semi合集-English.pdf - 第3865页

SEMI F22-1102 © SEMI 1997, 2002 15 NOTICE: SEMI makes no warranties or represen tations as to the suitability of the standards set forth herein for any particular application. The determination of the suitability of the …

SEMI F22-1102 © SEMI 1997, 2002 14

Figure 4

Specialty Gas Cabinet System Flow Chart (cont.)

SEMI F22-1102 © SEMI 1997, 2002 15

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F23-0697 © SEMI 1997, 2003 1

SEMI F23-0697 (Reapproved 0303)

PARTICLE SPECIFICATION FOR GRADE 10/0.2 FLAMMABLE

SPECIALTY GASES

This specification was technically reapproved by the Global Gases Committee and is the direct responsibility

of the North American Gases Committee. Current edition approved by the North American Regional

Standards Committee on October 25, 2002. Initially available at www.semi.org December 2002; to be

published March 2003. Originally published June 1997.

1 Purpose

1.1 The purpose of this document is to set a maximum

permissible particle concentration for 10/0.2 grade

flammable specialty gases and to describe a reference

method for its verification.

2 Scope

2.1 This document applies only to flammable gases

delivered through specialty gas systems at pressures up

to 8 × 10

Pa (8 atmospheres). This method is not

suitable for direct sampling from high pressure

cylinders at pressures above 8 × 10

Pa (8

atmospheres). This document applies only to the

following gas:

Hydrogen (H

)

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standard

SEMI C6.3 — Particle Specification for Grade 20/0.2

Hydrogen (H

) Delivered as Pipeline Gas

3.2 JIS Standard

JIS B 9921 — Japanese Industrial Standard (1989),

“Light Scattering Automatic Particle Counter”

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Variables

= Volume of the i

sample interval of the system gas

= Volume of the i

sample interval of the background

1 Japanese Industrial Standards, Available through the Japanese

Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo

107-8440, Japan. Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014

Website: http://www.jsa.or.jp

= Concentration of particles observed in the i

sample o

interval of the system gas

= Concentration of particles observed in the i

sample o

interval of the background

= Number of sample intervals of the system gas

= Number of sample intervals of the background

Average observed concentration of counts in the

system gas sample

Average observed concentration of background counts

Calculated concentration of particles in the system gas

Standard deviation of

4.2 gas sample volume (V

, V

) — The volume of the

sample interval, expressed in standard liters at standard

conditions, 0°C (32°F) and 1 × 10

Pa (1 atmosphere)

pressure. Standard cubic feet (SCF) is defined at

21.1°C (70°F) and 1 × 10

Pa (1 atmosphere) pressure.

4.3 average observed concentration of counts

(

X ,

X ) — The average concentration of counts, i.e.:

4.4 calculated concentration of particles (

X ) — The

concentration of particles in the system gas obtained by

correcting the observed concentration in the system gas

for the observed concentration in the background, i.e.:

= X

− X

4.5 standard deviation (S

, S

) — A statistical

measure of the spread of the concentration of the counts

or particles. The first two are obtained from the

interval and average concentrations and the number of

intervals, i.e.: