby conditions used by the

equipment and of the basis for selecting substates of

PRODUCTIVE.

13.14 Equipment-Detected Exceptions — The

equipment may detect exceptions in any ARAMS state.

However, only those exceptions that occur during an

uptime state are of interest to the host.

4.1.27 Transitions 5 and 7 indicate the equipment

detects a fault condition and transitions to

UNSCHEDULED DOWNTIME from STANDBY and

PRODUCTIVE respectively. Transitions 6 and 8 are

provided to allow the equipment to return to its prior

state and are discussed in the following section.

4.1.28 When the equipment detects an exception

condition during PRODUCTIVE or STANDBY, so that

it is unable to perform its intended function, it shall

immediately transition to UNSCHEDULED DOWN-

TIME. The identifier of the associated alarm is stored

in DowntimeAlarm, and any description text associated

with that alarm is stored in DowntimeAlarmText. The

equipment supplier may provide additional descriptive

text that would be useful in diagnostics or analysis in

DowntimeData. In the case of the failure of a

component, attributes of that component (e.g., serial

number, installation date, lifetime cycles) is desirable.

4.1.29 If the equipment detects an exception condition

in non-uptime states, it shall not initiate a state change.

Exceptions occur for many reasons in non-

manufacturing states. For example, the equipment may