semi合集-English.pdf - 第7915页
SEMI T14.1-0705 © SEMI 2005 4 4.17 µ m µ m µ m + 10% - 20% µ m + 10% - 20% µ m + 10% - 20% µ m + 10% - 20% + 10% - 20% 4.0 4.0 NOTE: Exampl e of circu lar do ts Figure 2 Cell Spacing NOTE: Example of circul ar dot Figure…
SEMI T14.1-0705 © SEMI 2005 3
5.3.3 The reference point shall be the physical center point of corner cell common to the primary border row and
the primary border column, as shown in Figure 4.
5.3.4 The maximum dot misalignment within a cell is 0.93 µm. This ensures that a minimum size dot covers a cell
central area of radius 0.67 µm.
5.4 Content of the Data Matrix Code Symbol
5.4.1 Each rectangle data matrix code symbol shall contain 22 message characters, together with the error checking
and correcting (ECC200) code characters, encoded in accordance with ISO/IEC ISS 16022.
5.4.2 The message characters shall include the following: A–Z, 0–9, and dash (–).
5.5 Location of the Data Matrix Code Symbol
5.5.1 With the wafer positioned front surface up and with the primary fiducial (notch) toward the operator, the
origin of the data matrix code symbol shall be located as specified below.
5.5.1.1 Circular Position — The reference point shall be located along the perimeter by 3.0 ± 0.1°
counterclockwise from the axis of the notch fiducial bisector, as shown in Figure 5.
5.5.1.2 Radial Position — The mark position of Micro ID is decided by the responsibility of Device Manufacturers
on the bevel area where the Micro ID is survived even after the CMP processing and the backside grind. Refer to
Related Information in Figure R1-2, for example.
5.5.2 The primary border row of the data matrix code symbol shall be placed toward the periphery of the wafers,
and the primary border column of the data matrix code symbol shall be placed toward the center of the wafers,
originating from the reference point.
26 Cells Per Row
C1C2
R1
R2
12 Cells Per
Column
C
L
C
L
C
L
C
L
C
L
C
L
C
L
C
L
26 Cells Per Row
C1C2
R1
R2
12 Cells Per
Column
C
L
C
L
C
L
C
L
C
L
C
L
C
L
C
L
Nominal Dimensions
(
µ
m)
R1 = 104.25
±
6%
C2 = 50.67
±
6% R2 = 109.05
±
6%
C1 = 45.87
±
6%
Figure1
Data Matrix Field Dimension
ECC200 – 12 Rows × 26 Columns
SEMI T14.1-0705 © SEMI 2005 4
4.17 µ m
µ
m
µ
m
+
10%
-
20%
µ
m
+
10%
-
20%
µ
m
+
10%
-
20%
µ
m
+
10%
-
20%
+
10%
-
20%
4.0
4.0
NOTE: Example of circular dots
Figure 2
Cell Spacing
NOTE: Example of circular dot
Figure 3
Dot shape Circle (Projected sectional area)
To Wafer Center
The Primary Border Row
Reference Point
The Primary Border Column
To Wafer Center
The Primary Border Row
Reference Point
The Primary Border Column
To Wafer Center
The Primary Border Row
Reference Point
The Primary Border Column
To Wafer Center
The Primary Border Row
Reference Point
The Primary Border Column
NOTE: Example of circular dots
Figure4
Data Matrix Code Fields
ECC200 – 12 Rows × 26 Columns
SEMI T14.1-0705 © SEMI 2005 5
Orientation Fiducial Axis
[011]
Notch
WAFER SURFACE
3.0 from
Orientation Fiducial Axis
Outer periphery of FQA
Edge Exclusive Area
Edge Profile region
Wafer Periphery
Orientation Fiducial Axis
[011]
±
1.0
º
Notch
WAFER SURFACE
3.0
±
0.1
º
from
Orientation Fiducial Axis
Outer periphery of FQA
Edge Exclusive Area
Edge Profile region
Wafer Periphery
ID Mark Area
R
ef
er
en
ce
P
o
i
n
t
Orientation Fiducial Axis
[011]
Notch
WAFER SURFACE
3.0 from
Orientation Fiducial Axis
Outer periphery of FQA
Edge Exclusive Area
Edge Profile region
Wafer Periphery
Orientation Fiducial Axis
[011]
Notch
WAFER SURFACE
3.0
±
0.1 from
Orientation Fiducial Axis
Outer periphery of FQA
Edge Exclusive Area
Edge Profile region
Wafer Periphery
ID Mark Area
R
ef
er
en
ce
P
o
i
n
t
Orientation Fiducial Axis
[011]
Notch
WAFER SURFACE
3.0 from
Orientation Fiducial Axis
Outer periphery of FQA
Edge Exclusive Area
Edge Profile region
Wafer Periphery
Orientation Fiducial Axis
[011]
±
1.0
º
Notch
WAFER SURFACE
3.0
±
0.1
º
from
Orientation Fiducial Axis
Outer periphery of FQA
Edge Exclusive Area
Edge Profile region
Wafer Periphery
ID Mark Area
R
ef
er
en
ce
P
o
i
n
t
Orientation Fiducial Axis
[011]
Notch
WAFER SURFACE
3.0 from
Orientation Fiducial Axis
Outer periphery of FQA
Edge Exclusive Area
Edge Profile region
Wafer Periphery
Orientation Fiducial Axis
[011]
Notch
WAFER SURFACE
3.0
±
0.1 from
Orientation Fiducial Axis
Outer periphery of FQA
Edge Exclusive Area
Edge Profile region
Wafer Periphery
ID Mark Area
R
ef
er
en
ce
P
o
i
n
t
NOTE: Figure 5 is not to scale.
Figure5 (Top view)
Data Matrix Code Location on Front Bevel Surface of Notched 300 mm Diameter Wafer