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SEMI E81-0600 © 1999, 2 000 3 5.1.7 MMMS — Mater ial M ove men t M a nage ment Services (S EMI) 5.1.8 OBEM — Obj ect Based E quip m e nt Model 5.1.9 OMA — Obje ct Mana geme nt A r c h itect ure 5.1.10 PFC — P rocess Flo …

SEMI E81-0600 © 1999, 2000 2
• Adjusting the functional partitioning of the Domain
Architecture to reflect the final positioning of sub-
components in the anticipated revisions of the other
CIM Framework specifications.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E10 Standard for Definition and Measurement
of Equipment Reliability, Availability, and
Maintainability (RAM)
SEMI E30 Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E32 Material Movement Management
(MMM)
SEMI E42 Recipe Management Standard: Concepts,
Behavior, and Message Services
SEMI E58 Automated Reliability, Availability, and
Maintainability Standard (ARAMS): Concepts,
Behavior, and Services
SEMI E86 Provisional Specification for CIM
Framework Factory Labor Component
SEMI E93 Provisional Specification for CIM
Framework Advanced Process Control Component
SEMI E96 Guide for CIM Framework Technical
Architecture
SEMI E97 Provisional Specification for CIM
Framework Global Declarations and Abstract Interfaces
SEMI E102 Provisional Specification for CIM
Framework Material Transport and Storage Component
4.2 OMG Documents
1
CORBA Common Object Request Broker Archi-
tecture, Version 2.3.1 (OMG Document formal/99-10-
07).
MfgDTF Manufacturing Domain Task Force Road-
map, Version 3.1 (OMG Document mfg/98-06-11).
OMA Object Management Architecture Guide,
Version 3.0 (OMG Document ab/97-05-05).
UML UML Notation Guide, Version 1.1 (OMG
Document ad/97-08-05).
Workflow — Joint Workflow RFP Revised Submission
(OMG Document bom/98-06-07).
1 Object Management Group, 492 Old Connecticut Path,
Framingham, MA 01701, USA
4.3 SEMATECH Documents
2
CIMArch Computer Integrated Manufacturing
(CIM) Framework Architecture Concepts, Principles,
and Guidelines, Version 1.0 (SEMATECH-Technology
Transfer #97103379A-ENG).
CIMFW Computer Integrated Manufacturing (CIM)
Application Framework 2.0 (SEMATECH Technology
Transfer #93061697J-ENG).
4.4 Other References
ALBUS J.S. Albus and A.M. Meystel, A reference
model architecture for design and implementation of
intelligent control in large and complex systems,
International Journal of Intelligent Control and Systems
vol. 1, no.1 p.15−30, World Scientific: Singapore,
March 1996.
3
ANSI ANSI Standard ANSI/ISA-S88.01-1995,
Batch Control Part 1: Models and Terminology
4
COM+ http://www.microsoft.com/msj/1197/
complus.htm; http://www.microsoft.com/com/
5
DCOM http://www.microsoft.com/windows/down-
loads/bin/nts/dcom_architecture.exe.
5
JAVA http://www.javasoft.com.
6
WfMC http://www.wfmc.org.
7
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AMHS — Automated Material Handling System
5.1.2 APC — Advanced Process Control
5.1.3 APCFI — Advanced Process Control Framework
Initiative
5.1.4 API — Application Programming Interface
5.1.5 CIM — Computer Integrated Manufacturing
5.1.6 MES — Manufacturing Execution System
2 SEMATECH, 2706 Montopolis Dr., Austin, TX 78741, USA
3 World Scientific Publishing Co., 1060 Main St., River Edge, NJ
07661, USA
4 American National Standards Institute, 11 West 42nd St., New
York, NY 10036, USA
5 Microsoft, 10500 NE 8th St., Ste. 1300, Bellevue, WA 98004, USA
6 Sun Microsystems Inc., 901 San Antonio Road, Palo Alto, CA
94303, USA
7 Workflow Management Coalition Office, 2 Crown Walk,
Winchester, Hampshire, S022 5XE, United Kingdom

SEMI E81-0600 © 1999, 20003
5.1.7 MMMS — Material Movement Management
Services (SEMI)
5.1.8 OBEM — Object Based Equipment Model
5.1.9 OMA — Object Management Architecture
5.1.10 PFC — Process Flow Context
5.1.11 PFI — Process Flow Iterator
5.1.12 RFP — Request for Proposal
5.1.13 RMS — Recipe Management S ystem
5.1.14 UI — User Interface
5.1.15 WIP — Work In Process
5.2 Definitions
5.2.1 abstract interface — an interface defined outside
any component that generalizes common features of the
CIM Framework. The abstract interfaces are intended
for use in multiple components via interface inheritance
mechanisms.
5.2.2 application — 1. One or more programs
consisting of a collection of interoperating objects
which provide domain specific functionality to an end
user or other applications. 2. Functionality provided by
one or more programs consisting of a collection of
interoperating objects.
5.2.3 application framework — a framework that
constitutes an application or a set of applications for a
domain area.
5.2.4 application interface — the interface provided
by an application or application program.
5.2.5 application object — an object implementing an
application interface.
5.2.6 architecture — the structure of the components
of a program/system, their interrelationships, and
principles and guidelines governing their design and
evolution over time.
5.2.7 attribute — an identifiable association between
an object and a value. An attribute may have functions
to set and retrieve its value.
5.2.8 behavior — the effects of performing a
requested service including its results.
5.2.9 binding — a specific choice of platform
technologies and other implementation-specific criteria.
5.2.10 class — the shared common structure and
common behavior of a set of objects. Class often
implies an implementation of the common structure and
behavior while interface represents a specification of
those common features.
5.2.11 client — an object that uses the services of
another object by operating upon it or referencing its
state.
5.2.12 collection — an object containing references to
(collections of) other objects with services for
managing them and providing access to them as a
related group of objects.
5.2.13 component — a reusable package of
encapsulated objects and/or other components with
well-specified interfaces. The component is the element
of standardization and substitutability in the CIM
Framework.
5.2.14 Computer Integrated Manufacturing (CIM) —
an approach that leverages the information handling
capability of computers to manage manufacturing
information and support or automate the execution of
manufacturing operations.
5.2.15 conformance — adherence to a standard or
specification in the implementation of a product,
process, or service.
5.2.16 conformance requirement — identification in
the specification of behavior and/or capabilities
required by an implementation for it to conform to that
specification.
5.2.17 conforming implementation — an
implementation that satisfies all relevant specified
conformance requirements.
5.2.18 distributed system — an integrated collection of
several processing and memory components whose
distribution is transparent to the user so that the system
appears to be local.
5.2.19 domain interface — an interface specific to an
application subject area.
5.2.20 domain object — an object implementing a
domain interface.
5.2.21 events — an asynchronous message denoting
the occurrence of some incident of importance. For
example, state change or new object created.
5.2.22 event channel — the intermediate object that
forwards published events to interested subscribers.
5.2.23 exception — an infrastructure mechanism used
to notify a calling client of an operation that an unusual
condition occurred in carrying out the operation.
5.2.24 extensibility — the ability to extend or
specialize existing components and add new object
classes or components while preserving architectural
integrity and component conformance to standards.

SEMI E81-0600 © 1999, 2000 4
5.2.25 framework — a collection of classes or
components that provide a set of services and
functionality for a particular domain.
5.2.26 implementation — the internal view of a class,
object or module, including any non-public behavior.
The specific code and functionality that implements an
interface.
5.2.27 infrastructure — the services, facilities, and
communications mechanisms that support the collabor-
ation between and lifecycle of distributed objects.
5.2.28 inheritance — a relationship among classes
wherein one class (a subclass) shares the structure or
behavior defined in one or more other classes
(superclass). A subclass typically specializes its
superclasses by augmenting or redefining existing
structure and behavior.
5.2.29 instance — a software entity that has state,
behavior and identity. The terms instance and object are
interchangeable. An object is an instance of an interface
if it provides the operations, signatures and semantics
specified by that interface. An object is an instance of
an implementation if its behavior is provided by that
implementation.
5.2.30 interface — the external view of a class, object,
or module that emphasizes its abstraction while hiding
its structure and internal behavior. An interface
definition ideally includes the semantics.
5.2.31 interface inheritance — the construction of an
interface by incremental modification of other
interfaces (see implementation inheritance). The CIM
Framework specifies interface inheritance but not
implementation inheritance.
5.2.32 interoperability — the ability for two
applications or the parts of an application to cooperate.
In the CIM Framework, interoperability requires that
application components be able to share data, invoke
each others’ behavior (services), exchange events, and
publish service exceptions.
5.2.33 job — some system level operation whose
execution may be requested by an entity whose
responsibility it is to manage jobs. The job concept is
analogous to operations performed on the “factory
floor” in a physical factory. There, operators are
requested to perform operations (jobs) requested by
their managing supervisors or some other managing
source. A job often spans a significant amount of time
and multiple resources within the system. In the CIM
Framework, the job construct is intended for
specialization to enable specific job supervisors and
jobs to provide system solutions.
5.2.34 lifecycle — the life of an object, including
creation, deletion, copy, and equivalence.
5.2.35 method — an operation upon an object defined
as part of the declaration of a class. In general, the
terms message, method and operation can be used
interchangeably. Technically, a method is defined
within a class and an operation is defined within the
IDL. An operation is implemented by a method.
5.2.36 object — an identifiable encapsulated entity
that implements one or more services that can be
requested by a client. An instance of a class.
5.2.37 object services — interfaces for general
services that are likely to be used in any program based
on distributed objects.
5.2.38 Object Management Group (OMG) — an
international consortium dedicated to the development
of open specifications for distributed, heterogeneous,
object-oriented systems.
5.2.39 operation — an operation is an entity, identi-
fied by an operation identifier that denotes a service that
can be requested. An operation has a signature that
describes the legitimate values of request parameters
and returned results, including any exceptions.
5.2.40 persistent object — an object that can survive
the process or thread that created it. A persistent object
exists until it is explicitly deleted.
5.2.41 process definition — information characterizing
manufacturing processes including an estimate for the
time a process resource will be engaged in the process;
process resource settings; and the process capabilities
required for the process.
5.2.42 process flow — the part of a product
specification that defines the sequence of process steps
for the manufacturing of a specific product. The data
structure for representing a process flow is the directed
graph; specifically, a tree structure. The nodes of the
tree are called process flow nodes (see below). Services
are required to navigate the process flow.
5.2.43 process flow context — naviga tional
information pertaining to a product’s progress as it
traverses its context process flow.
5.2.44 process step — the smallest unit of processing
activity that can be defined in a process flow. One or
more process steps are sequenced to define an operation
set.
5.2.45 recipe — the pre-planned and reusable portion
of the set of instructions, settings and parameters that
determine how a job is to be performed. For example,
recipes are used to describe Process Steps and are
typically contained within a Product Specification.