semi合集-English.pdf - 第380页

SEMI E52-0703 © SEMI 1995, 2003 16 Code Gas Name Symbol Formula Synonym Ref 53 Nitrogen Trifluoride NF3 NF 3 1 78 Nitrogen Trioxide N2O3 N 2 O 3 1 235 Nitromethane CH3NO2 CH 3 NO 2 2 141 Nitrosyl Chloride NOCl NOCl 1 27 …

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SEMI E52-0703 © SEMI 1995, 2003 15
Code Gas Name Symbol Formula Synonym Ref
115 Iodine Pentafluoride IF5 IF
5
1
323 Iodomethane CH3I CH
3
I Methyl iodide; Un 2644 2
230 Iron Carbonyl C5O5Fe Fe(CO)
5
2
111 Isobutane C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane or Propane, 2-
Methyl
1
106 Isobutene C4H8 (CH
3
)
2
C=CH
2
Isobutylene, Methylpropene 2
341 Isobutyl Alcohol C4H10O (CH
3
)
2
CHCH
2
OH 3
231 Isopentane C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane 2
187 Isopropal Alcohol C3H8O (CH
3
)
2
CHOH 2-Propanol 2
5 Krypton Kr Kr 1
329 Mercury Hg Hg UN 2809 2
28 Methane CH4 CH
4
1
176 Methanol CH4O CH
3
OH Methyl Alcohol 2
292 Methyl acetate C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
3
68 Methyl Acetylene C3H4 CH
3
C=CH Propyne 1
44 Methyl Bromide CH3Br CH
3
Br Bromomethane or Methane,
Bromo
1
36 Methyl Chloride CH3Cl CH
3
Cl Chloromethane or Methane,
Chloro
1
33 Methyl Fluoride CH3F CH
3
F Fluoromethane or Methane,
Fluoro
1
340 Methyl isopropyl ether C4H10O (CH
3
)
2
CHOCH
3
3
47 Methyl Mercaptan CH4S CH
3
SH 1
305 Methyl methacrylate polymer C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate); 2-
Methyl1-2-propenoic acid
2
339 Methyl propyl ether C4H10O CH
3
OC
3
H
7
3
81 Methyl Vinyl Ether C3H6O CH
3
OCH=CH
2
1
52 Methylamine CH5N CH
3
NH
2
Amino Methane,
Monomethylamine
2
120 Methylbutene C5H10 CH
3
CH
2
CCH
3
=CH
2
2-Methyl-1-Butene 1
177 Methylcyclohexane C7H14 CH
3
C
6
H
11
Hexahydrotoluene 2
268 Methylene Bromide CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide,
Dibromomethane
1
185 Methylsilane CH6Si CH
3
SiH
3
Monomethylsilane 2
183 Methyltrichlorosilane CH3Cl3Si CH
3
SiCl
3
MTS 2
124 Molybdenum Hexafluoride MoF6 MoF
6
2
233 Monoethylamine C2H7N C
2
H
5
NH
2
2
234 Monomethyl hydrazine CH6N2 CH
3
N
2
H
3
2
2 Neon Ne Ne 1
140 Nickel Carbonyl C4O4Ni Ni(CO)
4
1
346 Niobium Pentachloride NbCl5 NbCl
5
3
167 Nitric Acid HNO3 HNO
3
2
16 Nitric Oxide NO NO 2
13 Nitrogen N2 N
2
1
26 Nitrogen Dioxide NO2 NO
2
1
95 Nitrogen Tetroxide N2O4 N
2
O
4
Dinitrogenoxide 2
SEMI E52-0703 © SEMI 1995, 2003 16
Code Gas Name Symbol Formula Synonym Ref
53 Nitrogen Trifluoride NF3 NF
3
1
78 Nitrogen Trioxide N2O3 N
2
O
3
1
235 Nitromethane CH3NO2 CH
3
NO
2
2
141 Nitrosyl Chloride NOCl NOCl 1
27 Nitrous Oxide N2O N
2
O 1
236 Octafluorobutane C4F8 C
4
F
8
3
129 Octafluorocyclobutane C4F8 (CF
2
)
4
Perfluorocyclobutane or
Cyclobutane, Perfluoro
1
266 Octafluorocyclopentene C5F8 CF
2
=C(CF
3
)-CF=CF
2
3
237 Octane C8H18 CH
3
(CH
2
)
6
CH
3
2
15 Oxygen O2 O
2
1
238 Oxygen Dichloride OCl2 OCl
2
2
41 Oxygen Difluoride OF2 OF
2
1
179 o-Xylene C8H10 1,2-(CH
3
)
2
C
6
H
4
1,2-Dimethylbenzene 2
30 Ozone O3 O
3
1
142 Pentaborane B5H9 B
5
H
9
2
239 Pentaborane(11) B5H11 B
5
H
11
2
155 Pentafluoroethane C2HF5 CF
3
CHF
2
F-125, R-125 9
288 Pentafluoropropanol C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol,
1,1,1,2,2-Pentafluoropropane
2
240 Pentane C5H12 CH
3
(CH
2
)
3
CH
3
2
72 Perchloryl Fluoride ClO3F ClO
3
F 1
351 Perfluoro (Oxacyclopentane) C4F8O C
4
F
8
O 3
241 Perfluorobutane C4F10 C
4
F
10
3
128 Perfluoropropane C3F8 CF
2
(CF
3
)
2
1
180 Phenol C6H6O C
6
H
5
OH 2
60 Phosgene CCl2O CCl
2
O Carbonyl Chloride 1
31 Phosphine PH3 PH
3
1
102 Phosphorous Oxychloride POCl3 POCl
3
2
143 Phosphorus Pentafluoride PF5 PF
5
1
193 Phosphorus Trichloride PCL3 PCl
3
2
62 Phosphorus Trifluoride PF3 PF
3
1
89 Propane C3H8 CH
3
CH
2
CH
3
1
334 Propanoic acid C3H6O2 CH
3
CH
2
CO
2
H Propionic acid 3
293 Propenamine C3H7N C
3
H
7
N Allylamine; Monoallylamine; UN
2334
2
69 Propylene C3H6 CH
3
CH=CH
2
Propene 1
304 Pyridine C5H5N C
5
H
5
N Azabenzene; Azine 2
3 Radon Rn Rn 2
243 Rhenium Hexafluoride ReF6 ReF
6
2
325 Selenium hexafluoride SeF6 SeF
6
UN 2194; Selenium fluoride 2
39 Silane SiH4 SiH
4
1
278 Silicon tetrabromide Br4Si Br
4
Si SiBr4; Tetrabromosilane; Silicon
(IV) bromide
2
108 Silicon Tetrachloride SiCl4 SiCl
4
Tetrachlorosilane 2
SEMI E52-0703 © SEMI 1995, 2003 17
Code Gas Name Symbol Formula Synonym Ref
88 Silicon Tetrafluoride SiF4 SiF
4
1
245 Stibine SbH3 SbH
3
2
319 Styrene C8H8 C
8
H
8
Ethenylbenzene; Un 2055 2
32 Sulfur Dioxide SO2 SO
2
1
110 Sulfur Hexafluoride SF6 SF
6
1
189 Sulfur Monochloride S2Cl2 S
2
Cl
2
2
86 Sulfur Tetrafluoride SF4 SF
4
1
246 Sulfur Trioxide SO3 SO
3
2
171 Sulfuric Acid H2SO4 H
2
SO
4
2
87 Sulfuryl Fluoride SO2F2 SO
2
F
2
1
279 Tantalum (V) ethoxide C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5 2
274 TEAsat C6H15O4As (C
2
H
5
O)
3
AsO 1
247 Tellurium Hexafluoride TeF6 TeF
6
2
337 Tertiary Butyl Alcohol C4H10O (CH
3
)
3
COH 3
161 Tertiarybutylarsine C4H11As C(CH
3
)
3
AsH
2
TBA 8
162 Tertiarybutylphosphine C4H11P C(CH
3
)
3
PH
2
TBP 8
248 Tetrachlorodiborane B2Cl4 B
2
Cl
4
2
168 Tetrachloroethylene C2Cl4 Cl
2
C=CCl
2
Perchloroethylene or Ethylene,
Perchloro
2
144 Tetraethoxysilane C8H20O4Si (C
2
H
5
O)
4
Si TEOS 2
316 Tetraethyl lead C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN 1649 2
317 Tetraethyl silane C8H20Si C
8
H
20
Si Tetraethylsilane;
Tetraethylsilicon; (C2H5)4Si
2
315 Tetraethylgermane C8H20Ge (C
2
H
5
)
4
Ge (C2H5)4Ge; Germanium
tetraethyl
2
94 Tetrafluorethylene C2F4 F
2
C=CF
2
1
249 Tetrafluorodiborane B2F4 B
2
F
4
2
156 Tetrafluoroethane C2H2F4 CH
2
FCF
3
R-134A, F-134A 2
157 Tetrafluorohydrazine N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride 1
182 Tetrahydrofuran C4H8O C
4
H
8
O 2
282 Tetrakis( diethylamino )titanium C16H40N4Ti C
16
H
40
N
4
Ti 2
318 Tetrakis( dimethylamino )titanium C8H24N4Ti C
8
H
24
N
4
Ti 2
301 Tetramethoxy silane C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4);
Tetramethyl ester; Tetramethyl
silicate
2
299 Tetramethoxygermanium C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4 2
302 Tetramethyl lead C4H12Pb (CH
3
)
4
Pb (CH3)4Pb; Plumbane,
tetramethyl;
2
252 Tetramethyl Tin C4H12Sn (CH
3
)
4
Sn 2
158 Tetramethylcyclotetra-siloxane C4H16Si4O4 (CH
3
)
4
H
4
(SiO)
4
TOMCATS 7
250 Tetramethylgermanium C4H12Ge (CH
3
)
4
Ge 2
251 Tetramethylsilane C4H12Si (CH
3
)
4
Si 2
253 Tetrasilane Si4H10 Si
4
H
10
2
145 Tin Tetrachloride SnCl4 SnCl
4
Tetrachlorostannane 2
114 Titanium Tetrachloride TiCl4 TiCl
4
2
254 Titanium Tetraiodide TiI4 TiI
4
2