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SEMI E30.5-0302 © SEMI 2001, 2002 10 Table 2 Processing State Events and Associated R eports CENAME From St ate To State Required DV VAL's or Reports END of RUN S TOPPING IDLE RUN complete report ava ilable. All job…

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SEMI E30.5-0302 © SEMI 2001, 20029
Transition # Current state Trigger New State Actions Comments
26 WORKING The processing of the
specific material being
processed ended
abnormally.
UNLOAD This material is
transferred from the
processing location.
Abnormal exit from
WORKING or Next
Material command
received.
27 ALIGN The material alignment
is complete.
MEASURING The equipment
determines if additional
sites are required.
None
28 TAKE
MEASURE-
MENT
All data collection has
been completed for the
current site or
alignment location.
MEASURE-
MENT
COMPLETE
The equipment
determine if additional
sites are required.
Determine if additional
alignments are required
or unload is required.
29 MEASURE-
MENT
COMPLETE
Additional sites are
required.
ALIGN The equipment moves
and aligns to new data
collection site.
None
30 TAKE
SAMPLE
Data collection from
scan or structure.
SAMPLE
COMPLETE
Determine if additional
samples are required.
None
31 SAMPLE
COMPLETE
Additional samples are
required.
TAKE SAMPLE Start collecting next
scan or structure data.
None
32 CHECKING Validation of Process
Program change fails or
is cancelled. Includes
PP_UPDATE.
PAUSED The equipment is
waiting for a new PP-
UPDATE or RESUME
command.
Process Program reverts
to the conditions that
existed prior to the PP-
UPDATE.
33 PAUSED The equipment receives
a PP-UPDATE
command.
CHECKING The equipment begins
validating the changes
made to the Process
Programs to be
executed.
None
34 TAKE
MEASURE-
MENT
Another measurement is
required at an alignment
location.
TAKE
MEASURE-
MENT
The equipment
performs a
measurement.
None
35 MEASURING An error or failure
occurred during the
measurement and a new
alignment is required.
ALIGN The equipment moves
and aligns to new data
collection site.
None
36 ALIGN An error or failure
occurred during
alignment and a new
alignment is required.
ALIGN The equipment moves
and aligns to new data
collection site.
None
37 ASSIST A failure occurred
while executing and
external assistance was
required to continue.
PROCESS
PAUSE
The execution is
stopped and equipment
waits for a resume
command.
Resume command must
be issued.
38 LOAD Previous PROCESS-
BLD-GROUP program
has completed and there
are additional process
programs assigned to
the “CARRIERBLD”.
See Section 12.
SETTING UP The equipment
performs set up
according to
specifications of the
next process program.
PROCESS-BLD-
GROUP may include a
AUTOSTART
command within its
body. Otherwise, the
equipment waits for a
START command.
SEMI E30.5-0302 © SEMI 2001, 2002 10
Table 2 Processing State Events and Associated Reports
CENAME From State To State Required DVVAL's or Reports
END of RUN STOPPING IDLE RUN complete report available.
All jobs specified by PROCESS-BLD-GROUP
command parameter(s) in a CARRIERBLD command
parameter complete.
END of JOB LOAD SETTING
UP
JOB complete report available.
A job specified by a PROCESS-BLD-GROUP command
parameter in a CARRIERBLD command parameter that
specifies multiple jobs for the same material completes.
END of SUBSTRATE UNLOAD LOAD SUBSTRATE complete report available.
END of SITE TAKE MEASURE MEASURE
COMPLETE
SITE complete report available. Only required if
supporting sampling.
END of SAMPLE TAKE SAMPLE SAMPLE
COMPLETE
SAMPLE complete report available. Only required if
equipment performs measurements on individual sites.
8 Collection Event List
8.1 The purpose of this section is to identify data collection events for Metrology equipment and define reporting
levels.
8.2 Requirements — Only those collection events that are not associated with a change of state, and those requiring
specific DVVAL's or Reports defined in the SEM, are required to be included in this section. All SEMI E30
required events are required by this SEM.
8.2.1 Common collection events collection events common to, and required on, all equipment of the class being
addressed.
8.2.2 Configuration-specific collection events collection events associated with a specific configuration of the
equipment class being addressed.
8.3 Collection Event Tables
The first table contains processing state event transitions and associated reports. The
second table contains additional events or actions and associated reports.
8.3.1 All remote commands (S2F41) that are not preformed by the equipment before responding to the host (S2F42)
must generate an event indicating when the task was completed and whether it was successful.
Table 3 Additional Required Collection Events
ACTION or COMPLETED EVENT Required DVVAL's or Reports
Remote command MAP-CASSETTE completed successfully. SlotList
Operator hits button on equipment control panel. OperatorAction
9 Data Item Variables
9.1 The purpose of this section is to define the list of data item variables pertinent to the specific equipment. Values
of these variables shall be available to the host via collection event reports and host status queries.
9.2 Requirement
all generic variable data items defined in SEMI E30 are required by all Measurement
equipment. Data item variables are categorized as follows:
9.2.1 Common Variables (CV) variables common to all equipment of the class being addressed. These variables
are covered in Table 4 and must be used to regardless of the measurement tool type.
9.2.2 Configuration-specific variables (CSV) variables associated with a specific configuration of the above
equipment class.
SEMI E30.5-0302 © SEMI 2001, 200211
9.2.2.1 The following rules should be adhered to in the reporting of these variables.
• The information should be sent using the corresponding formats defined on Table 4 and 5.
• For ASCII variables A[n]. If the actual data does not fill the entire field, blanks shall be used to complete the
field.
• For ASCII variables A[1..n]. All fields should be left justified.
9.3 Since MSEM is generic to all equipment it tries not to specify the names of the measurement variables to be
sent to the host. MSEM does require that the data be reported at site, wafer and lot levels. It should include the
option of reporting data at the individual scan level if supported by the equipment. It is a requirement that the
equipment report at least: max, min, mean, standard deviation. Additional statistic calculations may be added by the
equipment supplier. For each type of data collected by the equipment at the site level; the data must be summarized
and available for reporting at the wafer and lot levels.
9.4 The following rules should be applied when reporting measurement values taken by the tool. The rules specify
the units to be used whenever these values are reported.
• All values specified should be reported in floating point format.
• All critical dimensions (lines and spaces) should be in microns.
• All overlay measurements should be in microns.
• All FTIR transmittance values and corresponding wavelengths should be reported in percent units and microns,
respectively.
• All film stress values should be reported in teradynes/cm-cm.
• All resistivity measurements should be reported in Ohm-cm.
• All film thickness measurements should be reported in Angstroms.
9.5 Data item variables should be documented in the MSEM data item variable dictionary using the following
format:
Variable Name Category Description Class Format Comments
Where:
Variable Name: A unique name for the data item variable (this name is for reference only).
Category: Defined as Common or Configuration-Specific variables.
Description: If class is DVVAL, then the description must contain a statement of when data
is valid in terms of MSEM events.
Class: Data type of the item.
Format: Acceptable formats are SEMI E5 lists, ASCII, floating point, unsigned integer or
signed integer. A description of “ANY”, indicates that any of the above formats
are acceptable and is left to the tool vendor to decide. When required use SECS
Message Language format.
Comments: Any additional information pertinent to the variable name.
9.6 Data Item Variable Types
9.6.1 Equipment Constants (ECV) — can be changed by the host using S2F15. The operator may have the ability to
change some of the values, but the equipment does not change the values on its own. The value of the equipment
constant may be queried by the host at any time using the S2F13/14 transaction.