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SEMI G59-94 © SEMI ,1994, 2002 1 SEMI G59-94 (Reapproved 0302) TEST ME THOD FOR MEASUREMENT OF IO NIC CONTA M INATION ON LEA DFRA ME I NTERLEA FING AND THE CONTA MI NA TION TRA NSFERRED FROM THE INTERLEA FI NG TO THE LEA…

SEMI G58-94 © SEMI 1994 8

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SEMI G59-94 © SEMI ,1994, 2002 1

SEMI G59-94 (Reapproved 0302)

TEST METHOD FOR MEASUREMENT OF IONIC CONTAMINATION ON

LEADFRAME INTERLEAFING AND THE CONTAMINATION

TRANSFERRED FROM THE INTERLEAFING TO THE LEADFRAMES

This specification was technically approved by the Global Assembling and Packaging Committee and is the

direct responsibility of the Japanese Assembling and Packaging Committee. Current edition approved by the

Japanese Regional Standards Committee on November 26, 2001. Initially available at www.semi.org

December 2001; to be published March 2002. Originally published in 1994.

1 Purpose

1.1 This test method describes a procedure to

determine the ionic contamination on leadframe

interleafing and the contamination transferred from the

interleafing to the leadframes using a water extraction

method.

2 Scope

2.1 This test method is sensitive to the following ionic

species:

, NH

, K

, Cl

, NO

, Br

, SO

, PO

2.2 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability or regulatory limitations prior to use.

3 Referenced Standards

3.1 ASTM Specifications

D 4327 — Anions in Water by Ion Chromatography

D 1193 — Specification for Reagent Water

4 Terminology

4.1 eluent — The solvent used to carry the extracted

ions through the ion exchange chromatograph.

4.2 interleaf (for semiconductor leadframes) — A

paper or plastic film which is placed between layers of

semiconductor leadframes strips to prevent tangling.

4.3 regenerant — A chemical solution containing the

ions originally present in the chromatograph column

prior to a test run, used to prepare the column for a new

test.

4.4 retention time — The time required for a particular

ion type to pass from the injection port to the detector.

1 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohocken, Pennsylvania 19428-2959, USA.

Telephone: 610.832.9585, Fax: 610.832.9555 Website:

www.astm.org

Retention time is characteristically different for each

ion type.

4.5 standard solution — A solution containing a

known concentration of the ion to be measured and

used to calibrate the chromatograph.

5 Summary of Method

Ionic contamination is extracted in water at > 95°C for

30 ± 2 minutes. The contamination is quantitatively

analyzed by ion type using ion chromatography, and the

result is presented as nanograms/unit area.

6 Significance

6.1 Contamination on the interleaf may contribute to

semiconductor device reliability problems by

transference of the contamination to the leadframes.

6.2 The method may be used by leadframe

manufacturers for the incoming inspection of the

interleafing material, or by users at incoming inspection

of the leadframes.

6.3 Correlation of device reliability results with

interleaf contamination level measurements may lead to

improved interleaf materials.

7 Interferences

7.1 The interleaf material and the leadframes must only

be touched with cleaned tweezers or while wearing

double-layer gloves with polyethylene outer gloves in

order to avoid additional contamination.

8 Equipment

8.1 Ion Chromatograph for Anion and Cation Analysis

— This equipment is to consist of a concentration

pump, guard column, separator column, and a detector

module.

The minimum sensitivity of the chromatograph for each

ion type is defined in Table 1.

SEMI G59-94 © SEMI 1994, 2002 2

Table 1 Sensitivity of Ion Chromatograph

Ion Sensitivity(ng/mL)

0.2

0.5

Cation

1.0

0.3

2.0

1.0

Anion

1.0

8.2 Chart Recorder

8.3 Ion Extraction Vessels — Polypropylene or

polytetrafluoroethylene containers with sealing caps.

NOTE 1: The contamination level of these vessels must be

less than one fifth (1/5) of the expected contamination level

on the interleaf of leadframes when measured in a control test.

8.4 Water Bath — 300 mm L × 300 mmW × 200

mmH, filled with DI water, and capable of holding

95°C.

8.5 Constant Temperature and Humidity Chamber

8.6 Volumetric Dispenser — (e.g., Pipettes — 10 mL

and 100 mL capacity).

8.7 Quartz Flasks and Pipettes for Cation Standard

Solutions — 100, 250, 500, and 1000 mL capacity

(flasks); 1, 10, and 25 mL capacity (pipettes).

8.8 Borosilicate Glass Flasks and Pipettes for Anion

Standard Solutions — 100, 250, 500, and 1000 mL

capacity (flasks); 1, 10, and 25 mL capacity (pipettes).

8.9 Chemical Balance, Weighing Chemicals

8.10 Scissors, Tweezers, Spatula

9 Reagents and Materials

9.1 Deionized water, resistivity ≥ 15 megohm

centimeters at 25°C per ASTM D 1193.

9.2 Eluents and regenerants for specific chromatograph

columns prepared per chromatograph equipment

manufacturer’s recommendations so that the water peak

can be separated from the ionic peaks.

9.3 Compounds Required for the Preparation of

Standard Solutions

9.3.1 Cations — NaCl, NH

Cl, KCl.

9.3.2 Anions — NaCl, Na

HPO

•12H

O, NaBr,

NaNO

, K

NOTE 2: All compounds must be reagent grade.

10 Sampling

10.1 Sample Conditioning

10.1.1 In case of measurement of ionic contamination

transferred from the interleaves to the leadframes, select

a stack of ten (10) leadframe strips with their nine (9)

interleaves alternately, from the lot to be tested, and

place them horizontally into a chamber at 85 ± 5°C, 85

± 5% Relative Humidity for 24 hours.

10.2 Sample Selection

10.2.1 Recommended sample size of interleaf used in

interleaf extraction test is 10,000 sq. mm.

10.2.2 In the extraction procedure, do not use the top or

bottom leadframe strips in the stack.

NOTE 3: If a load is used to hold the stack together, it shall

be recorded as part of the conditions of test.

NOTE 4: The leadframe/interleaf contact area shall be

recorded. The vender and customer shall agree on the surface

area of the leadframes.

11 Preparation of Standard Solutions

11.1 Standard Solutions

11.1.1 The single ingredient standard solutions of each

ion (Na

, NH

, K

, Cl

, NO

, Br

, SO

, PO

)are

made by dissolving 1.000 g of each ion into 1.000 liter

of DI water, respectively. The stored multi-ingredient

standard solutions shown in Table 2 are then made from

these single ingredient standard solutions by the

dilution method.

Table 2 Concentration of Standard Solution for

Calibration

Standard Solution for

Calibration(ng/mL)

Ion Mixed Standard

Solution

(µg/mL)

I II III

10 5 10 20

Cation

10 5 10 20

4 10 20 40

10 25 50 100

4 10 20 40

Anion

4 10 20 40

11.1.2 Cation and Anion standard solutions for

calibration are made by diluting the stored multi-

ingredient standard solutions as shown in Table 2.