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SEMI E109-0305 © SEMI 2001, 2005 15 10.4.3.1.2.2.2 HOLD — This is a substate of LOCK ED and is active when there are physical or logical mechanism s that prevent re moval of the pod engaged a nd the pod release flag is s…

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SEMI E109-0305 © SEMI 2001, 2005 14
10.4.3.1.1.1.2 AVAILABLE — This is a substate of NOT ACCESSED and is active when the reticle pod has been
received by the equipment but not opened.
10.4.3.1.1.2 IN ACCESS — This is a substate of RETICLE POD ACCESSING STATUS and is active when reticle
pod has been opened once, and the reticle pod should not be unloaded from the equipment. In this state the slot map
is read and reticles may be moved in and out of the reticle pod.
10.4.3.1.1.3 COMPLETE — This is a substate of RETICLE POD ACCESSING STATUS and is active when all
known activity, as defined by the ReticleTransferJob service, for the reticle pod has completed, or the PodComplete
service has been received, and the reticle pod has been closed. The reticle pod may be unloaded from the
equipment.
RETICLE POD ID STATUS
ID NOT READ
WAITING FOR
HOST ON ID
STATUS
ID
VERIFICATION
OK
ID VERIFICATION
FAILED
2
7
6
8
9
12
3
RETICLE POD SLOT MAP
STATUS
SLOT MAP NOT
READ
WAITING FOR
HOST ON SLOT
MAP STATUS
SLOT MAP
VERIFICATION
OK
SLOT MAP
VERIFICATI
ON FAILED
13
15
14
16
RETICLE POD
A
CCESSING STATUS
18
IN
A
CCESS
NOT ACCESSED
17
RETICLE POD LOCKING
STATUS
NOT LOCKED
LOCKED
24
POD
1
4
5
29
C
10
11
NOT
A
VAILABLE
AVAILABLE
20
c
19
COMPLETE
21
23
22
RELEASED
A
ND
LOCKED
HOLD
c
26
25
27
28
30
Figure 2
Reticle Pod State Model Diagram
10.4.3.1.2 RETICLE POD LOCKING STATUS — This is a substate of RETICLE POD and indicates the current
status of the pod with respect to removability.
10.4.3.1.2.1 NOT LOCKED — This is a substate of RETICLE POD LOCKING STATUS and is active when there
are no physical or logical mechanisms that prevent removal of the reticle pod by an external entity.
10.4.3.1.2.2 LOCKED — This is a substate of RETICLE POD LOCKING STATUS and is active when there are
physical mechanisms that prevent removal of the reticle pod by an external entity. It has two substates RELEASED
AND LOCKED and HOLD.
10.4.3.1.2.2.1 RELEASED AND LOCKED — This is a substate of LOCKED and is active when the pod may be
released by the equipment.
SEMI E109-0305 © SEMI 2001, 2005 15
10.4.3.1.2.2.2 HOLD — This is a substate of LOCKED and is active when there are physical or logical mechanisms
that prevent removal of the pod engaged and the pod release flag is set to host release and the PodRelease service
has not been received.
10.4.3.1.3 RETICLE POD ID STATUS — This is a substate of RETICLE POD and indicates the current status of
the pod with respect to its identifier. It has four substates, ID NOT READ, WAITING FOR HOST ON ID
STATUS, ID VERIFICATION FAILED, ID VERIFICATION OK. The initial substate is conditional based on
information the equipment has about the reticle pod. When the PodID is provided by the Bind, ReticleTransferJob,
or the PodNotification service, the reticle pod object shall be instantiated in the ID NOT READ substate. When the
PodID is provided by the PodID read, the reticle pod shall be instantiated in the WAITING FOR HOST ON ID
STATUS substate. When the Reticle Pod is instantiated by the ProceedWithPod service, the reticle pod shall be
instantiated in the ID VERIFICATION OK substate. Finally when the reticle pod is instantiated by the CancelPod
service, the pod will be instantiated in the ID VERIFICATION FAILED substate.
10.4.3.1.3.1 ID NOT READ — This is a substate of RETICLE POD ID STATUS. This state is active whenever the
PodID has not been read by the equipment.
10.4.3.1.3.2 ID VERIFICATION FAILED — This is a substate of RETICLE POD ID STATUS and is active when
the PodID has verification by the host with the CancelPod service. This is a final state.
10.4.3.1.3.3 ID VERIFICATION OK — This is a substate of RETICLE POD ID STATUS and is active as soon as
the PodID has been accepted. The ID is determined to be accepted by either successful verification by the
equipment or the host, or by bypassing ID read because a PodID reader is not available and the BypassReadID
variable is set to true. This is a final state.
10.4.3.1.3.4 WAITING FOR HOST ON ID STATUS — This is a substate of RETICLE POD ID STATUS and is
active during the period of time when the PodID has been read by the equipment successfully or unsuccessfully and
has not yet been verified.
10.4.3.1.4 RETICLE POD SLOT MAP STATUS — This is a substate of RETICLE POD and indicates the current
status of the reticle pod with respect to its slot map. It has four substates, SLOT MAP NOT READ, WAITING
FOR HOST ON SLOT MAP STATUS, SLOT MAP VERIFICATION FAILED, SLOT MAP VERIFICATION OK.
The initial default entry sub-state is SLOT MAP NOT READ.
10.4.3.1.4.1 SLOT MAP NOT READ — This is a substate of RETICLE POD SLOT MAP STATUS and is the
default entry state. It is active when the Reticle Pod is first loaded at the equipment until the Slot Map has been read
successfully by the equipment.
10.4.3.1.4.2 SLOT MAP VERIFICATION FAIL — This is a substate of RETICLE POD SLOT MAP STATUS and
is active when the Slot Map has been read by the equipment and has failed verification by the host. This is a final
state.
10.4.3.1.4.3 SLOT MAP VERIFICATION OK — This is a substate of RETICLE POD SLOT MAP STATUS and is
active as soon as the slot map has been verified. This is a final state.
10.4.3.1.4.4 WAITING FOR HOST ON SLOT MAP STATUS — This is a substate of RETICLE POD SLOT MAP
STATUS and is active when the equipment is waiting for input from the host.
SEMI E109-0305 © SEMI 2001, 2005 16
10.4.4 Reticle Pod State Transition Table
10.4.4.1 Table 7 indicates the triggers and the expected behavior of the instantiated reticle pod object.
Table 7 Reticle Pod State Transition Definition
# Previous State Trigger New State Actions Comment
1 (no state) A reticle pod is instantiated. RETICLE POD None. Data required to be available for
this event report:
PodID
2 (no state) Normal: A Bind,
ReticleTransferJob or
PodNotification service is
received.
ID NOT READ None. Data required to be available for
this event report:
PodID
3 (no state) Normal: A PodID not
currently existing at the
equipment is successfully
read.
Abnormal: A PodID is read
successfully but an equipment
based verification failed.
WAITING FOR
HOST ON ID
STATUS
None. Data required to be available for
this event report:
PodID
PortID
Normally, this transition will
happen after a successful ID read
if a bind or ReticleTransferJob
service has not been issued (host
based verification) or abnormally
if a bind or ReticleTransferJob
service is followed by a
successful ID read and an
unsuccessful equipment based
verification.
4 (no state) ID Read fail: A
ProceedWithPod service is
received.
ID
VERIFICATION
OK
A reticle pod is
instantiated having
the PodID provided
by the
ProceedWithPod
service.
Data required to be available for
this event report:
PodID
This transition can happen only if
a bind or ReticleTransferJob,
service has not been received.
5 (no state) ID Read fail: A CancelPod
service is received.
ID
VERIFICATION
FAIL
A reticle pod is
instantiated having
the PodID provided
by the Cancel Pod
service.
Data required to be available for
this event report:
PodID
This transition can happen only if
a bind or ReticleTransferJob
service has not been received.
6 ID NOT READ PodID is read successfully and
the equipment has verified the
PodID successfully.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
PodID
7 ID NOT READ PodID is read unsuccessfully. WAITING FOR
HOST ON ID
STATUS
None. Data required to be available for
this event report:
PortID
PodID
8 WAITING
FOR HOST
ON ID
STATUS
A ProceedWithPod service is
received.
ID
VERIFICATION
OK
None. Data required to be available for
this event report:
PortID
PodID