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SEMI E127-0705 © SEMI 2003, 2005 2 12.4 Object Services ............................................................................................................................... ................. 21 12.5 Creation o…

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SEMI E127-0705 © SEMI 2003, 2005 1
SEMI E127-0705
SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE
COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published July 2003;
previously published November 2004.
Contents
1 Purpose.......................................................................................................................................................................4
1.1 Integrated Measurement......................................................................................................................................4
1.2 Specification for the Integrated Measurement Module Communications (IMMC)..............................................4
2 Scope ..........................................................................................................................................................................4
2.1 Scope of This Document ......................................................................................................................................4
3 Limitations..................................................................................................................................................................4
3.1 Host/Integrated Equipment Interface ..................................................................................................................4
3.2 Object-Based Implementation..............................................................................................................................4
3.3 In-Situ Processing................................................................................................................................................4
4 Referenced Standards and Documents .......................................................................................................................4
4.1 SEMI Standards...................................................................................................................................................4
4.2 Other Sources ......................................................................................................................................................5
5 Terminology ...............................................................................................................................................................5
5.1 Abbreviations and Acronyms...............................................................................................................................5
5.2 Definitions ...........................................................................................................................................................5
6 Conventions................................................................................................................................................................6
6.1 Object Conventions..............................................................................................................................................6
6.2 State Model Conventions.....................................................................................................................................7
6.3 Service Message Representation .........................................................................................................................7
7 General Requirements ................................................................................................................................................8
7.1 Protocol Requirements ........................................................................................................................................8
7.2 Required Standards .............................................................................................................................................8
7.3 Required Basic Capabilities ................................................................................................................................8
7.4 State Models ........................................................................................................................................................9
7.5 Objects.................................................................................................................................................................9
7.6 Service Requirements.........................................................................................................................................10
8 Overview ..................................................................................................................................................................10
8.1 Background........................................................................................................................................................10
9 Communication Ports and Clients ............................................................................................................................10
9.1 Ports ..................................................................................................................................................................10
9.2 Clients................................................................................................................................................................10
9.3 Bandwidth and Performance .............................................................................................................................11
10 Integrated Measurement Module Object Model .....................................................................................................11
10.1 Description ......................................................................................................................................................11
11 The Integrated Measurement Module Object .........................................................................................................12
11.1 Relationship of IMM Object And Physical Module .........................................................................................12
11.2 IMM Service State Model ................................................................................................................................12
11.3 Object Attributes..............................................................................................................................................13
11.4 System Initialization.........................................................................................................................................15
11.5 IMM Events and Alarms..................................................................................................................................16
11.6 IMM Object Services .......................................................................................................................................17
12 Substrate Transfer Path Object ...............................................................................................................................18
12.1 Description ......................................................................................................................................................18
12.2 Object State Model ..........................................................................................................................................18
12.3 Object Attributes..............................................................................................................................................20
SEMI E127-0705 © SEMI 2003, 2005 2
12.4 Object Services ................................................................................................................................................21
12.5 Creation of Substrate Objects..........................................................................................................................21
12.6 Substate Verification........................................................................................................................................22
12.7 Substrate Orientation.......................................................................................................................................23
12.8 Transfer Path Calibration ...............................................................................................................................23
12.9 Substrate Transfer Path Events, Errors, and Alarms ......................................................................................24
12.10 Substrate Transfer Path Event Variables ......................................................................................................24
12.11 Substrate Transfer Path Scenarios ................................................................................................................25
13 IMM Data...............................................................................................................................................................30
13.1 Overview..........................................................................................................................................................30
13.2 Tables ..............................................................................................................................................................31
14 IMM Data Table Object..........................................................................................................................................31
14.1 Description ......................................................................................................................................................31
14.2 IMM Data Table Object State Model...............................................................................................................32
14.3 IMM Data Table Object Attributes..................................................................................................................33
14.4 IMM Data Table Object Event Variables ........................................................................................................36
14.5 Types of IMM Data Table Objects...................................................................................................................36
14.6 IMM Data Table Object Services ....................................................................................................................38
15 Data Table Objects .................................................................................................................................................38
15.1 Data Table Object Model ................................................................................................................................38
15.2 Data Row Template Object..............................................................................................................................40
15.3 Master Data Table Objects..............................................................................................................................41
16 Requirements for Objects Defined in Other Standards...........................................................................................42
16.1 Substrate Object ..............................................................................................................................................42
16.2 Process Job Management................................................................................................................................42
17 Event and Exception Management .........................................................................................................................42
18 Message Service Definitions ..................................................................................................................................42
18.1 List of Services.................................................................................................................................................42
18.2 Service Parameters..........................................................................................................................................43
18.3 Message Detail ................................................................................................................................................45
19 Services Provided by Client....................................................................................................................................48
19.1 List of Client Services......................................................................................................................................48
20 IMMC Compliance.................................................................................................................................................48
20.1 Overview of Requirements...............................................................................................................................48
21 Related Documents.................................................................................................................................................49
21.1 List of Documents ............................................................................................................................................49
Tables
Table 1 Service State Model Transitions.....................................................................................................................13
Table 2 IMM Object Attribute Definitions..................................................................................................................13
Table 3 Retention Rule Element Definitions...............................................................................................................15
Table 4 Event Variables for IMM Object....................................................................................................................17
Table 5 IMM Object Services......................................................................................................................................17
Table 6 Substrate Transfer Path State Model Transitions............................................................................................19
Table 7 Substrate Transfer Path Object Attribute Definitions.....................................................................................20
Table 8 List of Substrate Transfer Path Services.........................................................................................................21
Table 9 Event Variables for Substrate Transfer Path Object.......................................................................................24
Table 10 Substrate Transfer Path Load Scenario.........................................................................................................25
Table 11 Substrate Transfer Path Unload Scenario .....................................................................................................28
Table 12 IMM Data Table Object Transitions.............................................................................................................33
Table 13 IMM Data Table Object Attribute Definitions .............................................................................................33
Table 14 Attribute Elements for IMM Data Table Object...........................................................................................35
Table 15 Event Variables for IMM Data Table Objects..............................................................................................36
Table 16 IMM Raw Data Table Object Attribute Definitions.....................................................................................37
SEMI E127-0705 © SEMI 2003, 2005 3
Table 17 IMM Converted Data Table Object Attribute Definitions............................................................................37
Table 18 Event Variables for Conversion Data Table Object......................................................................................37
Table 19 IMM Calibration Data Table Object Attribute Definitions ..........................................................................38
Table 20 Data Table Object Attribute Definitions.......................................................................................................39
Table 21 Data Row Attribute Definitions....................................................................................................................39
Table 22 Data Row Template Attribute Definitions....................................................................................................40
Table 23 Data Information Attribute Definitions ........................................................................................................40
Table 24 Assurance Element Definitions ....................................................................................................................41
Table 25 Additional Substrate Attribute Definitions...................................................................................................42
Table 26 List of Services.............................................................................................................................................43
Table 27 Definitions for Parameters and Parameter Elements ....................................................................................43
Table 28 Definitions for RetentionRule Parameter Elements......................................................................................44
Table 29 Valid ErrorCode Enumerations ....................................................................................................................45
Table 30 ClientConnect Service Parameters................................................................................................................45
Table 31 ClientDisconnect Service Parameters...........................................................................................................46
Table 32 RequestRetentionConditions Service Parameters.........................................................................................46
Table 33 Parameters for ChangeService......................................................................................................................46
Table 34 SetAutoTableSend Service Parameters ........................................................................................................46
Table 35 SetRetentionConditions Service Parameters.................................................................................................46
Table 36 TransferPathCalibration Service Parameters................................................................................................47
Table 37 XfrCmdListRequest Service Parameters ......................................................................................................47
Table 38 XfrCommand Service Parameters ................................................................................................................47
Table 39 XfrHalt Service Parameters ..........................................................................................................................47
Table 40 XfrVerify Service Parameters.......................................................................................................................48
Table 41 List of Client Services ..................................................................................................................................48
Table 42 IMMC Compliance.......................................................................................................................................48