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SEMI E26.1-92 © SEMI 1992, 2004 3 NOTICE: SEMI makes no warranties or representations as to the suitab ility of the standards set forth herein for any pa rticular application. The determination of the suitability o f the…

SEMI E26.1-92 © SEMI 1992, 2004 2

RELATED INFORMATION 1

NOTE: This related information is not an official part of

SEMI E26.1 but was reapproved for publication by full letter

ballot procedures on February 28, 1999.

R1-1 Interface Plane Reach Dimension

R1-1.1 The 320.0 mm slant distance adjacent to the

interface plane (see Figure 1 in SEMI E26)

accommodates the reach of the human arm and

therefore applies to the 200 mm standard and to the 300

mm standard (see Section 3.1).

R1-2 Large Modules

R1-2.1 Large modules such as batch process modules

can be accommodated in the region of the module

footprint defined by the width W2 (see Figure 1 in

SEMI E26). An increase in the slant distance between

X2 and X3 from 270.0 mm to 420.0 mm leads to an

increase in W2 sufficient to accommodate most large

modules (see Section 3.1).

R1-3 Selected Design Data

R1-3.1 The transport module handler extension is the

distance from the common point (see SEMI E26) to the

wafer transport position (defined in SEMI E22, "Cluster

Tool Module Interface: Transport Module End Effector

Exclusion Volume Standard"). The maximum extension

in millimeters is related to L, alpha, and the transport

maximum reach (specified as 380.0 mm in SEMI

E21.1, "Cluster Tool Module Interface 300 mm:

Mechanical Interface and Wafer Transport Standard")

by:

0.380



cot



R1-3.2 Transport module handler extensions and

module footprint dimensions (calculated from the

expressions in Table 1) for selected values of alpha are

given in Table R1-1. Alpha values corresponding to

values of N for an N-sided regular polygon transport

module are noted (see Section 3.2).

R1-4 Restriction on Alpha

R1-4.1 If  < 45˚ (N > 8 for an N-sided regular

polygon transport module), process modules must be

reduced in size or located further from the interface

plane than would be the case for 45˚    90˚.

Table R1-1 Module Footprint Dimensions and Transport Module Handler Extensions*

α(degrees) a

W1(mm) W2(mm) X1(mm) X2(mm) X3(mm) X4(mm) TMHE**(mm)

90 (N=4) 7.1 952.5 1546.5 226.3 725.4 1022.4 1160.3 640.0

84 7.4 928.2 1490.3 237.8 764.7 1076.8 1222.5 668.8

78 7.8 902.8 1431.4 248.7 808.4 1134.8 1289.7 701.1

72 (N=5) 8.1 876.2 1369.9 258.9 857.6 1197.4 1363.3 737.9

66 8.4 848.6 1306.1 268.4 914.0 1266.2 1445.2 780.4

60 (N=6) 8.7 820.0 1240.0 277.1 979.8 1343.5 1538.5 830.3

56 8.8 800.5 1194.8 282.5 1030.6 1401.4 1609.1 869.0

51.428 (N=7) 9.0 777.7 1142.1 288.3 1097.3 1475.7 1700.4 919.9

48 9.1 760.3 1102.0 292.3 1155.0 1538.7 1778.4 964.0

45 (N=8) 9.2 744.9 1066.4 295.6 1212.2 1600.3 1855.0 1007.7

* Calculated for L = 520.0 mm

** Transport Module Handler Extension

SEMI E26.1-92 © SEMI 1992, 2004 3

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E27-92 (Reapproved 1104)

STANDARD FOR MASS FLOW CONTROLLER AND MASS FLOW

METER LINEARITY

This standard was technically reapproved by the Facilities Committee and is the direct responsibility of the

North American Facilities Committee. Current edition approved by the North American Regional Standards

Committee in July 11, 2004. Initially available at www.semi.org September 2004; to be published November

2004. Originally published in 1992.

1 Purpose

1.1 The purpose of this standard is to establish a

uniform, worldwide definition of linearity in order to

prevent confusion and misunderstanding between

manufacturers and users of mass flow devices. A

linearity specification is used to allow prediction to a

known level of uncertainty, the output of an MFC at

points other than those at which its output is known.

2 Scope

2.1 The scope is to define the linearity of the mass flow

controller (controller with integral flow transducer and

control valve) and the mass flow meter (flow transducer

only). Terminal-based linearity is used to describe the

linearity of MFCs and MFMs.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Background

3.1 There are three commonly-used methods of

describing linearity: independent, zero-referenced, and

terminal-based linearity. Terminal-based linearity best

describes the performance requirements for MFCs and

MFMs because of its ease of application. In addition, it

also yields the maximum expression of deviation. See

reference documents regarding independent and zero-

referenced linearity.

4 Referenced Standards

4.1 IEC Standard

TC-65 — Industrial Process Measurement and Control

Terms and Definitions

4.2 ISA Standard

S51.1 — Process Instrumentation Terminology

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Definitions (See Figures 1 and 2)

5.1.1 actual flow — the gas flow as measured by an

external standard, not the electrical output of a mass

flow meter (see Section 4.2).

5.1.2 linearity — the closeness to which a curve

approximates a straight line. It is measured as a non-

linearity and expressed as a linearity (see Section 4.2).

5.1.3 lower range input value — lowest value of input

at which the instrument is specified to operate. In mass

flow controllers this is zero or the lowest set point at

which the instrument is specified. In mass flow meters

this is no flow or the lowest actual flow value at which

the instrument is specified.

5.1.4 range — the region between the limits within

which a quantity is measured, expressed by stating the

lower and upper range values (see Section 4.2).

5.1.5 span — the algebraic difference between the

upper and lower range values.

e.g.,

Range = 4% to 100%, Span = 96%

Range = 0% to 100%, Span = 100%

5.1.6 terminal-Based linearity — maximum deviation

of the calibration curve from a straight line which

intercepts the calibration curve at upper and lower input

range values.

5.1.7 upper range input value — Highest value of

input at which the instrument is specified to operate. In

mass flow controllers this is full scale or the highest set

point at which the instrument is specified. In mass flow

1 International Electrotechnical Commission, 3 rue de Varembe P.O.

Box 131

2 Instruments, Systems, and Automation Society, 67 Alexander

Drive, PO Box 12277, Research Triangle Park, NC 27709, Phone:

919-549-8411, Fax: 919-549-8288, http://www.isa.org

, CH-1211 Geneva 20, Switzerland Phone: 41 22 919 02 11,

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