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SEMI E87-0705 © SEMI 1999, 2005 50 # Comment Dir Message LTS LCAS CIDS CSMS 17 Unloading transfer starts. H<-E TransferBlocked TB 18 Unloading transfer completes. H<-E ReadyToLoad RTL NA (T) (T) R1-2.5 Normal Round…

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SEMI E87-0705 © SEMI 1999, 2005 49
R1-2.3.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status
Table R1-3 Normal Roundtrip 2
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with
specified carrierID, and reserved for
loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR
5 CarrierID is verified by production
equipment, and result is OK.
H<-E IDVerificationOK
6 Carrier is docked.
7 Slot map is read.
SNR
8 Slot map is verified by production
equipment, and result is OK.
H<-E SlotMapVerificationOK
9 Process starts.
10 Process completes.
TB
11 Carrier is undocked. H<-E ReadyToUnload RTU
12 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
13 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)
R1-2.4 Normal Roundtrip 3
R1-2.4.1 Internal buffer production equipment, FOUP, Host based verification
R1-2.4.2 Indicated states: LTS = Load Port Transfer State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map
Status, LCAS = Load Port/Carrier Association State.
Table R1-4 Normal Roundtrip 3
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Loading transfer starts. H<-E TransferBlocked
2 Loading transfer completes.
NA (T) (T)
3 CarrierID is read. H<-E WaitingForHost
4 CarrierID is verified by host, and result is OK.
WFH
5 Host commands to proceed. H->E ProceedWithCarrier
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
SNR
9 Slot map is read at FIMS port. H<-E WaitingForHost
10 Slot map is verified by host, and result is OK.
WFH
11 Host commands to proceed. H->E ProceedWithCarrier
12 Process completes.
13 Carrier completes. H<-E CarrierComplete
NA
14 Host commands to carrier-out. H->E CarrierOut
RTL
15 Carrier-out starts. H<-E TransferBlocked TB
16 Carrier-out completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
A
IVO
SVO
SEMI E87-0705 © SEMI 1999, 2005 50
# Comment Dir Message LTS LCAS CIDS CSMS
17 Unloading transfer starts. H<-E TransferBlocked TB
18 Unloading transfer completes. H<-E ReadyToLoad RTL NA (T) (T)
R1-2.5 Normal Roundtrip 4
R1-2.5.1 Internal buffer production equipment, FOUP, Production equipment based verification, Bind service
received
R1-2.5.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-5 Normal Roundtrip 4
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with
specified carrierID, and reserved for
loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR
5 CarrierID is verified by equipment,
and result is OK.
H<-E IDVerificationOK
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
9 Slot map is read at FIMS port.
SNR
10 Slot map is verified by equipment,
and result is OK.
H<-E SlotMapVerificationOK
11 Process completes.
12 Carrier completes. H<-E CarrierComplete
13 Host commands to carrier-out. H->E CarrierOut
RTL
NR
NA
14 Carrier-out starts. H<-E TransferBlocked TB R
15 Carrier-out completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
16 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
17 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)
R1-2.6 Normal Roundtrip 5
R1-2.6.1 Assumptions: Fixed buffer production equipment, FOUP, Production equipment based verification,
Carrier Notification service received
R1-2.6.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status
Table R1-6 Normal Roundtrip 5
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. (T) (T)
1 Equipment is notified of future
Carrier arrival.
H->E CarrierNotification
RTL
2 Loading transfer starts. H<-E TransferBlocked TB
NR NA
INR SNR
SEMI E87-0705 © SEMI 1999, 2005 51
# Comment Dir Message LTS LRS LCAS CIDS CSMS
3 Loading transfer completes.
4 CarrierID is read.
5 CarrierID is verified by production
equipment, and result is OK.
H<-E IDVerificationOK
6 Carrier is docked.
7 Slot map is read.
8 Slot map is verified by production
equipment, and result is OK.
H<-E SlotMapVerificationOK
9 Process starts.
10 Process completes.
11 Carrier is undocked. H<-E ReadyToUnload RTU
12 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
13 Unloading transfer completes. H<-E ReadyToLoad RTL
NA (T) (T)
R1-2.7 Normal Roundtrip 6
R1-2.7.1 Internal buffer production equipment, FOUP, Production equipment based verification, CarrierNotification
service received.
R1-2.7.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-7 Normal Roundtrip 6
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. (T) (T)
1 Load port notified of future carrier
arrival.
H->E CarrierNotification
RTL
2 Loading transfer starts. H<-E TransferBlocked
3 Loading transfer completes.
NA
4 CarrierID is read.
INR
5 CarrierID is verified by equipment,
and result is OK.
H<-E IDVerificationOK
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
9 Slot map is read at FIMS port.
SNR
10 Slot map is verified by equipment,
and result is OK.
H<-E SlotMapVerificationOK
11 Process completes.
12 Carrier completes. H<-E CarrierComplete
13 Host commands to carrier-out. H->E CarrierOut
RTL
NR
NA
14 Carrier-out starts. H<-E TransferBlocked TB R
15 Carrier-out completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
16 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
17 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)