semi合集-English.pdf - 第2643页
SEMI E94.1-1104 © SEMI 2001, 2004 4 Attribute Name Attribute Da ta Form: SECS-II Structure “MtrlOutByStatus” L,n n = num ber of status dispositions 1 . L,2 1. 51 (U1) MaterialStatus 1 2. L,2 DestinationMap 1 1. <CARRI…
SEMI E94.1-1104 © SEMI 2001, 2004 3
6.2.4 SECS-II Data Items without Corresponding SEMI E94 Parameters
6.2.4.1 Table 4 contains the SECS-II data items that do not correspond to SEMI E94’s service parameter.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
Used to identify control job commands. CTLJOBCMD
Used to satisfy SECS-II conventions for linking a multi block inquiry with
subsequent multi block message.
DATAID
6.2.5 Variable Data Item Mapping
6.2.5.1 Table 5 shows the specific SECS-II data classes, and formats needed for SECS-II implementations of SEMI
E94 variable data items.
Table 5 Variable Data Item Mapping
Variable Name Class Format
CtrlJobID DVVAL <OBJID>
QueueAvailableSpace SV 5() (U1, U2, U4, U8)
QueuedCJobs SV L,n n = number of queued control jobs
1. <CtrlJobID
1
>
…
n. <CtrlJobID
n
>
SetUpName ECV 20 (A[1..80])
Zero length string is used by the equipment to indicate “unknown”.
7 SECS-II Attribute Definitions
7.1 ControlJob Object SECS-II Attributes Definitions
7.1.1 The following are the SECS-II structure definitions for the E94 ControlJob Object.
Table 6 ControlJob Object Attribute Definitions
Attribute Name Attribute Data Form: SECS-II Structure
“ObjType” 20 (A) “ControlJob”
“ObjID” <OBJID> CtrlJobID (Conforms to the restrictions of ObjID as specified in SEMI
E39.1, Section 6.)
“CarrierInputSpec” L,n n = number of input carriers
1. <CARRIERID
1
>
…
n. <CARRIERID
n
>
“CurrentPRJob” L,n n = number of process jobs
1. <PRJOBID
1
>
…
n. <PRJOBID
n
>
“DataCollectionPlan” 20 (A) DataCollectionPlan
SEMI E94.1-1104 © SEMI 2001, 2004 4
Attribute Name Attribute Data Form: SECS-II Structure
“MtrlOutByStatus” L,n n = number of status dispositions
1. L,2
1. 51 (U1) MaterialStatus
1
2. L,2 DestinationMap
1
1. <CARRIERID
1,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
…
n. L,2
1. 51 (U1) MaterialStatus
n
2. L,2 DestinationMap
n
1. <CARRIERID
n,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
If m = 0, the substrates may be placed by the equipment in any available slot.
“MtrlOutSpec” L,p p = number of mapping source/destination pairs
1. L,2
1. L,2 SourceMap
1
1. <CARRIERID
1,1
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
2. L,2 DestinationMap
1
1. <CARRIERID
1,2
>
2. L,m m = number of slots
1. <SLOTID
1
>
…
m. <SLOTID
m
>
…
p. L,2
1. L,2 SourceMap
p
1. <CARRIERID
p,1
>
2. L,n n = number of slots
1. <SLOTID
1
>
…
n. <SLOTID
n
>
2. L,2 DestinationMap
p
1. <CARRIERID
p,2
>
2. L,n n = number of slots
1. <SLOTID
1
>
…
n. <SLOTID
n
>
SEMI E94.1-1104 © SEMI 2001, 2004 5
Attribute Name Attribute Data Form: SECS-II Structure
“PauseEvent” L,n n = number of collection events
1. <CEID
1
>
…
n. <CEID
n
>
“ProcessingCtrlSpec” L,p p = number of process jobs assigned to control job
1. L,3
1. <PRJOBID
1
>
2. L,m ControlRule
1
1. L,2
1. 20 (A) RuleName
1
2. (Any format) RuleValue
1
…
m. L,2
1. 20 (A) RuleName
m
2. (Any format) RuleValue
m
3. L,n OutputRule
1
1. L,2
1. 51 (U1) MaterialStatus
1
2. (Any format) OutputRuleValue
1
…
n. L,2
1. 51 (U1) MaterialStatus
n
2. (Any format) OutputRuleValue
n
…
p. L,3
1. <PRJOBID
p
>
2. L,m ControlRule
p
1. L,2
1. 20 (A) RuleName
1
2. (Any format) RuleValue
1
…
m. L,2
1. 20 (A) RuleName
m
2. (Any format) RuleValue
m
3. L,n OutputRule
p
1. L,2
1. 51 (U1) MaterialStatus
1
2. (Any format) OutputRuleValue
1
…
n. L,2
1. 51 (U1) MaterialStatus
n
2. (Any format) OutputRuleValue
n
ControlRule
1) m = 0 indicates no ControlRule specified
2) RuleName and RuleValue are equipment specific
OutputRule
1) n = 0 indicates no OutputRule specified
2) There is no defined OutputRuleValue. The content and format of OutputRuleValue
is equipment dependent per SEMI E94 intent.