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SEMI E33-94 © SEM I 1994 4 Table 3 Ports f or Process, Measur ement and Co ntrol Lines, and Long Bus and Control Lines Test Type Spec ification Basic Standar d Re marks Perfor mance Criteria 3.1 Fast transien ts common m…

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SEMI E33-94 © SEMI 1994, 19963
5.1 Immunity Tests
Table 1 Enclosure Ports
Test Type Specification Basic Standard Remarks
Performance
Criteria
1.1 ESD immunity 4 kV Contact
8 kV Air discharge
IEC 801-2 (1991) See Appendices A and B A
1.2 Radiated immunity
Amplitude modulated
10 V/m
450-520 MHz
800-950 mHz
80% AM (1 kHz)
IEC 801-3 See facilities requirements
(See Section 5.1.1)
A
1.3 ELF immunity Level A - E as required ELF testing
(See Section 5.1.2)
Required only of ELF-
sensitive equipment
A
1.4 Radiated immunity
Pulse modulated
3 V/m
1.89 GHz
50% Duty cycle
100 Hz rep freq.
TC 65 (Sec.) 136
Draft
Europe only
Cellular phone band
A
5.1.1 Facilities Requirements — Due to the size and complexity of much semiconductor factory equipment, testing
in a shielded enclosure, anechoic chamber, or other special facility is not required. If such facilities can be used, the
results will be more reproducible and accurate.
Note that radiated immunity testing is required only at frequencies used for mobile communications. As shown in Table 1, Row
1.2. Testing should be conducted in conformance with national and local emission requirements at the frequencies specified (see
Appendix D).
5.1.2 ELF Testing — The following sensitivity levels are defined:
Level A — ELF of less than 0.25 milliGauss rms
Level B — ELF of less than 0.50 milliGauss rms
Level C — ELF of less than 1.00 milliGauss rms
Level D — ELF of less than 2.00 milliGauss rms
Level E — ELF of 2.00 milliGauss rms and greater
ELF sensitivity is to be determined by applying ELF through a coil or set of coils designed to produce a uniform
magnetic field at or near the power-line frequency at the position of maximum ELF sensitivity of the EUT. The
direction of the applied field shall be set to produce the maximum disturbance to the EUT. The field level shall be
determined using a calibrated ELF meter.
If allowable performance degradation is permitted at the higher ELF levels, the performance shall be specified at
each level.
Table 2 Ports for Signal Lines and Short Distance (< 30 m) Data Buses Not Involved in Process Control
Test Type Specification Basic Standard Remarks
Performance
Criteria
2.1 Fast transients
common mode
1 kV (peak)
5/50 Tr/Th ns
5 kHz rep. frequency
IEC 801-4
Capacitive clamp
Applicable to cables
whose length can exceed 3
m
B
2.2 Radio Frequency
common mode 1 kHz
80% AM
0.15-100 MHz
3 V (rms) (unmod)
150 Ω source impedance
IEC TC 65 (Sec.)
144
Applicable to cables
whose length can exceed 1
m
A
SEMI E33-94 © SEMI 1994 4
Table 3 Ports for Process, Measurement and Control Lines, and Long Bus and Control Lines
Test Type Specification Basic Standard Remarks
Performance
Criteria
3.1 Fast transients common
mode
2 kV (peak)
5/50 Tr/Th ns
5 kHz rep. frequency
IEC 801-4
Capacitive clamp
B
3.2 Radio Frequency
common mode 1 kHz 80%
AM
0.15-100 MHz
3 V (rms) (unmod)
150 Ω source impedance
IEC TC 65 (Sec.) 144 Applicable to cables whose
length can exceed 1m
A
Table 4 Input and Output DC Power Ports
Test Type Specification Basic Standard Remarks
Performance
Criteria
4.1 Fast transients common
mode
2 KV (peak)
5/50 Tr/Th ns
2.5 kHz rep. frequency
IEC 801-4 4 kV (peak) when coupling
with capacitive clamp
B
4.2 Radio Frequency common
mode 1 kHz 80% AM
0.15-100 MHz
3 V (rms) (unmod)
150 Ω source impedance
IEC TC 65 (Sec.) 144 Applicable to cables whose
length can exceed 1 m
A
Note: Direct injection method shall be used if current consumption is less than 100 A. This test is not applicable to input ports
intended for connection to dedicated non-rechargeable power supplies.
Table 5 Input and Output AC Power Ports
Test Type Specification Basic Standard Remarks
Performance
Criteria
5.1 Fast transients common
mode
4 kV (Peak)
5/50 Tr/Th ns
5 kHz rep. frequency
IEC 801-4 4 kV (peak) when coupling
with capacitive clamp
B
5.2 Radio Frequency common
mode 1 kHz 80% AM
0.15-100 MHz
150 Ω source impedance
IEC TC 65 (Sec.) 144 Applicable to cables whose
length can exceed1 m
A
5.3 Surge 4.0 kV IEC TC 65 (Sec.) 137 Use combination wave test
generator:1.2/50 µs open
circuit, 8/20 µs short circuit
wave form
C
5.2 Emissions Test
5.2.1 EMI Testing Required — Equi pment shall be tested in accordance with CISPR 22 and EN 55 022. Test limits
are Class A, which is generally limited to non-residential use.
As noted above for radiated immunity testing, the size and complexity of semiconductor factory equipment may rule
out the use of special facilities. Thus, the tests in CISPR 22 may be adapted as required due to test site limitations.
Again, use of such facilities will yield more reproducible and accurate data, and is recommended whenever possible.
In any event, emissions greater than 6 dB above the Class A limits are not allowed.
5.2.2 ELF Testing Required — ELF emission testing is required for all ELF-sensitive equipment, since such
equipment is commonly grouped together. ELF emission testing for other types of equipment is required on request
of a purchaser intending installation of ELF-sensitive equipment in the immediate vicinity.
SEMI E33-94 © SEMI 1994, 19965
ELF emissions shall be measured using a calibrated
ELF meter. Equipment emissions shall be measured at a
distance of 1.5 meters from the entire perimeter of the
EUT at a height of 1 meter. Facility ELF shall be
measured at a height of 1 meter in the region where
ELF-sensitive equipment installation is intended.
Measurement points shall be no greater than 0.5 meter
apart in the regions specified above. Facilities electrical
systems and adjacent equipment should be in normal
operation to assure accurate measurement of the actual
operating environment.
At each measurement point, the ELF sensor should be
oriented to produce the maximum reading. The
maximum from all the measurement points is then used
to determine the level from the table below:
Level A — ELF of less than 0.25 milliGauss rms
Level B — ELF of less than 0.50 milliGauss rms
Level C — ELF of less than 1.00 milliGauss rms
Level D — ELF of less than 2.00 milliGauss rms
Level E — ELF of 2.00 milliGauss rms and greater
6 Equipment Installation and Grounding
Special installation, power, and grounding requirements
necessary to meet this standard shall be thoroughly
documented by the equipment supplier. FIPS
Publication 94 and the IEEE Emerald Book are
suggested sources of information for recommended
practices in this area.
Removable shielded panels or doors that must be
properly secured to meet this standard should be labeled
“SECURE THIS PANEL TO REDUCE
ELECTROMAGNETIC EMISSIONS.” This labeling
requirement is not applicable to interlocked panels that
must be in place for the equipment to operate.
7 Documentation
Upon request of the purchaser a report of the test results
against this standard shall be furnished. Similarly, the
supplier may use this standard as a reference in
specifying the environmental requirements of
equipment.
8 Alternate Testing
Testing completed under a different, but substantially
similar standard may be substituted for the basic
standards specified herein if the performance criteria
and test levels are similar to those above. Such
substitution shall be noted in the test report, and must
be agreed to by the concerned parties. Examples
include substitution of ANSI C63.4-1991 testing for
CISPR 22.
Similarly, equipment which satisfies the European
EMC Directive and bears the CE mark meets this
specification.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.