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SEMI S2-0703a E © SEMI 1991, 2004 6 NOTE 6: For the purpose of this guideline, a “series of events” is limited to those events resulting from a single point failure. See also Section 6.5. 5.2.45 noncomb ustible material …

SEMI S2-0703a

5.2.27 hazardous voltage — unless otherwise defined

by an appropriate international standard applicable to

the equipment, voltages greater than 30 volts rms, 42.4

volts peak, 60 volts dc are defined in this document as

hazardous voltage.

NOTE 4: The specified levels are based on normal conditions

in a dry location.

5.2.28 hood — in the context of Section 22 and

Appendix 2 of this guideline, “hood” means a shaped

inlet designed to capture contaminated air and conduct

it into an exhaust duct system.

5.2.29 hood entry loss factor (K or F

) — a unitless

factor that quantifies hood efficiency. If the hood is

100% efficient, then K or F

= 0. Related equations:

Q = 4.043A[(SP

/d)/(1+F

)]

0.5

where:

Q = volumetric flow rate in m

/sec,

A = cross sectional area of the duct in m

= hood static pressure in mm water gauge (w.g.),

and d = density correction factor (unitless).

(US units: Q = 4005A[(SP

/d)/(1+F

)]

0.5

where:

Q = volumetric flow rate in cfm.

A = cross sectional area of the duct in ft

= hood static pressure in inches water gauge (w.g.),

and d = density correction factor (unitless).)

5.2.30 incompatible — as applied to chemicals: in the

context of Section 23 of this guideline, describes

chemicals that, when combined unintentionally, may

react violently or in an uncontrolled manner, releasing

energy that may create a hazardous condition.

5.2.31 intended reaction product — chemicals that are

produced intentionally as a functional part of the

semiconductor manufacturing process.

5.2.32 interlock — a mechanical, electrical or other

type of device or system, the purpose of which is to

prevent or interrupt the operation of specified machine

elements under specified conditions.

5.2.33 ionizing radiation — alpha particles, beta

particles, gamma rays, x-rays, neutrons, high-speed

electrons, high-speed protons, and other particles

capable of producing ions in human tissue.

5.2.34 laser — any device that can be made to produce

or amplify electromagnetic radiation in the wavelength

range from 180 nm to 1 mm primarily by the process of

controlled stimulated emission.

5.2.35 laser product — any product or assembly of

components that constitutes, incorporates, or is intended

to incorporate a laser or laser system (including laser

diode), and that is not sold to another manufacturer for

use as a component (or replacement for such

component) of an electronic product.

5.2.36 laser source — any device intended for use in

conjunction with a laser to supply energy for the

excitation of electrons, ions, or molecules. General

energy sources, such as electrical supply mains, should

not be considered to be laser energy sources.

5.2.37 laser system — a laser in combination with an

appropriate laser energy source, with or without

additional incorporated components.

5.2.38 likelihood — the expected frequency with

which a mishap will occur. Usually expressed as a rate

(e.g., events per year, per product, or per substrate

processed).

5.2.39 local exhaust ventilation — local exhaust

ventilation systems operate on the principle of

capturing a contaminant at or near its source and

moving the contaminant to the external environment,

usually through an air cleaning or a destructive device.

It is not to be confused with laminar flow ventilation.

Synonyms: LEV, local exhaust, main exhaust,

extraction system, module exhaust, individual exhaust.

5.2.40 lower explosive limit — the minimum

concentration of vapor in air at which propagation of

flame will occur in the presence of an ignition source.

Synonyms: LEL, lower flammability limit (LFL).

5.2.41 maintenance — planned or unplanned activities

intended to keep equipment in good working order.

(See also the definition for service.)

5.2.42 mass balance — a qualitative, and where

possible, quantitative, specification of mass flow of

input and output streams (including chemicals, gases,

water, deionized water, compressed air, nitrogen, and

by-products), in sufficient detail to determine the

effluent characteristics and potential treatment options.

5.2.43 material safety data sheet (MSDS) — written or

printed material concerning chemical elements and

compounds, including hazardous materials, prepared in

accordance with applicable standards.

NOTE 5: Examples of such standards are USA government

regulation 29 CFR 1910.1200, and Canadian WHMIS

(Workplace Hazardous Material Information System).

5.2.44 mishap — an unplanned event or series of

events that results in death, injury, occupational illness,

damage to or loss of equipment or property, or

environmental damage.

SEMI S2-0703a

NOTE 6: For the purpose of this guideline, a “series of

events” is limited to those events resulting from a single point

failure. See also Section 6.5.

5.2.45 noncombustible material — a material that, in

the form in which it is used and under the conditions

anticipated, will not ignite, burn, support combustion,

or release flammable vapors when subjected to fire or

heat. Typical noncombustible materials are metals,

ceramics, and silica materials (e.g., glass and quartz).

(See also the definition for combustible material.)

5.2.46 non-ionizing radiation — forms of electro-

magnetic energy that do not possess sufficient energy to

ionize human tissue by means of the interaction of a

single photon of any given frequency with human

tissue. Non-ionizing radiation is customarily identified

by frequencies from zero hertz to 3 × 10

hertz

(wavelengths ranging from infinite to 100 nm). This

includes: static fields (frequencies of 0 hertz and

infinite wavelengths); extremely low frequency fields

(ELF), which includes power frequencies; subradio-

frequencies; radiofrequency/microwave energy; and

infrared, visible, and ultraviolet energies.

5.2.47 non-recycling, deadman-type abort switch — a

type of abort switch that must be constantly held closed

for the abort of the fire detection or suppression system.

In addition, it does not restart or interrupt any time

delay sequence for the detection or suppression system

when it is activated.

5.2.48 occupational exposure limits (OELs) — for the

purpose of this document, OELs are generally

established on the basis of an eight hour workday.

Various terms are used to refer to OELs, such as

permissible exposure levels, Threshold Limit Values



maximum acceptable concentrations, maximum

exposure limits, and occupational exposure standards.

However, the criteria used in determining OELs can

differ among the various countries that have established

values. Refer to the national bodies responsible for the

establishment of OELs. (Threshold Limit Value is a

registered trademark of the American Conference of

Governmental Industrial Hygienists.)

5.2.49 operator — a person who interacts with the

equipment only to the degree necessary for the

equipment to perform its intended function.

5.2.50 parts-cleaning hood — exhausted hood used for

the purpose of cleaning parts or equipment. Synonym:

equipment cleaning hood.

5.2.51 positive-opening — as applied to

electromechanical control devices. The achievement of

contact separation as a direct result of a specified

movement of the switch actuator through non-resilient

members (i.e.

, contact separation is not dependent upon

springs).

5.2.52 potentially hazardous non-ionizing radiation

emissions — for the purposes of this guideline, non-

ionizing radiation emissions outside the limits shown in

Appendix 5 are considered potentially hazardous.

5.2.53 pyrophoric material — a chemical that will

spontaneously ignite in air at or below a temperature of

54.4C (130F).

5.2.54 radio frequency (rf) — electromagnetic energy

with frequencies ranging from 3 kHz to 300 GHz.

Microwaves are a portion of rf extending from 300

MHz to 300 GHz.

5.2.55 readily accessible — capable of being reached

quickly for operation or inspection, without requiring

climbing over or removing obstacles, or using portable

ladders, chairs, etc.

5.2.56 recognized — as applied to standards; agreed to,

accepted, and practiced by a substantial international

consensus.

5.2.57 rem — unit of dose equivalent. Most

instruments used to measure ionizing radiation read in

dose equivalent (rems or sieverts). 1 rem = 0.01 sievert.

5.2.58 reproductive toxicants — chemicals that are

confirmed or suspected to cause statistically significant

increased risk for teratogenicity, developmental effects,

or adverse effects on embryo viability or on male or

female reproductive function at doses that are not

considered otherwise maternally or paternally toxic.

5.2.59 residual — as applied to risks or hazards: that

which remains after engineering, administrative, and

work practice controls have been implemented.

5.2.60 risk — the expected losses from a mishap,

expressed in terms of severity and likelihood.

5.2.61 safe shutdown condition — a condition in which

all hazardous energy sources are removed or suitably

contained and hazardous production materials are

removed or contained, unless this results in additional

hazardous conditions.

5.2.62 safety critical part — discrete device or

component, such as used in a power or safety circuit,

whose proper operation is necessary to the safe

performance of the system or circuit.

5.2.63 service — unplanned activities intended to

return equipment that has failed to good working order.

(See also the definition for maintenance.)

5.2.64 severity — the extent of the worst credible loss

from a mishap caused by a specific hazard.

SEMI S2-0703a

5.2.65 sievert (Sv) — unit of dose equivalent. Most

instruments used to measure ionizing radiation read in

dose equivalent (rems or sieverts). 1 Sv = 100 rems.

5.2.66 standard temperature and pressure — for

ventilation measurements, either dry air at 21C (70F)

and 760 mm (29.92 inches) Hg, or air at 50% relative

humidity, 20C (68F), and 760 mm (29.92 inches) Hg.

5.2.67 supervisory alarm — as applied to fire detection

or suppression systems; an alarm indicating a

supervisory condition.

5.2.68 supervisory condition — as applied to fire

detection or suppression systems; condition in which

action or maintenance is needed to restore or continue

proper function.

5.2.69 supplemental exhaust — local exhaust

ventilation that is used intermittently for a specific task

of finite duration.

5.2.70 supplier — party that provides equipment to,

and directly communicates with, the user. A supplier

may be a manufacturer, an equipment distributor, or an

equipment representative. (See also the definition for

user.)

5.2.71 testing — the term “testing” is used to describe

measurements or observations used to validate and

document conformance to designated criteria.

5.2.72 trouble alarm — as applied to fire detection or

suppression systems; an alarm indicating a trouble

condition.

5.2.73 trouble condition — as applied to fire detection

or suppression systems; a condition in which there is a

fault in a system, subsystem, or component that may

interfere with proper function.

5.2.74 user — party that acquires equipment for the

purpose of using it to manufacture semiconductors.

(See also the definition for supplier.)

5.2.75 velocity pressure (VP) — the pressure required

to accelerate air from zero velocity to some velocity V.

Velocity pressure is proportional to the kinetic energy

of the air stream. Associated equation:

VP = (V/4.043)

, where V = air velocity in m/s, and VP

= velocity pressure in mm water gauge (w.g.).

[U.S. units: VP = (V/4005)

, where

V = velocity in feet per second, and

VP = velocity pressure in inches water gauge (w.g.)]

5.2.76 volumetric flow rate (Q) — in the context of

Section 22 and Appendix 2 of this guideline, Q = the

volume of air exhausted per unit time. Associated

equation: Q = VA, where V = air flow velocity, and A

= the cross-sectional area of the duct or opening

through which the air is flowing at standard conditions.

5.2.77 wet station — open surface tanks, enclosed in a

housing, containing chemical materials used in the

manufacturing of semiconductor materials. Synonyms:

wet sink, wet bench, wet deck.

6 Safety Philosophy

6.1 A primary objective of the industry is to eliminate

or control hazards during the equipment’s life cycle

(i.e., the installation, operation, maintenance, service,

and disposal of equipment).

6.2 The assumption is made that operators,

maintenance personnel, and service personnel are

trained in the tasks that they are intended to perform.

6.3 The following should be considered in the design

and construction of equipment:

 regulatory requirements;

 industry standards;

 this guideline; and

 good engineering and manufacturing practices.

6.4 This guideline should be applied during the design,

construction, and evaluation of semiconductor

equipment, in order to reduce the expense and

disruptive effects of redesign and retrofit.

NOTICE: Section 6.5 below will be withdrawn

upon July 1, 2006 publication and replaced by the

new Section 6.5 including: figures and tables as

shown in Delayed Revisions Section 2. The EH&S

Committee has voted that implementation of the

information is OPTIONAL before the effective date.

6.5 No reasonably foreseeable single-point failure

condition or operational error should allow exposure of

personnel, facilities, or the community to hazards that

could result in death, significant injury, or significant

equipment damage.

NOTE 7: The intent is to control single fault conditions that

result in significant risks (i.e., Critical, High, or Medium risks

based on the example risk assessment matrix in SEMI S10).

6.6 Equipment safety features should be fail-safe or of

a fault-tolerant design and construction.

6.7 Components and assemblies should be used in

accordance with their manufacturers’ ratings and

specifications, where using them outside the ratings

would create a safety hazard.

6.8 A hazard analysis should be performed to identify

and evaluate hazards. The hazard analysis should be