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SEMI E100-1104 © SEMI 2000, 2003 12 Table 3 Internal Dimensions Unique to the 230 mm RSP Symbol Used Figure Value Spe cified Reference Measured From Feature Measured To x 115 4 75.5 mm (2.972 in.) minimum bilateral refer…
SEMI E100-1104 © SEMI 2000, 2004 11
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
y139 1 140 ± 1 mm
(5.512 ± 0.039 in.)
facial reference plane surface of ID label
y140 9 108 mm (4.252 in.)
minimum
facial reference plane end of conveyor rail surface
y141 9 143 mm (5.630 in.)
maximum
facial reference plane edge of conveyor rail surface
y142 9 145.5 ± 1 mm
(5.728 ± 0.039 in.)
facial reference plane edge of conveyor rail surface
z2 None 2 mm (0.079 in.)
maximum
horizontal reference plane surface of info pads (when down)
z26 None 9 mm (0.354 in.)
minimum
horizontal reference plane surface of info pads (when up)
z50 5 5 mm (0.197 in.)
minimum
bottom of circular recess midpoint of circular recess
z149 3, 5 8 mm (0.315 in.)
maximum
bottom surface of robotic
handling flange
height of robotic handling flange
z154 3 55.6 mm (2.189 in.)
maximum
horizontal reference plane top surface of dome recess
z155 3 58.1 mm (2.287 in.)
maximum
horizontal reference plane top surface of dome
z156 3, 5 73.1 ± 0.5 mm
(2.878 ± 0.020 in.)
horizontal reference plane bottom surface of robotic handling
flange
z157 3 50.6 ± 0.5 mm
(1.992 ± 0.020 in.)
horizontal reference plane bottom edge of side handles
z158 3 58.1 mm (2.287 in.)
maximum
horizontal reference plane top surface of side handles
z159 4, 7 39.3 ± 0.5 mm
(1.547 ± 0.020 in.)
horizontal reference plane bottom surface of reticle
z160 4, 7 20.3 mm (0.799 in.)
maximum
horizontal reference plane edge of end-effector exclusion
volume
z161 4, 7 20.3 mm (0.799 in.)
maximum
horizontal reference plane edge of pellicle exclusion volume
z162 4, 7 42.3 ± 0.5 mm
(1.665 ± 0.020 in.)
horizontal reference plane reticle capture height
z163 None 20.3 mm (0.799 in.)
minimum
horizontal reference plane edge of transverse pellicle exclusion
volume
z166 3 30.6 mm (1.205 in.)
maximum
horizontal reference plane edge of side handling exclusion
volume
z167 4, 7 30 mm (1.181 in.)
maximum
horizontal reference plane edge of safety rail exclusion volume
z171 None 0.5 mm (0.020 in.)
maximum
horizontal datum plane conveyor rail surface
z180 3 27 mm (1.063 in.)
maximum
horizontal reference plane bottom edge of carrier ID exclusion
volume
z181 3 58.1 mm (2.287 in.)
minimum
horizontal reference plane top edge of carrier ID exclusion
volume
SEMI E100-1104 © SEMI 2000, 2003 12
Table 3 Internal Dimensions Unique to the 230 mm RSP
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
x115 4 75.5 mm (2.972 in.)
minimum
bilateral reference plane edge of pellicle exclusion volume
x116 4 107.5 mm (4.232 in.)
minimum
bilateral reference plane edge of end-effector exclusion
volume
x132 4 84 mm (3.307 in.)
maximum
bilateral reference plane edge of end-effector exclusion
volume
x137 4 124 mm (4.882 in.)
maximum
bilateral reference plane edge of safety rail exclusion
volume
x144 4, 6 115 mm (4.528 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
x146 4, 6 124 mm (4.881 in.)
minimum
facial reference plane edge of end-effector exclusion
volume
y129 6 75.5 mm (2.972 in.)
minimum
facial reference plane edge of transverse pellicle
exclusion volume
y136 6 124 mm (4.882 in.)
minimum
facial reference plane edge of end effector exclusion
volume
y144 6 105 mm (4.134 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
z164 4 48.3 mm (1.902 in.)
maximum
horizontal reference plane top of reticle supports
Table 4 Internal Dimensions Unique to the 6 inch RSP
Symbol Used Figure Value Specified Reference Measured From Feature Measured To
x118
7
71.2 mm (2.803 in.)
minimum
bilateral reference plane edge of end-effector exclusion
volume
x119
7
64.5 mm (2.539 in.)
minimum
bilateral reference plane edge of pellicle exclusion volume
x138 7 85 mm (3.346 in.)
maximum
bilateral reference plane edge of safety rail exclusion
volume
x143 7, 8 76.2 mm (3.000 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
x145 7, 8 85 mm (3.346 in.)
minimum
facial reference plane edge of end-effector exclusion
volume
y130 8 64.5 mm (2.539 in.)
minimum
facial reference plane edge of transverse pellicle
exclusion volume
y143 8 70.2 mm (2.764 in.)
maximum
facial reference plane edge of end-effector exclusion
volume
z165 7 45.6 mm (1.795 in.)
maximum
horizontal reference plane top of reticle supports
SEMI E100-1104 © SEMI 2000, 2004 13
APPENDIX 1
APPLICATION NOTES
NOTICE: The material in this appendix is an official part of SEMI E100 and was approved by full letter ballot
procedures on September 3 and December 15, 1999 by the North American Regional Standards Committee, but the
recommendations in this appendix are optional and are not required to conform to this standard.
A1-1 Edge contact only with the photomask is
preferred when handling, transporting, or storing.
A1-2 Skewness, warp, rock, and stiffness are implicitly
defined in the geometric tolerances.
A1-3 A 6 inch reticle with a 140 mm wide pellicle can
be accommodated in the RSP, but may require
automation which approaches from above the reticle.
A1-4 Features on the RSP which enable stacking may
be required by end users. It is preferred that these
features allowing stacking in only one orientation.
A1-5 Features on the RSP which provide visual
orientation of the RSP top and RSP door may be
required by end users.
A1-6 In order to permit end-effectors, which can
handle both 230 mm and 6 inch reticles, it is recom-
mended to include the 230 mm end-effector exclusion
volumes in RSPs configured for 6 inch reticles.