semi合集-English.pdf - 第789页

SEMI E106-1104 © SEMI 2000, 2004 7 Table 1 Standa rds Specifying Ea ch Type of Product (D = Direct Specification, I = Indirect Specification) Type of Product and its Components SEMI M1.15, M8, or M28 (Wafer) SEMI E57 (Ki…

100%1 / 7923
SEMI E106-1104 © SEMI 2000, 2004 6
interbay load ports), by SEMI E15.1 (for its
manual/AGV/RGV load ports), by SEMI E85 (for its
interbay load ports), by SEMI E84 (for its carrier
handoff parallel I/O at either kind of load port) and by
SEMI E64 (for the cart docking interface exclusion
volume below each manual/AGV/RGV load port). The
carrier stocker is indirectly specified by the carrier
standards (for the volume required to store and transfer
the carriers).
7.4 Carrier ID — A carrier ID reader/writer unit is
directly specified by a future standard that specifies the
electronics and communication interface between a
carrier ID reader/writer and the equipment controller.
The carrier ID reader/writer unit is indirectly specified
by the carrier standards (which specify reserved areas
for carrier ID tags) and by SEMI E15.1 (for its
exclusion volume in each load port).
7.5 Load Port and Carrier Handler Modules — A box
opener/loader (the module on a piece of equipment that
includes load ports and carrier handling) is directly
specified by SEMI E57 (for the kinematic coupling pins
on the load port and on its shelves if it includes an
internal buffer in addition to its fixed buffer), by SEMI
E15.1 (for its load ports), by SEMI E62 (for its FIMS
door interface), by SEMI E84 (for its carrier handoff
parallel I/O), by SEMI E64 (for the cart docking
interface exclusion volume below each load port), by
SEMI E72 (for its limits on footprint, height, and
weight), and by SEMI E110 (for indicator/switch
placement). The module is indirectly specified by the
carrier standards (for the volume required to store and
transfer the carriers) and by SEMI E63 and/or SEMI
E92 (for the mechanical interface to the main part of the
process or metrology equipment that contains the
substrate handler).
7.6 Main Part of Process or Metrology Equipment —
The main part of process or metrology equipment
(including the substrate handler) is directly specified by
SEMI E63 and/or SEMI E92 (for the mechanical
interface to the module that includes load ports and
carrier handling) and by SEMI E72 (for its limits on
footprint, height, and weight). The substrate handler is
indirectly specified by SEMI E1.9 (for the features
inside most carriers) and it is recommended to follow
the direct specifications in SEMI E22.1 (which
specifies cluster-tool end effectors).
7.7 Material Handling Systems — A carrier transport
vehicle is directly specified by SEMI E57 (for the
kinematic coupling pins on the carrier nest, if any) and
by SEMI E84 (for its carrier handoff parallel I/O, if
any). The AMHS system is indirectly specified by the
carrier standards (for the volume required to hold and
transfer the carriers), by SEMI E15.1 (for equipment
load ports), by SEMI E85 (for stocker load ports, if it is
an OHT), by SEMI E72 (to allow for equipment height,
if it is an OHT), and by SEMI E64 and SEMI E83 (for
the cart docking interface exclusion volume and the
PGV docking flange, respectively, below each
equipment load port, if it is a floor based vehicle).
SEMI E106-1104 © SEMI 2000, 2004 7
Table 1 Standards Specifying Each Type of Product (D = Direct Specification, I = Indirect Specification)
Type of Product and its
Components
SEMI M1.15, M8, or M28 (Wafer)
SEMI E57 (Kinematic Coupling)
SEMI E1.9 (Cassette)
SEMI E47.1 (FOUP)
SEMI M31 (FOSB)
SEMI E103 (Single-Wafer Box System)
SEMI E62 (FIMS)
SEMI E63 (BOLTS-M) and/or E92 (BOLTS-Light)
SEMI E15.1 (Load Port)
SEMI E64 (Cart Docking Interface)
SEMI E83 (PGV Docking Flange)
SEMI E84 (Carrier Handoff Parallel I/O)
SEMI E99 & E99.1 (Carrier ID Reader/Writer Comm.)
SEMI E85 (Stocker to Interbay Transport System)
SEMI E22.1 (Cluster- Tool End Effector)
SEMI E21.1 (Cluster-Tool Module Interface)
SEMI E25 & E26.1 (Cluster-Tool Access & Footprint)
SEMI E72 (Equipment Footprint, Height, and Weight)
SEMI G74 (Tape Frame)
SEMI G77 (Frame Cassette)
SEMI E110 (Indicator/Switch Placement)
FOUP:
wafer supports I
coupling grooves I
inside features D D
outside features D
door D I
open cassette:
wafer supports I
coupling grooves I
other features D
shipping box:
wafer supports I
coupling grooves I
other features D
single-wafer box and
SWIF system:
wafer supports I
coupling grooves I
inside features D D D
outside features D D
door D D I
interbay transport
vehicle:
carrier supports D
carrier envelope I I
hand-off I/O I D
stocker load ports I
roller conveyor:
carrier rails I I
carrier envelope I I
equipment load ports I
hand-off I/O D
PGV:
carrier supports D
carrier envelope I I
carrier handler I I I
tool load port access I I
docking features I I
SEMI E106-1104 © SEMI 2000, 2004 8
Type of Product and its
Components
SEMI M1.15, M8, or M28 (Wafer)
SEMI E57 (Kinematic Coupling)
SEMI E1.9 (Cassette)
SEMI E47.1 (FOUP)
SEMI M31 (FOSB)
SEMI E103 (Single-Wafer Box System)
SEMI E62 (FIMS)
SEMI E63 (BOLTS-M) and/or E92 (BOLTS-Light)
SEMI E15.1 (Load Port)
SEMI E64 (Cart Docking Interface)
SEMI E83 (PGV Docking Flange)
SEMI E84 (Carrier Handoff Parallel I/O)
SEMI E99 & E99.1 (Carrier ID Reader/Writer Comm.)
SEMI E85 (Stocker to Interbay Transport System)
SEMI E22.1 (Cluster- Tool End Effector)
SEMI E21.1 (Cluster-Tool Module Interface)
SEMI E25 & E26.1 (Cluster-Tool Access & Footprint)
SEMI E72 (Equipment Footprint, Height, and Weight)
SEMI G74 (Tape Frame)
SEMI G77 (Frame Cassette)
SEMI E110 (Indicator/Switch Placement)
AGV or RGV:
carrier supports D
carrier envelope I I I
carrier handler I I I I
tool load port access I
hand-off I/O D
intrabay OHT vehicle:
carrier envelope I
carrier handler I
tool load ports I
hand-off I/O D
stocker load ports I
height I
carrier stocker:
carrier supports D
carrier envelope I I I
carrier handler I I I
floor based load ports D
PGV interface D
hand-off I/O D
carrier ID reader D
overhead load ports D
height and weight D
carrier ID reader unit:
ID tags on carrier I I I
volume in load port I
box opener/loader
unit:
carrier supports D
carrier envelope I I
FOUP door opener D
interface to rest of tool I
load ports D
PGV interface D
hand-off I/O D
carrier ID reader D
height and weight D
Indicator and switch D