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SEMI S22-1103a © SEMI 2003, 2005 37 22.14.2 250N Steady Force Test — This test applies to deflection of electrical enclosure pa nels. 22.14.2. 1 Test Equipment — F o rce gauge. 22.14.2. 2 Procedure — The panel is to be s…
SEMI S22-1103a © SEMI 2003, 2005 36
22.11.1 Test Equipment None.
22.11.2 Procedure — For each independent safety interlock circuit (such as door safety interlock), EMO, and safety
sensor (e.g., exhaust sensor, low fluid level sensor), disconnect each safety interlock circuit one conductor at a time.
22.11.3 Acceptable Results The following sections provide the acceptable results for the applicable safety
circuits:
22.11.3.1 The opening of the safety circuit causes the equipment to be placed in a safe condition as if the safety
device had been actuated.
22.11.3.2 Reconnecting the conductor should not cause the system to resume operation.
22.12 Capacitor Stored Energy Discharge Test
22.12.1 Test Equipment Timer with accuracy of 1 seconds. DC voltmeter with sensitivity of 1.0 percent.
22.12.2 Procedure — Test each capacitor that stores a hazardous energy (20 Joules or more). Monitor the voltage
across the capacitor terminals continuously. Disconnect the equipment from the supply. Record the voltage across
the capacitor terminals after 10 seconds.
22.12.3 Acceptable Results The capacitor is discharged to less than 20 Joules within 10 seconds of equipment
disconnection from the supply.
NOTE 67: The following formula is provided to calculate the energy:
J = 1/2 CV
2
where: J is the energy in joules
C is the capacitance in farads
V is the potential in volts
EXCEPTION: This criterion does not apply if a tool is necessary to remove a panel to reach the capacitor and the
equipment is marked specifying the discharge time—5 minutes maximum—that is required for the capacitor to
discharge to less than 20 Joules.
22.13 Temperature Test
22.13.1 Test Equipment Timer with accuracy of 5 seconds. A thermometer with a full range of resolution and
an accuracy of 0.1C.
22.13.2 Procedure — The equipment is to be operated at the manufacturer’s maximum design load for 8 hours or
until thermal equilibrium is reached (whichever occurs first). Measure and record the ambient room temperature.
Measure and record the temperatures of the various components and devices for comparison with Appendix 1, Table
A1-11.
NOTE 68: Thermal equilibrium is attained when three successive readings taken at five minute intervals indicate that there is no
temperature change of the part exceeding 1.0C.
22.13.3 Acceptable Results The ambient temperature should be subtracted from 40°C or the maximum ambient
temperature specified in the manufacturer’s documentation, whichever is greater. This difference should be added
to all the measured temperatures and these results should not exceed the values listed in Appendix 1, Table A1-11.
22.14 Strength of Electrical Enclosures Test
22.14.1 30N Steady Force Test — This test applies to mechanical strength of enclosures.
22.14.1.1 Test Equipment — Force gauge.
22.14.1.2 Procedure — The enclosure walls and covers are to be subjected to a steady force of 30 N ± 3 N for a
period of 5 seconds applied by means of a straight un-jointed version of a test finger to the part, on or within the
complete equipment, or on a separate sub-assembly.
22.14.1.3 Acceptable Results — If the straight un-jointed version of the test finger penetrates the material or
opening, it should not be possible to touch any hazardous energized parts inside the enclosure with the jointed or un-
jointed test finger.
SEMI S22-1103a © SEMI 2003, 2005 37
22.14.2 250N Steady Force Test — This test applies to deflection of electrical enclosure panels.
22.14.2.1 Test Equipment — Force gauge.
22.14.2.2 Procedure — The panel is to be subjected to a steady force of 250 N ± 10 N (55.55 lbs. ± 2.22 lbs.) for a
period of 5 seconds, applied to the enclosure, fitted to the equipment, by means of a suitable test tool providing
contact over a circular plane surface 30 mm in diameter.
22.14.2.3 Acceptable Results — If flexing of the enclosure panel occurs, it should not cause shorting or reduction of
a clearance distance to less than that stipulated between the enclosure and hazardous energized parts inside.
22.15 Finger Probe Test
22.15.1 Test Equipment IEC Finger Probe (see IEC 61010).
22.15.2 Procedure — The jointed test finger is applied without force in every possible position to all outer surfaces,
including the bottom. Any enclosure panels that are not secured by a means that requires a tool to open are opened
and the finger probe is applied.
22.15.3 Acceptable Results If the finger probe cannot touch any conductive part that is energized with a
hazardous voltage under normal operating conditions, then this is an acceptable result.
22.16 Wire Flexing Test — This test applies to wiring that runs from a fixed panel to a swing panel or door and is
supplied with hazardous voltage or power.
22.16.1.1 Procedure — The swing panel or door is opened to its intended fully open position and then closed. This
process is repeated 500 times. After this is done a dielectric test is performed in accordance with Section 22.6 and
the wire is inspected for any signs of physical damage.
22.16.2 Acceptable Results — The wire passes the dielectric test and shows no visible signs of physical damage.
22.17 Reporting Test Results — include the following information on the test data form:
a) name, model, and serial number of the equipment,
b) date of test(s),
c) name(s)/signature(s) of tester(s),
d) complete test methods and conditions,
e) complete test results, and
f) complete test equipment information (type of test equipment, manufacturers' names, model numbers, serial
numbers, and calibration information).
22.17.1 The general configuration and actual operating mode that was used for the test should be clearly
documented. Where components are tested separately or only parts of the overall system are operational, this should
be documented as a condition for the test results reported. This information may be on the test data form(s) or
incorporated in the test report.
SEMI S22-1103a © SEMI 2003, 2005 38
APPENDIX 1
NOTICE: The material in this appendix is an official part of SEMI S22 and was approved by full letter ballot
procedures on September 3, 2003.
Table A1-1 Conductor Ampacity - Conductor Ampacity Table for Types TBS, SA, SIS, FEP, FEPB, MI, RHH,
RHW-2, THHN, THHW, THW-2, THWN-2, USE-2, XHH, XHHW, XHHW-2, ZW-2 or equivalent Insulation -
COPPER, 0-2000 volts, 30 Deg C ambient temperature.
Standard AWG 30 – 4: 0 percent Derated 1-3 Conductors
0% Derated
1 – 3 Current Carrying Conductors
Wire Size
Cross
Section
Area
Amps per Conductor
#1
Insulation Rating
Single Wire
Bending Space
Protective
Conductor
Wire size
Protective
Conductor
Cross
Section
Area
Metric AWG Sq. mm 60ºC 75ºC 90ºC 105ºC mm Inches Metric AWG Sq. mm
30
0.050 - 0.5 0.8 1 6.4 0.25
30
0.050
28
0.079 - 0.8 1 2 6.4 0.25
28
0.079
26
0.126 - 1 2 3 6.4 0.25
26
0.126
24
0.201 2 2 3 4 6.4 0.25
24
0.201
22
0.318 3 3 5 7 13 0.5
22
0.318
0.50
0.500 5 5 9 11 13 0.5
0.50
0.500
20
0.509 5 5 9 11 13 0.5
20
0.509
0.75
0.75 6 6 12 16 13 0.5
0.75
0.75
18
0.823 7 7 14 18 13 0.5
18
0.823
1.00
1.0 8 8 15 19 19 0.75
1.00
1.0
16
1.31 10 10 18 22 20 0.75
16
1.31
1.50
1.5 11 11 20 24 19 0.75
1.50
1.5
14
2.08 15 15 25 30 20 0.75
14
2.08
2.50
2.5 17 17 27 32 25 1.0
2.50
2.5
12
3.31 20 20 30 35 26 1.0
12
3.31
4.00
4.0 24 24 34 39 25 1.0
4.00
4.0
10
5.26 30 30 40 45 26 1.0
10
5.26
6.00
6.0 32 35 44 49 38 1.5
6.00
6.0
8
8.37 40 50 55 60 39 1.5
10
5.26
10.00
10.0 45 55 62 68 51 2
6.00
6.0
6
13.30 55 65 75 85 51 2
10
5.26
16.00
16.0 60 72 82 92 76 3
10.00
10.0
4
21.15 70 85 95 105 76 3
8
8.37
#1
Ampacity may be limited by terminal temperature rating.