semi合集-English.pdf - 第1145页

SEMI E5-1104 © SEMI 1982, 2004 87 Stream,Function Name (Mnemonic) Direction S3,F5 Material Found Send (MFS) S,H<-E,[re ply] Description The equipment advises the host that unsolicited material has app eared at one of …

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SEMI E5-1104 © SEMI 1982, 2004 86
Stream,Function Name (Mnemonic) Direction
S3,F2 Material Status Data (MSD) M,H<-E
Description
Material-in-process information is sent from the equipment to the host. There are m locations.
Structure
L,2
1. <MF>
2. L,m
1. L,3
1. <LOC
1
>
2. <QUA
1
>
3. <MID
1
>
2. L,3
.
.
m. L,3
1. <LOC
m
>
2. <QUA
m
>
3. <MID
m
>
Exception
A zero-length list returned means no such data exists.
Stream,Function Name (Mnemonic) Direction
S3,F3 Time to Completion Request (TCR) S,H->E,reply
Description
Host requests the equipment to send the time-to-completion of operations on all material in possession.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F4 Time to Completion Data (TCD) M,H<-E
Description
Time-to-completion information is sent by the equipment to the host.
Structure
L,2
1. <MF>
2. L,m
1. L,3
1. <TTC
1
>
2. <QUA
1
>
3. <MID
1
>
2. L,3
.
.
m. L,3
1. <TTC
m
>
2. <QUA
m
>
3. <MID
m
>
Exception
A zero-length list header returned means no such data exists.
SEMI E5-1104 © SEMI 1982, 2004 87
Stream,Function Name (Mnemonic) Direction
S3,F5 Material Found Send (MFS) S,H<-E,[reply]
Description
The equipment advises the host that unsolicited material has appeared at one of its sensors.
Structure
L,2
1. <MF>
2. <QUA>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F6 Material Found Acknowledge (MFA) S,H->E
Description
Acknowledge or error
Structure
<ACKC3>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F7 Material Lost Send (MLS) S,H<-E,[reply]
Description
The equipment advises the host that material has disappeared from its sensors.
Structure
L,3
1. <MF>
2. <QUA>
3. <MID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F8 Material Lost Acknowledge (MLA) S,H->E
Description
Acknowledge or error
Structure
<ACKC3>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 88
Stream,Function Name (Mnemonic) Direction
S3,F9 Material ID Equate Send (IES) S,H<-E,reply
Description
Provide an alternative name to be used as equivalent to the original material ID.
Structure
L,2
1. <MID>
2. <EMID>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F10 Material ID Equate Acknowledge (IEA) S,H->E
Description
Acknowledge or error
Structure
<ACKC3>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F11 Material ID Request (MIDR) S,H<-E,reply
Description
The equipment requests the Material ID of the material at the specified port.
Structure
<PTN>
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F12 Material ID Request Acknowledge (MIRA) S,H->E
Description
The host acknowledges the request for the Material ID. If the use of a request/acknowledge/send/acknowledge conversation is
required, it indicated by the acknowledge code MIDRA = 2. In this case, the send/acknowledge transaction is S3,F13, S3,Fl4. A
timeout when electing S3,F13 is indicated by S9,F13 or a restart of the conversation, with S3,F11.
Structure
L,3
1. <PTN>
2. <MIDRA>
3. <MID>
Note: For all cases except MIDRA = 0 (accepted, <MID> follows), the <MID> will be
ignored by the receiver of message S3,F12. When MIDRA = 0, a zero-length MID
indicates that no MID is available.
Exception
None