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SEMI E127-0705 © SEMI 2003, 2005 51 Comments Client Dir IMM Comments ObjSpec = object specifier for IMM ObjType = “DataRow Tem plate” list of ObjID = (“MasterConvertedDataRow Template”) list of AttrName = (“DataInfoIDLis…
SEMI E127-0705 © SEMI 2003, 2005 50
RELATED INFORMATION 1
USE CASES AND SCENARIOS
NOTICE: This related information is not an official part of SEMI E127 and was derived from work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R1-1 Data Tables Objects
R1-1.1 Obtaining A Directory Of Existing Table Objects
R1-1.1.1 The scenario in Table R1-1 illustrates getting a directory of all IMM Data Table Objects using GetAttr.
Table R1-1 Getting a Directory of Tables
Comments Client Dir IMM Comments
1 GetAttr.req
ObjSpec = object
specifier for IMM
ObjType =
‘TableIMM_Data
list of AttrName =
(“Objtype”, “ObjID”)
GetAttr.rsp
list of ObjSetting = pairs o
f
ObjType, ObjID for all existing
tables.
R1-1.2 Getting Table Templates
R1-1.2.1 The client is able to obtain the Data Row Template and Data Information either from an actual table object
or for the Master Data Table Object of interest. In the example shown in Table R1-2, the client wants the
information from the Master Converted Data Table. The same scenario, with different values for ObjType and
ObjID, could be used to get the specific templates for an actual table object.
Table R1-2 Getting IMM Data Table Object Templates
Comments Client Dir IMM Comments
1 GetAttr.req
ObjSpec = object specifier for IMM
ObjType -=
“TableIMM_ConvertedData”
list of ObjID =
“MasterConvertedData”
list of AttrName =
(“RowTemplateID”)
GetAttr.rsp
list of ObjSettings =
(“RowTemplateID”,
“MasterConvertedDataRowTemplate”)
GetAttr.req
SEMI E127-0705 © SEMI 2003, 2005 51
Comments Client Dir IMM Comments
ObjSpec = object specifier for IMM
ObjType = “DataRow Template”
list of ObjID =
(“MasterConvertedDataRow
Template”)
list of AttrName =
(“DataInfoIDList”)
GetAttr.rsp
list of ObjSetting = (“DataInfoIDList”,
list of ObjIDs) for the set o
f
DataInformation Objects”_
GetAttr.req
All attributes of the
Data Information
object are requested
for all of these
objects.
ObjSpec = object specifier for IMM
ObjType = “DataRow_Template”
list of ObjID = same as contents o
f
DataInfoIDList
list of AttrName = (empty list)
GetAttr.rsp
list of ObjSetting = (((“ObjID”,
“LineWidth”)
(“Assurance”,assurance value),
“DataType”, “F16”), :
(“ObjID”, “Data Type”), (“Units”,
“micron”)),
....
(...)))
list of lists of
name/value pairs
for each supported
attribute for each
DataInformation
ObjID.
R1-1.3 Table Services
R1-1.3.1 A client wants to download a Raw Data Table from a previous run for analysis. Table R1-3 illustrates this
scenario.
Table R1-3 Sending a Table
Comments Client Dir IMM Comments
1 TableSend.req
ObjSpec = object specifier for the IMM,
TableType = “TableIMM_RawData”,
TableID = “P19343445-Lot103102#5”,
TableCmd = Entire table;
list of TableAttr = name/value attribute
p
airs;
list of ColHdr = list of names of column
headers; list of values for 50 rows
TableSend.rsp
TableAck = Success:
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R1-1.3.2 Requesting A Table — Table R1-4 illustrates a client’s request for a certain table.
Table R1-4 Requesting a Table
Comments Client Dir IMM Comments
1 TableRequest.req
ObjSpec = object
specifier for the IMM,
TableType =
“TableIMM_RawData”,
TableID = “P19343445-
Lot103102#5”,
TableCmd = Entire table;
TableRequest.req
ObjSpec = object specifier for the
IMM,
TableType =
“TableIMM_RawData”, TableID
= “P19343445-Lot103102#5”,
list of TableAttr = name/value
attribute pairs; list of ColHdr =
list of names of column headers;
list of values for 50 rows,
TableAck = Success
R1-1.3.3 Automatic Table Send — Table R1-5 illustrates the messaging for AutoTableSend.
Table R1-5 Automatic Table Send
Comments Client Dir IMM Comments
1 SetAutoTableSend.req
AutoSendRawData = False;
AutoSendConvertedData =
True,,
AutoSendCalibrationData =
False
SetAutoTableSend.rsp
Converted Data Table
“abc” completes.
Event.nfy IMMDTSM: T4
TableSend.req
ObjSpec = null string,
TableType =
“TableIMM_ConvertedData”,
TableID = “abc”, TableCmd =
Entire table; list of TableAttr =
name/value attribute pairs; list o
f
ColHdr = list of names of column
headers; list of values for 50 rows
TableSend.rsp
TableAck = success
R1-1.4 Typical IMM Data Table Object Sequence of Events
R1-1.4.1 Table R1-6 shows a typical sequence of event messages that occur during normal substrate processing. In
this example, an IMM Raw Data Table Object is created as soon as processing (measuring) begins. As soon as the
first row of this table is completed, an IMM Converted Data Table Object is created.