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SEMI E116-0705 © SEMI 2002, 2005 11 # PREVIOUS STATE TRIGGER NEW STATE ACTIONS COMMENTS 3 BUSY All EPT m odules that were BUSY with task t y pe of 1..5 transition either to IDLE or to BUSY with task type other than 1..5.…

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SEMI E116-0705 © SEMI 2002, 2005 10
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
8 IDLE Material arrives at the EPT
Module
i
and the EPT
Module
i
cannot begin
executing a task on the
material.
[OR]
A fault condition occurs
which prevents the EPT
Module
i
from starting a new
task.
BLOCKED
EPTStateChange
i
event is
triggered
EPTStateTime
i
is calculated
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTState
i
= BLOCKED
PreviousEPTState
i
= IDLE
9 BLOCKED Fault conditions occur that
prevent the EPT Module
i
from resuming a blocked
task, or starting a new task.
BLOCKED
EPTStateChange
i
event is
triggered
BlockedReason
i
is set
BlockedReasonText
i
is set
EPTStateTime
i
does not
change. Thus when the
module transitions out
of BLOCKED state, the
value of EPTStateTime
i
will reflect the total
time the module was
BLOCKED from
processing.
PreviousEPTState
i
does
not change. Thus,
PreviousEPTState
i
will
continue to reflect the
state of the module
before it was
BLOCKED from
processing.
9.6 EPT State Transition Table for Equipment
9.6.1 This section defines the State Transitions for the Equipment, in terms of its EPT modules.
Table 2 Basic EPT State Transitions — Equipment Level
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
1 (No state) Equipment initiation
completed (includes
initialization of EPT modules)
IDLE
[OR]
BLOCKED
[OR]
BUSY
EPTStateChange event is
triggered
EPTState = IDLE or
BLOCKED or BUSY
PreviousEPTState =
NoState
EPTStateTime = 0
BlockedReason may be
updated
BlockedReasonText may be
updated
2 IDLE At least one EPT module
transitions to the BUSY state
with task type of 1..5.
BUSY
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BUSY
PreviousEPTState
= IDLE
SEMI E116-0705 © SEMI 2002, 2005 11
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
3 BUSY All EPT modules that were
BUSY with task type of 1..5
transition either to IDLE or to
BUSY with task type other
than 1..5.
IDLE
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = IDLE
PreviousEPTState
=
BUSY
4 BUSY Any EPT module transitions to
BUSY state with task type 1..5.
BUSY
5 BUSY {
At least one EPT module
transitions to a BLOCKED
state and prevents another EPT
module from starting a new
task or completing an existing
task
[AND]
There are no other EPT
modules BUSY with task type
1..5.
} [OR] {
Any EPT module that was
BUSY with task type 1..5
transitions to either IDLE or
BUSY with task type other
than 1..5.
[AND]
There is at least one EPT
module in BLOCKED state
that is preventing another EPT
module from starting a new
task or completing an existing
task.
}
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BLOCKED
PreviousEPTState
=
BUSY
BlockedReason is set
BlockedReasonText is set
6 BLOCKED At least one EPT module
transitions to BUSY with task
type of 1..5.
BUSY
EPTStateChange event is
triggered
EPTStateTime is calculated
EPTState = BUSY
PreviousEPTState
=
BLOCKED
SEMI E116-0705 © SEMI 2002, 2005 12
# PREVIOUS
STATE
TRIGGER
NEW STATE ACTIONS COMMENTS
7 BLOCKED All BLOCKED EPT modules
that prevented another EPT
module from starting a new
task or completing a current
task no longer prevents the
EPT module from doing so.
[AND]
No EPT module is BUSY with
task type 1.. 5.
IDLE
EPTStateChange event is
triggered
EPTStateTime is
calculated
EPTState = IDLE
PreviousEPTState =
BLOCKED
8 IDLE Any EPT module transitions to
BLOCKED that prevents
another EPT module from
starting a new task.
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is
calculated
BlockedReason is set
BlockedReasonText is set
EPTState = BLOCKED
PreviousEPTState = IDLE
9 BLOCKED Any EPT module transitions to
BLOCKED that prevents or
continues to prevent another
EPT module from starting a
new task or completing a
current task.
BLOCKED
EPTStateChange event is
triggered
EPTStateTime is calculated
BlockedReason is set
BlockedReasonText is set
EPTStateTime does not
change. Thus when the
equipment transitions
out of BLOCKED state,
the value of
EPTStateTime will
reflect the total time the
equipment was
BLOCKED from
processing.
PreviousEPTState
does
not change. Thus,
PreviousEPTState
will
continue to reflect the
state of the equipment
before it was
BLOCKED from
processing.
10 EPTTracker Objects
10.1 The equipment shall provide SEMI E39-compliant EPTTracker objects to track performance of EPT
Equipment and Modules. The equipment shall provide one EPTTracker object for the equipment and one
EPTTracker object for each EPT Module (both Production and EFEM/LoadPort EPT Modules). The EPTTracker
object is used to maintain and update the SEMI E116 attributes each time an SEMI E116 transition occurs. These
EPTTracker objects will be owned at the equipment level. These objects shall be available immediately after
equipment initialization, and shall be persistent until equipment shutdown. If certain attributes are identified as
persistent, the object shall restore the value of these attributes on initialization. The Host can use SEMI E39 services
(e.g., GetAttr) to access EPTTracker objects. The EPTTracker object format is specified in Table 3.