semi合集-English.pdf - 第1295页

SEMI E5-1104 © SEMI 1982, 2004 237 Stream,Function Name (Mnemonic) Direction S16,F24 PRJobSetReci peVariable Acknowledge S,H< -E Description Indicate the stat us of the request to set recip e variables. ERRTEXT will c…

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SEMI E5-1104 © SEMI 1982, 2004 236
Stream,Function Name (Mnemonic) Direction
S16,F21 PRGetSpace S,H->E
Description
Requests the equipment to return the number of process jobs it has space to create.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F22 PRGetSpace Send S,H<-E
Description
Sends the host the number of process jobs which can be created.
Structure
<PRJOBSPACE>
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F23 PRJobSetRecipeVariable S,H->E
Description
Reset the value of recipe variable parameters for a specific process job.
Structure
L,2
1. <PRJOBID>
2. L,m [m = # recipe variables]
1. L,2
1. <RCPPARNM
1
>
2. <RCPPARVAL
1
>
.
.
m. L,2
1. <RCPPARNM
m
>
2. <RCPPARVAL
m
>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 237
Stream,Function Name (Mnemonic) Direction
S16,F24 PRJobSetRecipeVariable Acknowledge S,H<-E
Description
Indicate the status of the request to set recipe variables. ERRTEXT will contain the RCPPARNM value for parameters that
could not be reset.
Structure
L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
If n = 0, no errors exist.
Stream,Function Name (Mnemonic) Direction
S16,F25 PRJobSetStartMethod S,H->E
Description
Used to request to change the start method (USERSTART or AUTO) for one or more process jobs.
Structure
L,2
1. L,m [m = # of jobs]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
2. <PRPROCESSSTART>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 238
Stream,Function Name (Mnemonic) Direction
S16,F26 PRJobSetStartMethod Acknowledge S,H<-E
Description
Acknowledges request to set job start method and indicates any errors. ERRTEXT will contain the identifiers of any process
jobs that did not accept the new process start method.
Structure
L,2
1. L,m [m = # of jobs]
1. <PRJOBID
1
>
.
.
m. <PRJOBID
m
>
L,2
1. <ACKA>
2. L,n
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
n. L,2
1. <ERRCODE
n
>
2. <ERRTEXT
n
>
Exception
None
Stream,Function Name (Mnemonic) Direction
S16,F27 Control Job Command Request S,H->E
Description
Send a control job command to a control job.
Structure
L,3
1. <CTLJOBID>
2. <CTLJOBCMD>
3. L,2
1. <CPNAME>
2. <CPVAL>
Exception
3. L,2 IS L,0 for commands that do not need parameters.