semi合集-English.pdf - 第880页
SEMI E116-0705 © SEMI 2002, 2005 12 # PREVIOUS STATE TRIGGER NEW STATE ACTIONS COMMENTS 7 BLOCKED All BLOCKED EPT modules that prevented another EPT module from starting a new task or completing a curren t task no longer…
SEMI E116-0705 © SEMI 2002, 2005 11
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
3 BUSY All EPT modules that were
BUSY with task type of 1..5
transition either to IDLE or to
BUSY with task type other
than 1..5.
IDLE
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = IDLE
PreviousEPTState
=
BUSY
4 BUSY Any EPT module transitions to
BUSY state with task type 1..5.
BUSY
5 BUSY {
At least one EPT module
transitions to a BLOCKED
state and prevents another EPT
module from starting a new
task or completing an existing
task
[AND]
There are no other EPT
modules BUSY with task type
1..5.
} [OR] {
Any EPT module that was
BUSY with task type 1..5
transitions to either IDLE or
BUSY with task type other
than 1..5.
[AND]
There is at least one EPT
module in BLOCKED state
that is preventing another EPT
module from starting a new
task or completing an existing
task.
}
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BLOCKED
PreviousEPTState
=
BUSY
BlockedReason is set
BlockedReasonText is set
6 BLOCKED At least one EPT module
transitions to BUSY with task
type of 1..5.
BUSY
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BUSY
PreviousEPTState
=
BLOCKED
SEMI E116-0705 © SEMI 2002, 2005 12
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
7 BLOCKED All BLOCKED EPT modules
that prevented another EPT
module from starting a new
task or completing a current
task no longer prevents the
EPT module from doing so.
[AND]
No EPT module is BUSY with
task type 1.. 5.
IDLE
EPTStateChange event is
triggered
EPTStateTime is
calculated
EPTState = IDLE
PreviousEPTState =
BLOCKED
8 IDLE Any EPT module transitions to
BLOCKED that prevents
another EPT module from
starting a new task.
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is
calculated
BlockedReason is set
BlockedReasonText is set
EPTState = BLOCKED
PreviousEPTState = IDLE
9 BLOCKED Any EPT module transitions to
BLOCKED that prevents or
continues to prevent another
EPT module from starting a
new task or completing a
current task.
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is calculated
BlockedReason is set
BlockedReasonText is set
EPTStateTime does not
change. Thus when the
equipment transitions
out of BLOCKED state,
the value of
EPTStateTime will
reflect the total time the
equipment was
BLOCKED from
processing.
PreviousEPTState
does
not change. Thus,
PreviousEPTState
will
continue to reflect the
state of the equipment
before it was
BLOCKED from
processing.
10 EPTTracker Objects
10.1 The equipment shall provide SEMI E39-compliant EPTTracker objects to track performance of EPT
Equipment and Modules. The equipment shall provide one EPTTracker object for the equipment and one
EPTTracker object for each EPT Module (both Production and EFEM/LoadPort EPT Modules). The EPTTracker
object is used to maintain and update the SEMI E116 attributes each time an SEMI E116 transition occurs. These
EPTTracker objects will be owned at the equipment level. These objects shall be available immediately after
equipment initialization, and shall be persistent until equipment shutdown. If certain attributes are identified as
persistent, the object shall restore the value of these attributes on initialization. The Host can use SEMI E39 services
(e.g., GetAttr) to access EPTTracker objects. The EPTTracker object format is specified in Table 3.
SEMI E116-0705 © SEMI 2002, 2005 13
Table 3 EPTTracker Object Definition
Attribute Name Definition Access Reqd Form
ObjType Object type RO Y Text “EPTTracker”
ObjID Object identifier. A name assigned
by the Equipment designer
uniquely identifying the instance of
the EPTTracker object within this
Equipment.
RO Y Text 1 to 80 characters. Shall conform
to SEMI E39 restrictions on ObjID.
BlockedReason A numeric code that identifies the
most recent blocked condition of
the related EPT module.
RO Y Enumerated:
0 = Not Blocked
1 = Unknown
2 = Safety Threshold
3 = Error Condition
4 = Parametric Exception
5 = Aborting, Aborted
6 = Pausing, Paused
7 = Reserved
8 = Reserved
9 = Reserved
BlockedReasonText A description of the most recent
blocked condition of this
Equipment or EPT module. May
provide further details to
BlockedReason.
RO Y Text 0 to 80 characters
This attribute must be defined for both
equipment and module EPTTracker
objects. For the Equipment, a
BlockedReason value is determined by
the blocked module.
DisableEventOnTransition A list of zero to nine EPT State
Model transitions for which event
reporting to the host are disabled.
RW Y List of zero to nine integers in the
range 1–9.
EPTElementType A numeric code that indicates
whether this EPTTracker object
refers to the equipment or an EPT
module.
RO Y Enumerated
0 = Equipment
1 = Production EPT Module
2 = EFEM/LoadPort EPT Module
EPTState The current EPT state of this
equipment or EPT module.
RO Y Enumerated
0 = Idle
1 = Busy
2 = Blocked
EPTStateTime Time spent in the previous EPT
State, prior to entering the current
EPTState.
RO Y Unsigned integer
Value in seconds
EPTElementName A human-understandable name for
this equipment or module, which
must be unique among all objects
of EPTTracker type.
RO Y Text 0 to 80 characters
PreviousEPTState The previous EPT state of this
equipment or EPT module, prior to
entering the current EPTState.
RO Y Enumerated
0 = Idle
1 = Busy
2 = Blocked
3 = No State