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SEMI E81-0600 © 1999, 2 000 33 Resource Cont rol Task Specificati on Material MESFacto ry Ar ea Production Machine Process Resource Facto ry Job Area Job Pro duc tion Machine Job Process Resource Job Or der , Orde rItem …

Resource Control

Task

Specification

Material

MES Factory,

Area

Transport

and Storage

Resources

Factory Job,

Area Job

Transport

Job

Transport

and

Storage

Jobs

Product Group,

Lot,

Process Group

Transport

Group

Container

Destination

Transport

Machine

Equipment

Manufacturing

Execution

Figure 18

Hierarchical Job Control - Material Transport Aspects

Equipment

Enterprise

Manufacturing

Execution

Resource Control

Task

Specification Material

MESFactory

Area

Production

Machine

Process

Resource

Factory Job

Area Job

Production

Machine

Job

Process

Resource

Job

ProductGroup,

Lot, LotFamily,

Inventory Region

Inventory Region,

Process Group

Process

Group

Product Request,

ProductSpec.,

ProcessDefinition

Process Operation

Sequence

Process Operation

Sequence

Process Operation

Spec,

Process Operation

Enterprise Job

Enterprise

Order,

OrderItem

Process

Resource

Group

Figure 19

Hierarchical Job Control - Material Processing Aspects

Resource Control

Task

Specification Material

MESFactory

Area

Production

Machine

Process

Resource

Factory Job

Area Job

Production

Machine

Job

Process

Resource

Job

Order,

OrderItem

ProductGroup,

Lot, LotFamily,

Inventory Region

Inventory Region,

Process Group

Process

Group

Process

Resource

Group

Product Request,

ProductSpec.,

ProcessDefinition

Process Operation

Sequence

Process Operation

Sequence

Process Operation

Spec,

Process Operation

Enterprise Job

Enterprise

Product

Management

Specification

Recipe

Management

Factory

Operations

Process Machine,

Advanced Process Control

Factory

Resource,

Tracking and

Maintenance

Equipment,

Durables and

Consumables

Resource, Tracking

and Maintenance

Process Automation

(out of scope)

Enterprise

(out of scope)

Figure 20

Integrated Hierarchical Job Control

7.3.4.9.2 As Section 7.3.3.3 describes, each of these

job control views shows a job supervision function that

performs the tasks for each level of the factory resource

hierarchy.

7.3.4.9.2.1 Factory Job Supervision: Factory

Operations satisfies enterprise product requests. It

releases material and creates Factory Jobs which drive

material work-in-progress through its process flow. The

Factory Job Executor requests, schedules, monitors and

coordinates supporting jobs: production machine jobs,

transport jobs, maintenance jobs, etc.

7.3.4.9.2.2 Area Job Supervision: This optional level

serves Factory Operations and is responsible for

multiple machine activities (areas may map to bays, cell

controllers, linked lithography, etc.). This level is not

required, but is available for organizing large factories.

Area job supervision could support factories that have a

factory within a factory model with separate but

integrated operations management for separate units of

manufacturing capacity. It could also support factories

transitioning from legacy systems, with parts of the

factory under a CIM Framework-conformant MES and

other parts under a legacy MES that is fronted or

wrapped by a CIM Framework conformant Area Job

Supervisor component. Another example could be a

factory that provides a pseudo-cluster cell controller to

group stand-alone process equipment into an integrated

workcell that behaves like a cluster tool. The CIM

Framework does not specify separate Area Job

Supervision interfaces. These functions are met by the

Production Machine Job interfaces with no changethe

same interface serves both functional roles. Areas

typically receive a sequence of process jobs as a request

(implemented by requesting lower-level process jobs

and material transport jobs), whereas simple machines

usually receive a single process job (implemented

through direct interaction with process equipment).

7.3.4.9.2.3 Machine Job Supervision: This level lies

within the CIM Framework Production Machine

component. It accepts activities that apply to a single

Machine. It delegates work directly to the physical

equipment, either through some equipment interface

driver or directly through the GEM/SECS interface.

7.3.4.9.2.4 Transport Job Supervision: This level lies

within the Material Transport and Storage component.

It takes requests to move material from one location to

another. While the CIM Framework provides for layers

of Transport Job Supervisors in a complex interbay and

intrabay material handling system, today’s typical

installation has a single material handling system

controller (a single Transport Job Supervisor). Complex

production machines with internal material handling

and storage may also be Transport Job Supervisors.

7.3.4.9.2.5 Maintenance Job Supervision: Maintenance

is a preventive (scheduled) or reactive (repair on

failure) activity on specific resources (machines,

durables, etc.) using labor resources and materials.

Maintenance job progress is reported and tracked and

maintenance job history is stored. The generic Resource

Tracking and Maintenance component defines the

overall maintenance job supervision functions (see

Section 7.3.3.5), and the various resource types

implement these functions in the Equipment Tracking

and Maintenance, Durables Management, Consumables

Management, and Factory Labor components.

7.3.4.9.2.6 Advanced Process Control (APC): APC

includes lengthy calculation activities that may not

succeed and which impact the performance of other

jobs. For example, an algorithm may not converge, a

sensor may emit bad data, or process recipes and job

specifications may be modified. The CIM Framework

APC component leverages the overall job architecture,

where control strategies and scripts are the job

specifications, sensor analysis and control execution

environments are scheduled resources, and the state of

process specifications (machine settings, modified

process flows) are the result of APC job execution.

7.3.4.9.2.7 Enterprise and Process Resource: The job

control hierarchy of Figure 19 provides interfaces to the

enterprise at the top level and the equipment at the

bottom level. The enterprise level is the requestor of

work for the factory. Enterprise control is outside the

MES functional scope of the CIM Framework. The

equipment level is also outside the scope of control of

the CIM Framework. It is usually implemented by

process controllers embedded in or piggyback on

equipment. The equipment level is modeled for the

MES to allow process data to be collected and

organized for specific equipment resources such as a

specific chamber in a cluster tool.

7.3.4.10 Job History

7.3.4.10.1 Any entity can have an associated CIM

Framework History. The CIM Framework defines some

specific named histories, as Figure 21 illustrates.

Product-oriented data is captured in production history

associated with the material hierarchy and is used, for

example, for material traceability and defect analysis.

Process-oriented data is captured in process history

associated with the job supervision hierarchy and is

used, for example, for run-to-run process control.

Equipment and other resource-oriented data is captured

in resource history associated with the resource

hierarchy and is used, for example, for preventive

maintenance and warranty tracking.

7.3.4.10.2 As jobs are executed (and possibly broken

down into sub-tasks as shown in Figure 12), their

results are captured as various types of histories. For

example, an Area Job’s history may be captured within

an InventoryRegionHistory. A Resource Level Job’s

history may be captured within an E10Perform-

anceHistory or within a ResourceMaintenance-

LogHistory.

7.3.4.11 Task Specification and Workflow

7.3.4.11.1 The specification of a task takes various

forms. For Factory Jobs, the specification is the process

flow defining the process steps to transform material

into products. For Production Machine Jobs, the

specification is the specific steps in the process flow

that this production machine is to perform, along with

process recipes. For Transport Jobs, the specification

defines the destination location for the material

transport group. For maintenance jobs, the specification

defines the specific maintenance tasks for the resource.

For advanced process control jobs, the specification

defines a script that includes the sensor processing and

algorithm steps of a control strategy.

ProcessResourceHistory

(sequence of ProcessRun data)

productionHistory

E10PerformanceHistory

ControlDatabase

ControlArchive

InventoryRegionHistory

ResourceMaintenanceLogHistory

Production

Machine

Process

Resource

Factory Job

Area Job

Production

Machine

Job

Resource-

level job

Product Group

Lot, LotFamily

Inventory Region

Process

Resource

Group

Process Operation

Any object can have an

associated history

Person

QualificationHistory

Process Definition

Figure 21

History Structure