semi合集-English.pdf - 第6565页
SEMI G85-0703 © SEMI 2001, 2003 3 might be use d for example to represe nt versions of the map after each process step. 7.6.4 The Row items are define d as XML CDATA section. The example below shows the Data ite m for a …
SEMI G85-0703 © SEMI 2001, 2003 2
and nodes as long as the resulting document is well
formed XML and the elements, nodes and attributes
defined in SEMI G85 remain unaffected. The elements
of this template will be described in the sections that
follow. Examples of map data files with data are
shown in the appendices.
<? xml version=" 1.0" ? >
<Map
xmlns: " http://www.semi.org"
SubstrateType=" "
SubstrateId=" "
FormatRevision=" " >
<Device
ProductId=" "
LotId=" "
Orientation=" "
DeviceSizeX=" "
DeviceSizeY=" "
Rows=" "
Columns=" "
BinType=" "
FrameId=" "
NullBin=" "
SupplierName=" "
OriginLocation=" "
CreateDate=" "
LastModified=" "
Status=" " >
<ReferenceDevice
ReferenceDeviceX=" "
ReferenceDeviceY=" "
RefDevicePosX=" "
RefDevicePosY=" "
/>
<Bin
BinCode=" "
BinQuality=" "
BinDescription=" "
/>
<Data MapName=" " MapVersion=" " >
<Row><! [CDATA[]]></Row>
</Data>
</Device>
</Map>
7.3.1 The order of attributes and sub items within their
parent item is not significant but the parent child
relationship is. One exception is the Row items which
must match the actual rows on the substrate being
mapped.
7.4 Every map file starts with the declaration:
<? xml version=" 1.0" ? >
This line informs the parser that the data that follows
conforms to the XML Version 1.0 specification.
7.5 The data for each wafer is enclosed within the map
data item:
<Map xmlns: http://www.semi.org
SubstrateType=" Wafer"
SubstrateId =" ZSDGS88DF"
</Map>
7.5.1 The attribute setting, xmlns: “http://www.
semi.org” informs the parser that the item and attribute
names within this item are unique within the namespace
identified as SEMI.
7.5.2 All the attributes within the Map item are defined
in the SEMI G81.
7.5.3 All the items within the Map Item are defined in
this document.
7.5.4 Some of these attributes and items are mandatory
and some are optional as defined in Table 1.
7.5.5 One or more maps can be represented in a single
file by simply repeating the <Map> element. Each map
can be distinguished based on an identifier attribute as
shown in the following example:
<? xml version=" 1.0" ? >
<Maps>
<Map xmlns: " http://www.semi.org"
SubstrateType=" Wafer"
SubstrateId =" ZSDGS88DF"
</Map>
<Map xmlns: " http://www.semi.org"
SubstrateType=" Wafer"
SubstrateId=" JDUJ102MJS"
</Map>
</Maps>
7.6 The Map item contains one or more Device items.
This allows multiple overlaying maps of different
device types to be represented. The Device item
contains a number of attributes and some sub items.
7.6.1 The ReferenceDevice item contains attributes
which describe a single reference device. Several
ReferenceDevice items may be represented by
repeating this item with different attribute values.
7.6.2 The Bin item contains attributes which describe a
single bin code. Several Bin items may be represented
by repeating this item with different attribute values.
7.6.3 The Data item contains attributes and a list of
Row items. Several Data items may be represented by
repeating this item with different attribute values. This
SEMI G85-0703 © SEMI 2001, 2003 3
might be used for example to represent versions of the
map after each process step.
7.6.4 The Row items are defined as XML CDATA
section. The example below shows the Data item for a
binary map with two rows and two columns.
<Data>
<Row><! [CDATA[FFFF]]></Row>
<Row><! [CDATA[FF14]]></Row>
</Data>
7.6.4.1 A CDATA section contains data that should not
be parsed by the XML parser. After <! [CDATA[, only
the string ]]> will be interpreted by the XML parser. If
this string occurs in the actual data (for example in an
ASCII map) then it must be replaced by the string
]]> so that the XML parser will not interpret it as the
end of the CDATA section.
7.6.4.2 Each Row item specifies the BinCode for each
column in the row in a format that depends on the
BinType attribute.
7.6.4.3 The Row items must match the actual rows on
the substrate being mapped. The first row is the
topmost row as viewed with the substrate oriented
according to the value of Orientation.
7.6.4.4 The number of Row items must match the
Rows attribute if specified.
7.6.4.5 The number of columns in each Row item must
match the Columns attribute if specified.
Table 1 Items and Attributes Used
Name Item or
Attribute
Defined In Mandatory or
Optional
Default Value
xmlns Attribute Map Data Format Mandatory Must be “http://www.semi.org”
NullBin Attribute Map Data Items Mandatory No default
Map Item Map Data Format Mandatory No default
Device Item Map Data Format Mandatory No default
Data Item Map Data Format Mandatory No default
Row Item Map Data Format Mandatory No default
FormatRevision Attribute Map Data Items Optional Latest version of this standard
ProductId Attribute Map Data Items Optional “”
LotId Attribute Map Data Items Optional “”
Orientation Attribute Map Data Items Mandatory 0
WaferSize Attribute Map Data Items Optional 0
DeviceSizeX Attribute Map Data Items Optional 0
DeviceSizeY Attribute Map Data Items Optional 0
StepSizeX Attribute Map Data Items Optional 0
StepSizeY Attribute Map Data Items Optional 0
CassetteId
MagazineId
Attribute Map Data Items Optional “”
Rows Attribute Map Data Items Optional Can be derived from number of Row items
Columns Attribute Map Data Items Optional Can be derived from Row items
BinType (See Note 3.) Attribute Map Data Items Mandatory “ASCII”
ReferenceDevice Item Map Data Format Mandatory
(See Note 1.)
No default
ReferenceDeviceX Attribute Map Data Items Mandatory
(See Note 1.)
No default
ReferenceDeviceY Attribute Map Data Items Mandatory
(see Note 1)
No default
RefDevicePosX Attribute Map Data Items Optional 0.0
RefDevicePosY Attribute Map Data Items Optional 0.0
MapName Attribute Map Data Items Optional “”
MapVersion Attribute Map Data Items Optional “”
BinCode Attribute Map Data Items Optional 0
BinCount Attribute Map Data Items Optional 0
SEMI G85-0703 © SEMI 2001, 2003 4
Name Item or
Attribute
Defined In Mandatory or
Optional
Default Value
BinQuality Attribute Map Data Items Optional “”
BinDescription Attribute Map Data Items Optional “”
FrameId Attribute Map Data Items Optional “”
SupplierName Attribute Map Data Items Optional “”
OriginLocation Attribute Map Data Items Mandatory 0 (Center topside)
CreateDate Attribute Map Data Items Optional “”
Status Attribute Map Data Items Optional “”
Bin Item Map Data Format Optional No default
SlotNumber Attribute Map Data Items Optional 0
SubstrateNumber Attribute Map Data Items Optional 0
GoodDevices Attribute Map Data Items Optional 0
SubstrateType Attribute Map Data Items Mandatory
SubstrateId Attribute Map Data Items Mandatory
LastModified Attribute Map Data Items Optional
NOTE 1: There must be at least one ReferenceDevice item containing the ReferenceDeviceX and ReferenceDeviceY attributes.
NOTE 2: A substrate must have one and only one of these identifiers depending on the substrate type.
NOTE 3: Since XML is an ASCII only format BinType may only take the ASCII representation values “ASCII”, “Decimal”, “HexaDecimal”,
and not “Binary”.