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SEMI E31-93 © SEM I 1993 4 NOTICE: Thes e standards do not purport to a ddress safety issues, if any, ass o ciated with their use. It is t he responsibility of t he user of these standards to establish appropriate safety…

SEMI E31-93 © SEMI 19933

APPENDIX

Examples of Wire Connection of Power Supply in Japan

Examples of Wire Connection of Power Supply in United States (Reference)

Notes: White wire connected at the grounded side. [White is also used for a neutral line (grounded side) in the U.S.] A single green wire other

than a cable is typically used for ground. In the case of a single wire, sometimes a black wire is substituted for blue. - - - - indicates that the wires

are normally grounded, with some exceptions. There are no special rules regarding colors of wires except a wire used for ground (green).

However, the figure shows common examples in Japan.

SEMI E31-93 © SEMI 1993 4

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E33-94 © SEMI 19941

SEMI E33-94

SPECIFICATION FOR SEMICONDUCTOR MANUFACTURING FACILITY

ELECTROMAGNETIC COMPATIBILITY

NOTICE: This standard does not purport to address

safety problems associated with its use. It is the

responsibility of the user of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to the

use.

1 Introduction

1.1 Purpose — The purpose of thi s specification is to

assure that semiconductor manufacturing facilities and

the equipment used for manufacturing semiconductor

devices will operate together reliably without failures

caused by electromagnetic interference or electrostatic

discharge. This goal is generally known as

“electromagnetic compatibility” or EMC.

1.2 Scope — This specification app lies to facilities

and equipment constructed for the purpose of

manufacturing semiconductor devices including all

facilities alarm, safety, communications and control

systems, processing equipment, metrology equipment,

automation equipment, and information technology

equipment.

1.3 Limitations — This specification does not apply to

the equipment and facilities used for the assembly and

functional testing of integrated circuits. This

specification does not apply to process-specific

charging that may occur to semiconductors under

manufacture.

2 Referenced Documents

2.1 ANSI, C63.4-1991

— America n National

Standard for Methods of Measurement of Radio-Noise

Emissions from Low-Voltage Electrical and Electronic

Equipment in the Range of 9 kHz to 40 GHz

2.2 CISPR, Publication 22, 19852

— Limits and

Methods of Measurement of Radio Interference

Characteristics of Information Technology Equipment

2.3 CENELEC, EN 55 022, 1987

— Modifications to

CISPR 22

1 IEEE Service Center, 445 Hoes Lane, P.O. Box 1331, Piscataway,

NJ 08855.

2 Sales Department of the Central Office of the IEC, P.O. Box 131, 3,

Rue de Varembe, 1121 Geneva 20, Switzerland. Some of the IEC

publications are available from the Sales Department, American

National Standards Institute, 11 W. 42nd Street, New York, NY

10036.

Draft British Standard EN 50 082-2

—

Electromagnetic Compatibility — Generic Immunity

Standard: Industrial (CLC/TC 110 (Sec) 44)

2.4 Emerald Book

— IEEE Reco mmended Practice

for Powering and Grounding Sensitive Electronic

Equipment, IEEE, 1992

2.5 EOS/ESD Association Advisory for Electrostatic

Discharge Terminology

— Glossary, 1992

2.6 FIPS (Federal Information Processing Standards)

Publication 94, 21 September 1983

— Guideline on

Electrical Power for ADP Installations

2.7 IEC 801-2, Second Edition, 1991-04

—

Electrostatic Discharge Requirements

2.8 IEC 801-3, First Edition, 1984

— Radiated

Electromagnetic Field Requirements

2.9 IEC 801-4, First Edition, 1988

— Electrical Fast

Transient/Burst Requirements

2.10 IEC TC 65 (Sec.) 137 (801-5) Committee Draft,

July 1992

— Surge Immunity Requirements

2.11 IEC TC 65 (Sec.) 144 (801-6) Committee Draft,

February 1992

— Immunity to Conducted

Disturbances Induced by Radio Frequency Fields above

9 kHz.

3 Terminology

3.1 earth port — European term fo r an equipment

ground. This term is used extensively in the basic

standards.

3.2 electromagnetic compatibility (EMC) — The

ability of electronic equipment to function properly

with respect to environmental EMI and ESD.

3.3 electromagnetic interference (EMI) — Any

electrical signal in the non-ionizing (sub-optical)

portion of the electromagnetic spectrum with the

potential to cause an undesired response in electronic

equipment.

3 Sales Administration (Drafts), BSI, Linford Wood, Milton Keynes

MK 14 6LE, United Kingdom.

4 EOS/ESD Association, Inc., 200 Liberty Plaza, Rome, NY 13440.

5 National Technical Information Service, U.S. Department of

Commerce, Springfield, VA 22161.